The invention relates to a mechanical valve assembly used to control a fluid (e.g., gas, liquid, etc.) to provide at least one of a check valve control feature and flow range control feature. When unwanted low flows are present, the valve remains closed and jumps open only at higher desired flow rates. The valve then closes when the forces at the input and output equalize, and the process repeats. Such allows fluid delivered to a flow meter in larger segregated bursts, rather than steady low flows that cause metering errors.

Vacuum machining system (1), comprising a vacuum chamber (10) and a vacuum regulating valve (20). The vacuum valve (20) has a first valve seat (21a), which has a first valve opening (22a) defining a first opening axis (O) and a first sealing surface extending around the first valve opening (O), and a first valve plate (23a) with a first contact surface corresponding to the first sealing surface. The vacuum machining system further comprises a drive unit (30), which is designed in such a way and is coupled to the first valve plate (23a) in such a way that the latter can be moved at least from an open position to a closed position and back again. The first valve seat (21a) is arranged within the vacuum chamber (10) and divides the vacuum chamber (10) into a main process chamber (11) for machining the substrate and into a secondary process chamber (12). The first sealing surface extends orthogonally to the first opening axis (O) and points in the direction of the secondary process chamber (12). The first valve plate (23a) is movably arranged in the secondary process chamber (12).

Vacuum machining system (1), comprising a vacuum chamber (10) and a vacuum regulating valve (20). The vacuum valve (20) has a first valve seat (21a), which has a first valve opening (22a) defining a first opening axis (O) and a first sealing surface extending around the first valve opening (O), and a first valve plate (23a) with a first contact surface corresponding to the first sealing surface. The vacuum machining system further comprises a drive unit (30), which is designed in such a way and is coupled to the first valve plate (23a) in such a way that the latter can be moved at least from an open position to a closed position and back again. The first valve seat (21a) is arranged within the vacuum chamber (10) and divides the vacuum chamber (10) into a main process chamber (11) for machining the substrate and into a secondary process chamber (12). The first sealing surface extends orthogonally to the first opening axis (O) and points in the direction of the secondary process chamber (12). The first valve plate (23a) is movably arranged in the secondary process chamber (12).

An automatic plate valve having a valve seat, a valve guard, a longitudinal axis (L) and a valve element arranged between the valve seat and the valve guard and movable along the longitudinal axis (L). The valve seat includes an end face having with valve seat openings oriented towards the valve guard, and a plurality of passages, which have a fluid-conducting connection to the valve seat openings. The valve element includes sealing element interacting with the valve seat openings. Wherein some of the passages have a different distance to the longitudinal axis in a radial direction (R). The end face of the valve seat including a plurality of grooved recesses, forming valve seat openings, with passages open into the same recess, the passages forming a fluid-conducting connection to the valve seat opening. Some of these passages connected to the valve seat opening have different distances to the longitudinal axis.

Poppet valve, plate valve, with a longitudinal axis (L), with a valve seat having a plurality of valve seat passage channels, with a catcher arranged at a distance from the valve seat in the direction of the longitudinal axis (L), and with a sealing element arranged movably between the valve seat and the catcher for opening and closing the valve seat passage channels. One of the valve components formed as the valve seat or the catcher having a plurality of passage channel limiting sections and a plurality of web portions, each extending mutually at an angle (α), wherein at least one of the valve components formed as valve seat or catcher is produced at least in sections by additive manufacturing, and wherein at least one of the passage channel limiting sections is dimensioned shorter in the direction of the longitudinal axis (L).

Poppet valve, plate valve, with a longitudinal axis (L), with a valve seat having a plurality of valve seat passage channels, with a catcher arranged at a distance from the valve seat in the direction of the longitudinal axis (L), and with a sealing element arranged movably between the valve seat and the catcher for opening and closing the valve seat passage channels. One of the valve components formed as the valve seat or the catcher having a plurality of passage channel limiting sections and a plurality of web portions, each extending mutually at an angle (α), wherein at least one of the valve components formed as valve seat or catcher is produced at least in sections by additive manufacturing, and wherein at least one of the passage channel limiting sections is dimensioned shorter in the direction of the longitudinal axis (L).

Poppet valve, plate valve, with a longitudinal axis (L), with a valve seat having a plurality of valve seat passage channels, with a catcher arranged at a distance from the valve seat in the direction of the longitudinal axis (L), and with a sealing element arranged movably between the valve seat and the catcher for opening and closing the valve seat passage channels. One of the valve components formed as the valve seat or the catcher having a plurality of passage channel limiting sections and a plurality of web portions, each extending mutually at an angle (α), wherein at least one of the valve components formed as valve seat or catcher is produced at least in sections by additive manufacturing, and wherein at least one of the passage channel limiting sections is dimensioned shorter in the direction of the longitudinal axis (L).

Poppet valve, plate valve, with a longitudinal axis (L), with a valve seat having a plurality of valve seat passage channels, with a catcher arranged at a distance from the valve seat in the direction of the longitudinal axis (L), and with a sealing element arranged movably between the valve seat and the catcher for opening and closing the valve seat passage channels. One of the valve components formed as the valve seat or the catcher having a plurality of passage channel limiting sections and a plurality of web portions, each extending mutually at an angle (α), wherein at least one of the valve components formed as valve seat or catcher is produced at least in sections by additive manufacturing, and wherein at least one of the passage channel limiting sections is dimensioned shorter in the direction of the longitudinal axis (L).

An automatic plate valve having a valve seat, a valve guard, a longitudinal axis (L) and a valve element arranged between the valve seat and the valve guard and movable along the longitudinal axis (L) The valve seat includes an end face having with valve seat openings oriented towards the valve guard, and a plurality of passages, which have a fluid-conducting connection to the valve seat openings. The valve element includes sealing element interacting with the valve seat openings. Wherein some of the passages have a different distance to the longitudinal axis in a radial direction (R). The end face of the valve seat including a plurality of grooved recesses, forming valve seat openings, with passages open into the same recess, the passages forming a fluid-conducting connection to the valve seat opening. Some of these passages connected to the valve seat opening have different distances to the longitudinal axis.

A valve includes a first plate, a side wall plate, a second plate, and a third plate. The first plate has a plurality of first vent holes. The second plate constitutes a valve chamber along with the first plate and the side wall plate. The second plate includes a second principal surface opposing a first principal surface of the first plate. The second plate has a plurality of second vent holes. The third plate has a plurality of third vent holes. The plurality of third vent holes overlaps with the plurality of first vent holes without overlapping with the plurality of second vent holes in a plan view in a direction in which the first plate and the second plate oppose each other. Both principal surfaces of the third plate oppose the first principal surface and the second principal surface. The third plate is disposed in the valve chamber.