A substrate processing apparatus includes: a carrier storage rack configured to place and store a carrier that accommodates a substrate; a gas supply configured to supply an inert gas into the carrier placed on the carrier storage rack; and a controller configured to control whether to supply the inert gas into the carrier based on at least one of carrier information and substrate information.

A processing apparatus includes: a plurality of process modules concatenated with one another; and a loader module configured to receive a carrier accommodating a plurality of substrates to be processed by the plurality of process modules, wherein each of the plurality of process modules includes: a heat treatment unit including a processing container configured to accommodate the plurality of substrates and perform a heat treatment on the plurality of substrates; and a gas supply unit disposed on one side surface of the heat treatment unit and configured to supply a gas into the processing container.

A railless billet electric induction heating apparatus and method is provided where billets are continuously or statically heated by induction by moving the billets without billet support rails through an induction coil supplied with alternating current power when the billets are in direct sliding contact with the interior surface of a clay graphite billet slider disposed within the induction coil. The clay graphite billet slider can also provide thermal insulation between the induction coil and the clay graphite billet slider to eliminate the requirement for a separate induction coil refractory.

Provided is a heat treatment apparatus capable of more reliably conveying a workpiece along a desired conveyance path by a simple configuration. A heat treatment apparatus 1 includes a heating chamber 7, a cooling chamber 8 disposed adjacent to the heating chamber 7, a conveyance tray 2 to support the workpiece 100, and a first conveyance mechanism 3 to convey the conveyance tray 2 along a conveyance path B1 from the outside of the heating chamber 7 to the outside of the cooling chamber 8 through the heating chamber 7 and the cooling chamber 8.

A processing apparatus includes: a plurality of process modules concatenated with one another; and a loader module configured to receive a carrier accommodating a plurality of substrates to be processed by the plurality of process modules, wherein each of the plurality of process modules includes: a heat treatment unit including a processing container configured to accommodate the plurality of substrates and perform a heat treatment on the plurality of substrates; and a gas supply unit disposed on one side surface of the heat treatment unit and configured to supply a gas into the processing container.

A substrate processing apparatus includes: a carrier storage rack configured to place and store a carrier that accommodates a substrate; a gas supply configured to supply an inert gas into the carrier placed on the carrier storage rack; and a controller configured to control whether to supply the inert gas into the carrier based on at least one of carrier information and substrate information.

Provided is a heat treatment apparatus capable of more reliably conveying a workpiece along a desired conveyance path by a simple configuration.

A heat treatment apparatus 1 includes a heating chamber 7, a cooling chamber 8 disposed adjacent to the heating chamber 7, a conveyance tray 2 to support the workpiece 100, and a first conveyance mechanism 3 to convey the conveyance tray 2 along a conveyance path B1 from the outside of the heating chamber 7 to the outside of the cooling chamber 8 through the heating chamber 7 and the cooling chamber 8.

A railless billet electric induction heating apparatus and method is provided where billets are continuously or statically heated by induction by moving the billets without billet support rails through an induction coil supplied with alternating current power when the billets are in direct sliding contact with the interior surface of a clay graphite billet slider disposed within the induction coil. The clay graphite billet slider can also provide thermal insulation between the induction coil and the clay graphite billet slider to eliminate the requirement for a separate induction coil refractory.