An apparatus for detecting a surface condition of an object. The apparatus comprises a light source, a reflective face and an imaging device. The imaging device is configured to receive reflected light emanating from the reflective face. The reflective face is oriented at a first acute angle relative to an optical axis of the imaging device, such that a projection area of a virtual image of a surface formed via the reflective face is greater than a projection area of the surface on a plane perpendicular to the optical axis.

A test system for examining a hollow body, in particular a cylinder bore in an engine block, comprises a measuring apparatus comprising an elongate body and a plurality of sensors which are connected to the body and are set up to carry out a distance measurement. The test system also comprises electronic control means which are set up to move the measuring apparatus into a hollow body to be examined and to determine an internal diameter of the hollow body on the basis of distance measurement data from the sensors. In order to examine hollow bodies of different diameters, at least some of the sensors are in the form of movable sensors which can be moved relative to the elongate body of the measuring apparatus. The electronic control means are also set up to select a measuring position of the movable sensors relative to the elongate body on the basis of a hollow body to be examined. A calibration station is provided and the electronic control means are set up to carry out a calibration process for the movable sensors. A corresponding method is also disclosed.

This invention is directed to a method of efficiently improving a relative density of a shaped object using an evaluation criterion having a higher correlation with a density of an object to be shaped. The method according to this invention includes acquiring three-dimensional point group data of a surface of a shaping object, calculating at least one of three-dimensional surface texture parameters extended to a plane region using the three-dimensional point group data, and evaluating a quality of the object to be shaped using the at least one of the three-dimensional surface texture parameters.

An imaging device includes: an area light source including an emission surface from which a sub-terahertz wave is emitted to a measurement target; and a detector including an image sensor that receives a reflected wave generated by the measurement target reflecting the sub-terahertz wave emitted from the emission surface. The area light source includes: at least one point light source that emits a sub-terahertz wave; and a reflector that reflects the sub-terahertz wave emitted from the at least one point light source, to generate a sub-terahertz wave to be emitted from the emission surface. The reflector has a reflection surface that is a bumpy surface which includes two or more frequency components in a spatial frequency range and whose roughness curve element mean length RSm is at least 0.3 mm.

Apparatus, systems, and methods for the inspection of holes in transparent materials, the apparatus including a processor, an illumination probe, and a detection probe. The illumination probe includes a laser light source and a reflective surface and is configured to be inserted into a first hole in the transparent material. The detection probe includes a second reflective surface and a photodetector and is configured to be inserted in a second hole in the transparent material. Laser light is directed onto the first reflective surface within the first hole and is reflected through a wall of the first hole, into the transparent material, and reflected by the second reflective surface to the photodetector. The photodetector transmits a measured light intensity value to the processor, which compares the light intensity value to a standard intensity value to determine whether or not a crazing condition exists in the second hole.

Systems, methods, and apparatus for acquiring surface profile information (e.g., depths at multiple points) from limited-access structures and objects using an autonomous or remotely operated flying platform (such as an unmanned aerial vehicle). The systems proposed herein use a profilometer to measure the profile of an area on a surface where visual inspection has indicated that the surface has a potential anomaly. After the system has gathered data representing the surface profile in the area containing the potential anomaly, a determination may be made whether the collected image data indicates that the structure or object should be repaired or may be used as is.

A system includes a stage, a detector and a measuring device. The stage is configured to hold a substrate. The substrate includes a plurality of tapered structures, and each of the plurality of tapered structures includes a tapered wall between first and second openings at opposite ends of the plurality of tapered structures. The detector is tilted at a first angle and configured to measure light reflected from the tapered wall at about 90 degrees to the tapered wall. The first angle depends at least in part a second angle between the tapered wall and a longitudinal axis running through the tapered structure. The measuring device is configured to determine a characteristic of the tapered wall and whether the characteristic of the tapered wall is above or below a threshold.

There is provided a quantitative method for determining a level of a sanding surface preparation of a carbon fiber composite surface, prior to the carbon fiber composite surface undergoing a post-processing operation. The quantitative method includes fabricating a ladder panel of levels of sanding correlating to an amount of sanding of sanding surface preparation standards for a reference carbon fiber composite surface of reference carbon fiber composite structure(s); using surface analysis tools to create target values for quantifying the levels of sanding; measuring, with the surface analysis tools, sanding surface preparation location(s) on the carbon fiber composite surface of a test carbon fiber composite structure, to obtain test result measurement(s); comparing the test result measurement(s) to the levels, to obtain test result level(s); determining if the test result level(s) meet the target values; and determining whether the carbon fiber composite surface is acceptable to proceed with the post-processing operation.

Described are systems and techniques directed to optical inspection of moving products (wafers, substrates, films, patterns) that are being transported to or from processing chambers in device manufacturing systems. Implementations include a system that has a first source of light to direct a first light to a first location on a surface of a product. The first light generates, at the first location, a first reflected light. The system further includes a first optical sensor to generate a first data representative of a first reflected light, and a processing device, in communication with the first optical sensor to determine, using the first data, a property of the product.

An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit generating polarized light from the light, an optical system generating a pupil image of a measurement target, using the polarized light, a self-interference generating unit generating multiple beams that are split from the pupil image, and a detecting unit detecting a self-interference image generated by interference of the multiple beams with each other.