A valve apparatus comprises a valve body defining a flow path therethrough, a valve member mounted within the valve body, and an actuator assembly mounted internally within the valve body. The actuator assembly comprises a piston bore and piston member defining a piston chamber therebetween, wherein at least one of the piston bore and piston member is engaged or associated with the valve member such that the valve member is moveable in accordance with fluid pressure within the piston chamber to selectively occlude the flow path.

The present disclosure provides a hydraulically controlled pressure relief valve without needing a hydraulic power unit. The valve maintains the accuracy of a hydraulically controlled valve by providing a self-contained closed hydraulic system built into the pressure relief valve. For safety, the valve can be kept open to call attention to the cause of the pressure relief valve activation, yet be easily reinstated into full service without replacing expendable components such as shear pins and rupture pins. The invention offers a pressure relief valve with accuracy, cost, and ease of use.

An actuator includes a housing defining an inlet port, a piston and a return spring disposed within the housing, and an elastically deformable element. The return spring is configured to apply a biasing force to the piston to move the piston to a spring return position. A first fluid pressure applied to the inlet port moves the piston against the biasing force of the return spring to a first actuated position in which the piston indirectly engages a stop portion of the actuator housing. A second fluid pressure, greater than the first fluid pressure, applied to the inlet port moves the piston against the elastically deformable element to compress the elastically deformable element to move the piston to a second actuated position beyond the first actuated position.

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

A technique facilitates actuation of a downhole device, e.g. a flow control valve. The downhole device is shifted between positions by an actuator piston, which is movable in a first direction via hydraulic actuating fluid supplied by a first control line and in a second direction via hydraulic actuating fluid supplied by a second control line. A hydraulic circuit is coupled between the first control line and the second control line to enable a complete stroke of the actuator piston in one direction, e.g. the second direction, while limiting movement of the actuator piston to incremental movements in the other direction, e.g. the first direction. The hydraulic circuit employs a hydraulic enabled regulator having a plurality of pistons arranged to control the supply of hydraulic actuating fluid to achieve the desired incremental movements of the actuator piston.

The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the gas flow unit and to the adjusting unit and thereby seal the inner volume, and a position determination unit which is arranged on or in the adjusting device and is adapted to determine a position of a part of the adjusting unit which has a fixed local relation to the plate.

Provided is an actuator including a ball-type thrust amplifier therein that controls a valve in which a high-pressure fluid flows, and having less wear between members and a long lifespan. This actuator for a valve includes a thrust amplification mechanism therein, in which the thrust amplification mechanism includes a disk, a ball presser, a stem, and a plurality of balls that are sandwiched by and in contact with an upper surface of the disk, a tapered surface of the ball presser, and a tapered surface of the stem and disposed to move outward as the stem moves downward, the surfaces of the parts constituting the thrust amplification mechanism are coated with grease containing an additive, and the additive of the grease includes at least chloroalkane.

An exhaust gas-conducting section of an exhaust turbocharger comprises a duct with a through-flow opening which can be fully or at least partially blocked or released by a closure element of a control device. The closure element is designed as a poppet valve. The closure element can be moved by an actuator can be disposed in a wall of the exhaust gas-conducting section. The closure element has a closure body with an annular section surface on its bottom surface which faces the through-flow opening. The section surface corresponds to an element seat formed in the wall. Its top surface faces away from the bottom surface and is designed in a profiled manner in order to produce a top surface at least partially corresponding to another element seat and/or to achieve flow-optimized circulation.

A fluid distribution system includes a mass flow controller and a first manifold assembly. The mass flow controller includes first and second end ports each extending from a lower end of the mass flow controller, proximate corresponding first and second sides of the mass flow controller, for lateral flow through the mass flow controller from the first end port to the second end port. The first manifold assembly includes a first end connection coupled to the first end port of the mass flow controller. The first manifold assembly includes a first manifold body extending parallel to the first side of the mass flow controller, and a plurality of first valve subassemblies retained in the first manifold body and arranged across a plane extending substantially parallel to the first side of the mass flow controller, with valve movement perpendicular to the first side of the mass flow controller.

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.