A microchannel heat exchanger is configured for use as an evaporator in a fluid cooling system and includes an inlet header, an outlet header, and a plurality of microchannel tubes extending between and in fluid communication with the inlet header and the outlet header. A microvalve actuated hybrid spool valve is attached to and in fluid communication with the inlet header.

A thermal management device includes a microfluidic volume having a first peripheral side and a second peripheral side and including at least one thermal element, a first port to the microfluidic volume, a second port from the microfluidic volume, an inlet valve at the first port to the microfluidic volume, an outlet valve at the second port, and a valve piezoelectric element in mechanical communication with a portion of at least one of the inlet valve and the outlet valve to move at least the portion of the at least one of the inlet valve and the outlet valve and selectively allow fluid flow through the microfluidic volume.

A fluid system includes a fluid actuating region, a fluid channel, a convergence chamber, a sensor and a plurality of valves. The fluid actuating region includes one or a plurality of fluid-guiding units. Each of the fluid-guiding units includes an inlet plate, a substrate, a resonance plate, an actuating plate, a piezoelectric member and an outlet plate, which are stacked sequentially. When the piezoelectric member drives the actuating plate to undergo a bending vibration in resonance, the fluid is transported into the fluid-guiding units and is pressurized to be discharged out. The fluid channel has a plurality of branch channels for splitting the fluid transported in the fluid actuating region. The convergence chamber is in communication with the fluid channel. The sensor is disposed in the fluid channel for measuring the fluid within the fluid channel.

A method of cleaning contaminants, including particulate contaminants, from a valve in a fluid system includes moving a valve flow control element of the valve from a first position to a second position in response to a change in a condition in the fluid system other than a change in superheat.