A system for precision displacement measurement based on a self-traceable grating interference includes a coherent light source, a photoelectric detection module, a self-traceable grating and a signal processing module. The self-traceable grating is arranged on a to-be-measured displacement motion platform. The coherent light source, the photoelectric detection module and the signal processing module are sequentially connected. Laser generated by the coherent light source propagates through the photoelectric detection module and is incident on the self-traceable grating, diffracts with the self-traceable grating, returns to the photoelectric detection module to continue propagating and enters the signal processing module. The signal processing module collects an interference signal to obtain a motion displacement and a motion direction.

A measuring device (10) for the interferometric shape measurement of a surface (12) of a test object (14-1; 14-2)includes (i) a diffractive optical element (26-1; 26-2) that generates a test wave (28) from incoming measurement radiation (18), wherein the diffractive optical element radiates the test wave onto the surface of the test object, (ii) a deflection element (22) that is disposed upstream of the diffractive optical element in the beam path of the measurement radiation, and (iii) a holding device (24, 124) that holds the deflection element and that changes a position of the deflection element (22) through a combination of a tilting movement and a translation movement.

A measurement apparatus for interferometric shape measurement of a test object surface. A test optical unit produces from measurement radiation a test wave for irradiating the surface. A reference element with an optically effective surface interacts with a reference wave also produced from the measurement radiation. An interferogram is produced by superimposing the test wave after interaction with the test object's surface. A holding device holds the reference element and moves the reference element relative to the reference wave in at least two rigid body degrees of freedom so that a peripheral point of the reference element's optically effective surface shifts by at least 0.1% of a diameter of the optically effective surface. The at least two degrees of freedom include a translational degree, directed transversely to a propagation direction of the reference wave and a rotational degree, whose rotational axis aligns substantially parallel to the reference wave's propagation direction.

An optical device for an optical sensor comprises a gain element of a semiconductor laser, a wavelength selective feedback element, and a sensing element. At least part of the wavelength selective feedback element and the sensing element are arranged in a common sensor package. The gain element is arranged to generate and amplify an optical signal. The gain element and the wavelength selective feedback element form at least part of an external cavity of the semiconductor laser, thereby providing a feedback mechanism to sustain a laser oscillation depending on the optical signal. The wavelength selective feedback element is arranged to couple out a fraction of the optical signal and direct said fraction of the optical signal towards the sensing element to probe a physical property of the sensing element.

A displacement detection apparatus can reduce a measurement error even when a diffraction grating is displaced and/or tilted to a direction other than the measurement direction. A displacement detection apparatus includes a light source which emits light, a luminous flux-splitting section, a diffraction grating, a diffracted light-reflecting section, a correcting lens, a luminous flux-coupling section, and a light-receiving section. The diffracted light-reflecting section reflects a first luminous flux and a second luminous flux so as to be perpendicular to one of measuring planes of the diffraction grating and be parallel to each other. The correcting lens is arranged between the diffracted light-reflecting section and the diffraction grating.

A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.

According to one aspect, the invention relates to a device (100, 200, 300, 400, 500) for measuring the distance, with respect to a reference plane (P.sub.REF), from a point of light (P.sub.i) of an object (O). The device comprises a two-dimensional detector (30) comprising a detection plane (P.sub.DET) and an imaging system (10) adapted to form an image of a light spot (P.sub.i) situated on an object of interest plane (11) in an image plane (11′) arranged in the vicinity of the detection plane (P.sub.DET) or a conjugate plane (P′.sub.DET) of the detection plane. The device further comprises a separator element (20) for forming, from a beam emitted by a point of light of the object of interest plane (11), and emerging from the imaging system (10) at least two coherent beams, having a spatial superposition region in which the beams interfere and a signal processing means (50) for determining, from the interference pattern formed on the detection plane, and resulting from the optical interferences between said coherent beams, the distance from the point of light to a conjugate plane of the detection plane in the object space of the imaging system (10), said conjugate plane of the detection plane forming the reference plane (P.sub.REF).

Polarization-based coherent gradient-sensing systems and methods for measuring at least one surface-shape property of a specularly reflective surface are disclosed. The method includes: reflecting a first circularly polarized laser beam from a sample surface to form a second circularly polarized laser beam that contains surface-shape information; converting the second circularly polarized laser beam to a linearly polarized reflected laser beam; directing respective first and second portions of the linearly polarized reflected laser beam to first and second relay assemblies that constitute first and second interferometer arms. The first and second relay assemblies each use a pair of axially spaced-apart gratings to generate respective first and second interference patterns at respective first and second image sensors. Respective first and second signals from the first and second image sensors are processed to determine the at least one surface-shape property.

A light detection device includes a light detector including first detectors and second detectors both disposed along a main surface; a light coupling layer disposed on or above the light detector; and a light shielding film disposed on the light coupling layer. The light coupling layer includes a first low-refractive-index layer, a first high-refractive-index layer that is disposed on the first low-refractive-index layer and includes a first grating, and a second low-refractive-index layer that is disposed on the first high-refractive-index layer. The light shielding film includes a light transmitting region and a light shielding region adjacent to the light transmitting region. The light transmitting region faces two or more first detectors included in the first detectors, and the light shielding region faces two or more second detectors included in the second detectors.

A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.