An electric valve, comprising a housing and an end cover. A cavity and a valve port are formed in the housing. The electric valve further comprises a rotor assembly, a rod assembly, and a valve core assembly; the rotor assembly is connected to one end of the rod assembly; and the other end of the rod assembly is connected to the valve core assembly. The electric valve further comprises a sealing component, and the sealing component is distant from the valve port with respect to the valve core assembly; the sealing component comprises a first cylindrical portion, a membrane portion, and an annular sealing portion; by providing the sealing component, the first cylindrical portion is connected to the rod assembly and a connection position is sealed.

The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the gas flow unit and to the adjusting unit and thereby seal the inner volume, and a position determination unit which is arranged on or in the adjusting device and is adapted to determine a position of a part of the adjusting unit which has a fixed local relation to the plate.

The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the gas flow unit and to the adjusting unit and thereby seal the inner volume, and a position determination unit which is arranged on or in the adjusting device and is adapted to determine a position of a part of the adjusting unit which has a fixed local relation to the plate.

A valve (1) for fluids, preferably for gases, comprises an inlet passage (2); an outlet passage (3); a shutter (4) interposed between the inlet passage (2) and the outlet passage (3) and movable between an open position and a closed position; actuating means (26,27). The valve (1) also comprises actuating means (26,27) operatively active on the shutter (4), which comprises an electromagnet (26) and a ferromagnetic element (27) that is movable as a function of the field generated by the electromagnet (26) for displacing the shutter (4) along the movement direction (L). In particular, the actuating means comprises a tubular body (5) made of non-magnetic material in which the ferromagnetic body (27) is inserted.

A valve body unit is configured to be disengaged from a stem by moving the stem and the valve body unit to a valve seat side in a state where a bonnet is separated from the valve seat, thereby pushing a replacement ring such that the replacement ring moves through the bonnet while decreasing in diameter and then drops down onto a ring dropping portion in the free state, then moving the stem, the valve body unit, and the replacement ring to an opposite side to the valve seat side such that a first surface comes into contact with a second surface and the ring dropping portion comes into contact with the replacement ring, and in this state, moving only the stem to the opposite side to the valve seat side such that the connection formed by a connecting mechanism between the stem connection portion and the stem is released.

A valve for a vacuum apparatus includes a first housing element and a second housing element wherein an outer chamber is defined by the first housing element and the second housing element. The first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber. An inner chamber is defined by the first housing element and the second housing element wherein a membrane is disposed in the inner chamber. A sealing element is connected to the membrane and is moveable from a first position to a second position wherein in the first position the sealing element closes the first opening in a leak-tight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve.

A valve for a vacuum apparatus includes a first housing element and a second housing element wherein an outer chamber is defined by the first housing element and the second housing element. The first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber. An inner chamber is defined by the first housing element and the second housing element wherein a membrane is disposed in the inner chamber. A sealing element is connected to the membrane and is moveable from a first position to a second position wherein in the first position the sealing element closes the first opening in a leak-tight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve.

A control valve body has a flow passage including an inlet, an outlet, a first portion, and a second portion, the first portion having a first axis centered through the inlet, a first bend, and a second axis, the second portion having a third axis centered through the outlet, a second bend, and a fourth axis, the fourth axis perpendicular to the second axis. The first portion is to an upstream side of a junction of the first portion and the second portion, and the second portion is to a downstream side of the junction. The second axis is centered through the junction. An opening to the second portion has a fifth axis aligned with the second axis.

A control valve body has a flow passage including an inlet, an outlet, a first portion, and a second portion, the first portion having a first axis centered through the inlet, a first bend, and a second axis, the second portion having a third axis centered through the outlet, a second bend, and a fourth axis, the fourth axis perpendicular to the second axis. The first portion is to an upstream side of a junction of the first portion and the second portion, and the second portion is to a downstream side of the junction. The second axis is centered through the junction. An opening to the second portion has a fifth axis aligned with the second axis.

[Object] A diaphragm can strongly be fixed to a flow path-side body by a diaphragm-holder, a thickness of the flow path-side body of an outer periphery of a diaphragm is thinned, and the flow path-side body is downsized.

[Solving Means] A diaphragm-holder abutting surface 75 is formed between a diaphragm-holder inner peripheral side ring-shaped projection 73 and a diaphragm-holder outer peripheral side ring-shaped projection 74, a diaphragm-holder inner peripheral side end surface 73s is abutted against a first fixed portion piston-side end surface 63Ap, a diaphragm-holder inner peripheral side outer peripheral surface 73o is abutted against a second fixed portion inner peripheral surface 63Bi, a diaphragm-holder outer peripheral side inner peripheral surface 74i is abutted against a body-side projection outer peripheral surface 16o, and the diaphragm-holder abutting surface 75 is abutted against the second fixed portion piston-side end surface 63Bp and a body-side projection end surface 16s.