An intraoral scanner comprises a light source for generating light, an optics system for focusing the light, and a light-guiding part having an entrance and an exit. The light source, the optics system and the light-guiding part are arranged such that the light passes through the optics system, enters the light-guiding part via the entrance, and exits the light-guiding part via the exit. The optics system is configured such that, upon entering the light-guiding part, an outermost chief ray of the light with respect to an optical axis of the optics system is divergent to the optical axis and an outermost marginal ray of the light with respect to the optical axis is parallel or divergent to the optical axis.

A confocal measuring apparatus serves for 3D measurement of an object surface. The measuring apparatus has a light source for measuring light, a lens array having a plurality of array lenses, a chromatic telescope, multiplexer optics, collimation optics and spatially resolved detection device. The chromatic telescope images an object plane into an arrangement plane of the lens array. The multiplexer optics is arranged at a distance of a total of a focal length of the array lenses on the one hand and a focal length of the multiplexer optics, downstream of the lens array. A single pinhole aperture is arranged at a distance of the focal length of the multiplexer optics. The collimation optics is arranged downstream of the pinhole aperture. A confocal measuring apparatus results, which has a simplified design and at the same time a high measurement throughput.

A method for measuring height differences between tops of multiple bumps of an upper surface of a layer, the method may include performing first measurements of the height differences between the bumps and the corresponding areas, by illuminating the bumps and the corresponding areas with first radiation; wherein the first measurements are subjected to first measurement errors; and determining the height differences between the bumps and the corresponding areas based on the first measurements and the first measurements errors.

Disclosed is a non-contact optical measurement device for detecting or measuring different geometric workpiece features based on configurable light-propagation paths of light emitted from a light source and reflected by a workpiece surface for incidence upon a spectral sensor. The light-propagation paths are configurable based on which optical probe is attached to a rotation stage that rotates the probe about an optical axis and in a collimated region.

A shape measurement method includes: acquiring first data of a change of a distance between a first probe and a calibration measurement object and acquiring second data of a change of a distance between a second probe and the calibration measurement object while moving the calibration measurement object in a first direction, the calibration measurement object being rotationally symmetric around an axis parallel to the first direction, the first probe and the second probe being arranged in a second direction orthogonal to the first direction; estimating an error of the movement included in the first data based on the first and second data; acquiring third data of a change of a distance between the first probe and a measurement object while moving the measurement object relative to the first probe in the first direction; and correcting the third data by using the error.

An optical test system and corresponding method disclosed herein provides highly accurate test data for both sides of a lens simultaneously and efficiently to analyze the surface topography and/or geometric parameters of a lens or lens system. More particularly, the optical test system and corresponding method moves the lens in test plane to align a plurality of points of a test pattern on a lens surface with a vertical axis while probes aligned with the vertical axis and on opposing sides of the lens simultaneously collect wavelength-specific data for both lens surfaces. The optical test system uses the collected wavelength-specific data to produce a surface topography and/or the associated lens geometric parameters for each lens surface.

A workpiece holder is configured to hold a workpiece and is utilized in a metrology system which includes a sensing configuration for obtaining 3-dimensional surface data for the workpiece. The workpiece holder includes at least three reference features (e.g., spherical reference features extending from sides) that are configured to be sensed by the sensing configuration when the workpiece holder is in different orientations (e.g., as rotated 180 degrees between first and second orientations for presenting front and back sides of the workpiece towards the sensing configuration). A determination of 3-dimensional positions of the reference features for each orientation enables a combining (e.g., in a common coordinate system) of 3-dimensional surface data that is acquired for the workpiece in each orientation. Interchangeable workpiece holding portions may be provided that fit within the workpiece holder for holding workpieces with different characteristics (e.g., having different sizes and/or shapes).

A chromatic range sensor (CRS) system is configured to provide an in-focus image of a workpiece surface including a measurement spot usable as a guide light. The system includes an optical pen having a chromatically dispersive lens configuration providing axial chromatic dispersion, and a reflected light dividing configuration (e.g., a beamsplitter) arranged to receive and divide reflected light from the workpiece surface into a measurement portion and an imaging portion. The optical pen includes a narrowband spectral filter and a camera. The CRS system includes a processing portion configured to measure a distance from the optical pen to the workpiece surface, and to make an adjustment so that the distance corresponds to a focus distance at which the workpiece surface is in focus when imaged by the light that passes through the narrowband spectral filter.

A digital sensor for pre-warning of multistage breakage-triggered deformation threshold includes first tension rods, second tension rods, an RFID chip, and a brittle fracture module; the brittle fracture module includes a bottom plate and a plurality of resistors, where two ends of the bottom plate are fixed to the first and second tension rods, and the plurality of resistors forming a lumped parallel circuit are parallelly arranged on the bottom plate; the RFID chip is connected to two ends of the lumped parallel circuit. Strength of the middle cross section of the bottom plate is reduced in the way. The bottom plate will be fractured by being tensioned when the first tension rods and the second tension rods move away from each other with the deformation of the tension members. The resistors are connected into the lumped parallel circuit through brittle wires with different preset slack amounts.

A spectral confocal measurement device includes a light source portion, configured to emit a broad-spectrum light beam with a certain wavelength range in a first predetermined path; an optical sampling portion, configured to converge the broad-spectrum light beam emitted from the light source portion on different measurement surfaces of an object to be measured, and output a reflected light in a second predetermined path that is different from a reverse direction of the first predetermined path; and a measurement portion, configured to receive and process the reflected light from the optical sampling portion to obtain a measurement result. The device can improve measurement accuracy and reduce production costs. In addition, a spectral confocal measurement method is also provided.