A substrate processing apparatus includes a bake chamber, a chamber door that opens and closes an opening of the bake chamber, a first support plate in the bake chamber, a first partition wall, which partitions a space provided on the first support plate into first heat treatment spaces spaced apart from each other in a first horizontal direction, and extends in a second horizontal direction and a vertical direction, first heat treatment modules arranged in the first heat treatment spaces, a first exhaust duct extending in the first horizontal direction across the first heat treatment spaces, a first sealing bracket coupled to the first exhaust duct, a first horizontal packing configured to seal a gap between the first sealing bracket and the chamber door, and a first vertical packing configured to seal a gap between the first partition wall and the chamber door.

Batch furnace assembly for processing wafers, comprising a process chamber housing defining a process chamber and having a process chamber opening, a wafer boat housing defining a water boat chamber, a door assembly, a differential pressure sensor, and a controller. The door assembly has a closed position in which it closes off the process chamber opening. The door assembly defines in a closed position a door assembly chamber having a purge gas inlet for supplying purge gas to the door assembly chamber for gas sealingly separating the process chamber from the wafer boat chamber. The differential pressure sensor assembly fluidly connects to the door assembly chamber and is configured to determine a pressure difference between a pressure in the door assembly chamber and a reference pressure in a reference pressure chamber. The controller is configured to establish whether the pressure difference is in a desired pressure range.

The present invention provides an electric furnace including: a cylindrical furnace wall; a furnace cover that is provided at an upper end of the furnace wall; and a furnace bottom that is provided at a lower end of the furnace wall and includes a deep bottom portion and a shallow bottom portion as a region having a height of 150 mm to 500 mm from a deepest point of the deep bottom portion, in which a slag pouring port into which molten slag or a solidified slag lump is capable of being poured from a slag transport container directly or through a tilting trough is provided, the slag pouring port overlaps the shallow bottom portion in a plan view, and the area ratio of the shallow bottom portion to the furnace bottom in a plan view is 5% to 40%.

A slag door arrangement (10) for a metallurgical furnace (1) includes a furnace vessel (2) with a slag tunnel (8) having a rectangular opening cross section extending laterally through the furnace vessel (2). A pivoting movement of the slag door about a horizontal pivoting axis and a lifting movement of the slag door in a direction perpendicular to the horizontal pivoting axis are independent of each other. A method for cleaning a slag opening of such a metallurgical furnace (1) includes pivoting the slag door to perform a cleaning movement from a position of the slag door in the slag tunnel near the interior of the furnace towards the outside of the furnace out of the slag tunnel at controllably different distances (clearances) from the bottom of the slag opening or of the slag tunnel.

A metal furnace header gate system haying a recirculation port in the furnace, a hot gas generator, a gas blower, and a furnace door. The door has an embedded gas manifold and outlet ports that each connect the manifold to a directional nozzle. The blower draws exhaust from the recirculation port into the hot gas generator, which generates additional exhaust and mixes the exhaust gases together. The blower forces this exhaust mixture into the manifold, through the nozzles, and into the furnace. A computer controls the blower and the hot gas generator to regulate the system.

A sintering apparatus is provided. The sintering apparatus includes a case having an internal space formed therein and including a door provided in a front portion thereof to open and close the internal space, a magnetron coupled to the case and oscillating microwaves toward the internal space, a heat insulating unit disposed in the internal space to form a chamber space and blocking transmission of heat of the chamber space to the internal space, a susceptor unit disposed in the chamber space and having a sintering space in which a to-be-sintered material is accommodated, and a cooling unit cooling at least one of the case or the chamber space.

A device for thermal or thermo-chemical treatment, in particular calcination, of material, in particular battery cathode material, having a housing and a process chamber in the housing, in which there is a process chamber atmosphere during the treatment and which defines a conveying level. The material, or carrying structures loaded with the material, at the conveying level can be conveyed in a conveying direction into and/or through the process chamber by a conveying system. An entry airlock gate defines an inlet level and includes an airlock gate chamber, an airlock gate inlet and an airlock gate outlet, as well as an inlet conveyor which is designed so that the material or carrying structures loaded with the material at the inlet level can be conveyed through the airlock gate inlet and into the airlock gate chamber. The conveying level and the inlet level are different from one another. A method for thermal or thermo-chemical treatment, in particular calcination, of material, in particular battery cathode material, in which the material or carrying structures loaded with the material at the conveying level and the inlet level are conveyed at different heights.

A concrete products curing kiln and kiln closure apparatus comprising a pressure door shaped to cover an opening of the kiln, and an expandable chamber. The expandable chamber is positioned such that inflation of the chamber causes the chamber to expand and press on, and at least partially seal, the pressure door against a kiln door frame defining the kiln opening.

A metal furnace header gate system haying a recirculation port in the furnace, a hot gas generator, a gas blower, and a furnace door. The door has an embedded gas manifold and outlet ports that each connect the manifold to a directional nozzle. The blower draws exhaust from the recirculation port into the hot gas generator, which generates additional exhaust and mixes the exhaust gases together. The blower forces this exhaust mixture into the manifold, through the nozzles, and into the furnace. A computer controls the blower and the hot gas generator to regulate the system.

An injector configured for arrangement within a reactor of a vertical furnace to inject gas in the reactor is provided. The injector is made substantial elongated and configured with an internal gas conduction channel to transport gas from a first end of the injector to a second end of the injector. An outer sidewall of the injector may be tapered towards the second end over at least 10%, preferably 30% and most preferably 50% of the length of the injector to increase tolerances for fitting the injector in the tube.