A glass body manufacturing apparatus includes: a first heating furnace including a furnace core tube accommodating the soot and a first heater, to supply a dehydration gas into the furnace core tube and heat the soot at a first treatment temperature lower than a softening point of the porous portion by the first heater; a second heating furnace including a structural body accommodating the soot and a second heater, to heat the soot at a second treatment temperature equal to or higher than the softening point by the second heater; and a conveyance container, connectable to each of the first and second heating furnaces while keeping airtightness with respect to the atmosphere, to accommodate and hold the soot, and convey the soot between the first and second heating furnaces.

A rapid thermal processing method and a rapid thermal processing device are provided. The rapid thermal processing method includes the following operations. A wafer is provided. A first heating operation is performed on the wafer to heat the wafer to a first temperature. The wafer is controlled to start rotating. The first temperature is maintained for a first predetermined time. A second heating operation is performed on the wafer to heat the wafer from the first temperature to a second temperature, and the second temperature is maintained for a second predetermined time. A third heating operation is performed on the wafer to heat the wafer from the second temperature to a third temperature, and the third temperature is maintained for a third predetermined time.

An impedance heated continuous emission monitoring system has a first terminal of an electric power source connected to an input end of a tube communicating an emissions stack with an emissions analyzer and a second terminal of the electric power source connected to an output end of the tube. An electric current produced by the electric power source flows through the tube and heats the tube by impedance. Heating the tube maintains the temperature of the emissions travelling through the tube from the stack to the emissions analyzer above a dew point temperature of the emissions.

A furnace working system includes a vacuumed pre-heating zone, a vacuumed gas heating zone disposed behind the pre-heating zone, a vacuumed electric heating zone, a high cooling zone disposed behind the electric heating zone, a low cooling zone disposed behind the high cooling zone, a conveyer disposed in the zones for transporting a work piece through the zones, a pipe couples the high cooling zone to the gas heating zone for supplying a heat from the high cooling zone to the gas heating zone, and a conduit couples the low cooling zone to the pre-heating zone for supplying a heat from the low cooling zone to the pre-heating zone. A transition zone is disposed between the gas heating zone and the electric heating zone.

The invention relates to a method and to a device for stabilizing precursor fibers for the production of carbon fibers. In the method, precursor fibers are first heated to a first temperature and held at the temperature for a predefined duration. Subsequently, the precursor fibers are heated to at least one second temperature, which is higher than the first temperature, and held at said temperature for a predefined duration. During each heating and between the heating steps, the precursor fibers are in a gas atmosphere having a negative pressure in the range between 12 mbar and 300 mbar and having an oxygen partial pressure of 2.5 to 63 mbar. The device has at least one evacuable, elongate vacuum chamber for feeding the precursor fibers through, at least two lock units and at least one heating unit. At least one lock unit is used for the sealed insertion of precursor fibers into the at least one vacuum chamber, while at least one other lock unit is used for the sealed removal of precursor fibers from the at least one vacuum chamber. The heating unit has at least two individually controllable heating elements, which are suitable for heating the at least one vacuum chamber to at least two different temperatures in heating zones which are adjacent in the longitudinal direction.

A furnace working system includes a vacuumed pre-heating zone, a vacuumed gas heating zone disposed behind the pre-heating zone, a vacuumed electric heating zone, a high cooling zone disposed behind the electric heating zone, a low cooling zone disposed behind the high cooling zone, a conveyer disposed in the zones for transporting a work piece through the zones, a pipe couples the high cooling zone to the gas heating zone for supplying a heat from the high cooling zone to the gas heating zone, and a conduit couples the low cooling zone to the pre-heating zone for supplying a heat from the low cooling zone to the pre-heating zone. A transition zone is disposed between the gas heating zone and the electric heating zone.

A reactive heat treatment apparatus is provided to treat a thin-film device. The reactive heat treatment apparatus includes a furnace pipe. The furnace pipe extends in a direction and has a first end and a second end. The furnace pipe further includes a high-temperature portion, a low-temperature portion, and a furnace door. The high-temperature portion is disposed close to the second end and configured to receive the thin-film device. The low-temperature portion is disposed close to the first end and provided with an airtight configuration. The furnace door is disposed close to the first end. An inner side wall of the low-temperature portion has a sunken portion. A height differential is formed between the sunken portion and an inner side wall of the high-temperature portion.

A heat treatment system includes heating chambers configured to perform heat treatment on objects to be treated, and a conveyance device configured to load each of the objects to be treated into the heating chambers, unload the object to be treated from the heating chambers, and convey the object to be treated under an oxygen-free atmosphere, wherein the conveyance device includes a cooling device configured to perform cooling treatment on the object to be treated.

A method for manufacturing a carbon fiber bundle includes a stabilization process of subjecting an acrylic fiber bundle to a heat treatment within a range of 200° C. to 300° C. in an oxidizing atmosphere; a pre-carbonization process of performing a heat treatment within a range of 300° C. to 1,000° C. using a heat treatment furnace having at least one inert gas supply port on each of an incoming side and an outgoing side of the fiber bundle and at least one exhaust port between the incoming-side and outgoing-side inert gas supply ports, the heat treatment being performed with a temperature of an inert gas supplied being higher on the outgoing side than on the incoming side; and a carbonization process of performing a heat treatment at a temperature of 1,000° C. to 2,000° C. in an inert gas atmosphere, in which from a position at which an atmospheric temperature in the heat treatment furnace is 300° C., the position being closest to the outgoing side in a machine length direction, up to the inert gas supply port on the incoming side, a flow of an inert atmosphere within the heat treatment furnace in the pre-carbonization process consists only of a flow in a parallel flow direction with respect to a travel direction of the fiber bundle in the machine length direction. Provided is a method for manufacturing a carbon fiber bundle by which manufacturing can be performed continuously for a long time by preventing entry into a temperature zone causing deposition of a gasified decomposition product, such as tar, that is generated at the time of the pre-carbonization treatment in manufacturing of carbon fibers and that stays within the heat treatment furnace.

A continuous nitriding treatment furnace includes a nitriding chamber, a heater, a first nitriding zone, and a second nitriding zone lower in atmosphere gas temperature than the first nitriding zone by 25° C. to 150° C., the continuous nitriding treatment furnace being configured such that an atmosphere gas in the first nitriding zone flows into the second nitriding zone and being configured to execute a nitriding treatment that forms an iron nitride compound layer composed of an ε phase or of the ε phase and a γ′ phase on a surface of the steel member in the first nitriding zone and precipitates the γ′ phase in the iron nitride compound layer in the second nitriding zone.