The valve plate (1) with free micro-balls allows a fluid (2) to flow from an upstream volume (3) to a downstream volume (4) and not in the reverse direction, and comprises a circulation plate (5) crossed through by a circulation orifice (6) terminated by a micro-ball seat (7), a permeable guide plate (9) parallel to said plate (5) being crossed through by a guide cylindrical orifice (10) which houses a micro-ball (8) which rests on said seat (7) so as to close said orifice (6) or rests on a permeable micro-ball stop abutment (11), a spacer (12) being interposed between said plate (9) and said plate (5), a discharge passageway (13) crossing through said plate (9) to allow the fluid (2) to flow when the micro-ball (8) does not rest on said seat (7).

A system including a flow control assembly. The system may include a flow regulating shunt system, for various purposes such as a use as a hydrocephalus shunt. The flow control assembly may be controlled according to selected parameters and methods. These include controlling microelectromechanical (MEMS) system to control a pressure in the flow control assembly.

A fluidic cartridge comprises a fluidic disk having a plurality of alignment openings; a fluidic chip comprising a body, one or more channels formed in the body in fluidic communications with input ports and output ports for transferring one or more fluids between the input ports and the output ports, and a plurality of protrusions formed on the body and received in the alignment openings of the fluidic disk for aligning the fluidic chip to the fluidic disk; an actuator operably engaging with the one or more channels for selectively and individually transferring the one or more fluids through the one or more channels from at least one of the input ports to at least one of the output ports at desired flow rates; and a tube member defining a cylindrical housing for accommodating the fluidic disk, the fluidic chip and the actuator therein.

In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.

Disclosed is a system including a flow control assembly. The system may include a flow regulating shunt system, for various purposes. The flow control assembly may be controlled according to selected parameters and methods.

Disclosed is a system including a flow control assembly. The system may include a flow regulating shunt system, for various purposes. The flow control assembly may be controlled according to selected parameters and methods.

In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.

A microvalve comprising a hard base 14, a clamping plate 12, an inlet port 96, 98, an outlet port 96, 98, a membrane 16, a ball bearing 18 and a drive head 20; wherein the hard base comprises a recess over which the membrane is clamped by the clamping plate, the recess defining a cup with a generally spherical cap shaped surface and a perimeter, both of the inlet and outlet ports being in the recess, and at least one of them being in the generally spherical cap shaped surface; wherein the membrane extends across the recess and is clamped thereover, and it is flexible for enabling the unclamped part of it to be flexed into the recess by the ball bearing in the clamping plate on the other side of the membrane to the recess upon actuation by the drive head behind the ball bearing for selective driving of the ball bearing against the membrane to flex the membrane into the recess as the membrane flexes around part of the ball bearing to move the membrane from a condition in which both ports are open to a port closing condition, the port closing condition being where the membrane has been flexed to extend over either one of, or alternatively both of, the input port and the output port, and clamped thereagainst by the ball bearing.

A fluidic cartridge comprises a fluidic disk having a plurality of alignment openings; a fluidic chip comprising a body, one or more channels formed in the body in fluidic communications with input ports and output ports for transferring one or more fluids between the input ports and the output ports, and a plurality of protrusions formed on the body and received in the alignment openings of the fluidic disk for aligning the fluidic chip to the fluidic disk; an actuator operably engaging with the one or more channels for selectively and individually transferring the one or more fluids through the one or more channels from at least one of the input ports to at least one of the output ports at desired flow rates; and a tube member defining a cylindrical housing for accommodating the fluidic disk, the fluidic chip and the actuator therein.

The valve plate (1) with free micro-balls allows a fluid (2) to flow from an upstream volume (3) to a downstream volume (4) and not in the reverse direction, and comprises a circulation plate (5) crossed through by a circulation orifice (6) terminated by a micro-ball seat (7), a permeable guide plate (9) parallel to said plate (5) being crossed through by a guide cylindrical orifice (10) which houses a micro-ball (8) which rests on said seat (7) so as to close said orifice (6) or rests on a permeable micro-ball stop abutment (11), a spacer (12) being interposed between said plate (9) and said plate (5), a discharge passageway (13) crossing through said plate (9) to allow the fluid (2) to flow when the micro-ball (8) does not rest on said seat (7).