A method of generating a loaded layout in a vacuum furnace corresponding to an actual layout in the vacuum furnace during operation of the vacuum furnace may comprise receiving, via a processor, a visual data of a loading process of the vacuum furnace from a camera; comparing, via the processor, the visual data to a predetermined maximum capacity layout for the vacuum furnace; and arranging, via the processor, the visual data into the loaded layout in response to comparing the visual data.

A base component may be uses in a thermoprocessing system that includes the base component and at least one recipient enclosure for sealing a process chamber of the thermoprocessing system from an exterior thereof. The base component includes a main hub, and the main hub includes: an energy penetration for providing a heating or cooling energy from an exterior of the process chamber to the process chamber; a media inlet penetration for transporting a media from an exterior of the process chamber to the process chamber; and a media outlet penetration for transporting a media from the process chamber to an exterior of the process chamber.

A glass substrate transfer system and a robot arm thereof are provided. The robot arm includes: a substrate fork, a moving assembly and a vacuum chuck. The substrate fork is for taking a glass substrate. The moving assembly is connected with the substrate fork and for making the substrate fork to be moved in a working space. The vacuum chuck is disposed on the substrate fork and for sucking the glass substrate. The vacuum chuck is formed with a fluid path, and the fluid path is contained with a cooling fluid to dissipate heat of the vacuum chuck. The glass substrate transfer system and its robot arm provided by the present invention cool the vacuum chuck in time and thus can avoid affecting the product quality caused by the vacuum chuck being overheated, and the product yield is improved.

A continuous heat treatment system for a high-pressure fluid storage container includes a heat treatment apparatus including a first transfer unit which transfers a high-pressure fluid storage container, in which a high-pressure fluid is stored, in a longitudinal direction through the heat treatment space and a heating unit which heats an interior of the heat treatment space to a predetermined heat treatment temperature atmosphere and a cooling apparatus including a second transfer unit which continuously transfers the high-pressure fluid storage container transferred from the first transfer unit in the longitudinal direction and in which a lifting part is formed in at least a partial section to be vertically moved in a state in which the high-pressure fluid storage container is held, a lifting driving unit which vertically moves the lifting part, and a cooling bath in which a cooling space for accommodating a cooling fluid is formed.