F16K47/14

Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.

Valve trim

A fluid flow control device include a valve body including an inlet, an outlet, and a passageway extending between the inlet and the outlet. A valve trim is at least partially disposed in the passageway of the valve body. The valve trim includes a restrictor having a wall and a plurality of passages extending through the wall. A diffuser is coupled to the restrictor and including a porous body. The porous body is adjacent to the plurality of passages of the restrictor.

Valve trim

A fluid flow control device include a valve body including an inlet, an outlet, and a passageway extending between the inlet and the outlet. A valve trim is at least partially disposed in the passageway of the valve body. The valve trim includes a restrictor having a wall and a plurality of passages extending through the wall. A diffuser is coupled to the restrictor and including a porous body. The porous body is adjacent to the plurality of passages of the restrictor.

VALVE TRIM
20220325823 · 2022-10-13 ·

A fluid flow control device include a valve body including an inlet, an outlet, and a passageway extending between the inlet and the outlet. A valve trim is at least partially disposed in the passageway of the valve body. The valve trim includes a restrictor having a wall and a plurality of passages extending through the wall. A diffuser is coupled to the restrictor and including a porous body. The porous body is adjacent to the plurality of passages of the restrictor.

VALVE TRIM
20220325823 · 2022-10-13 ·

A fluid flow control device include a valve body including an inlet, an outlet, and a passageway extending between the inlet and the outlet. A valve trim is at least partially disposed in the passageway of the valve body. The valve trim includes a restrictor having a wall and a plurality of passages extending through the wall. A diffuser is coupled to the restrictor and including a porous body. The porous body is adjacent to the plurality of passages of the restrictor.

Attenuator dome for a ball valve

An attenuator dome for a ball valve includes a body defining an upstream surface and a downstream surface. The body has first and second attenuation sections. The first attenuation section has a single stage with a first plurality of passages extending from the upstream surface to the downstream surface. The second attenuation section has a first stage with a second plurality of passages extending from the upstream surface to a first plenum formed inside the body and a second stage with a third plurality of passages extending from the first plenum to the downstream surface. The single stage of the first attenuation section has first flow area percentage, the first stage of the second attenuation section has a second flow area percentage less than the first flow area percentage, and the second stage has a third flow area percentage greater than the second flow area percentage.

Attenuator dome for a ball valve

An attenuator dome for a ball valve includes a body defining an upstream surface and a downstream surface. The body has first and second attenuation sections. The first attenuation section has a single stage with a first plurality of passages extending from the upstream surface to the downstream surface. The second attenuation section has a first stage with a second plurality of passages extending from the upstream surface to a first plenum formed inside the body and a second stage with a third plurality of passages extending from the first plenum to the downstream surface. The single stage of the first attenuation section has first flow area percentage, the first stage of the second attenuation section has a second flow area percentage less than the first flow area percentage, and the second stage has a third flow area percentage greater than the second flow area percentage.

Valve Trim

A fluid flow control device include a valve body including an inlet, an outlet, and a passageway extending between the inlet and the outlet. A valve trim is at least partially disposed in the passageway of the valve body. The valve trim includes a restrictor having a wall and a plurality of passages extending through the wall. A diffuser is coupled to the restrictor and including a porous body. The porous body is adjacent to the plurality of passages of the restrictor.

Valve Trim

A fluid flow control device include a valve body including an inlet, an outlet, and a passageway extending between the inlet and the outlet. A valve trim is at least partially disposed in the passageway of the valve body. The valve trim includes a restrictor having a wall and a plurality of passages extending through the wall. A diffuser is coupled to the restrictor and including a porous body. The porous body is adjacent to the plurality of passages of the restrictor.

Noise reducing diffuser trim

A fluid valve includes a valve body having a fluid inlet and a fluid outlet connected by a fluid passageway. A valve seat is disposed within the fluid passageway. A fluid control member is movably disposed within the fluid passageway, the fluid control member cooperating with a trim assembly to control fluid flow through the fluid passageway. The trim assembly includes a cage having a plurality of openings that characterize fluid flowing through the cage and a plurality of vents that suppress noise generated by the plurality of openings.