G01B9/02003

Optical interference measurement apparatus
11578963 · 2023-02-14 · ·

A first light source outputs measurement light having a wavelength in infrared range. A second light source outputs guide light having a wavelength in visible range. A fiber coupler includes a first port into which the measurement light is input, a second port into which the guide light is input, and a third port outputting combined light formed by combining the measurement light and the guide light with each other. A measurement unit emits the combined light to a measurement object and receives return light reflected therefrom. A processing unit obtains information relating to a distance, a speed, or an oscillation of the measurement object, based on an interference signal of the return light and the reference light. The fiber coupler is formed by a single mode fiber that has a cutoff wavelength that is shorter than that of the measurement light and longer than that of the guide light.

Optical interference measurement apparatus
11578963 · 2023-02-14 · ·

A first light source outputs measurement light having a wavelength in infrared range. A second light source outputs guide light having a wavelength in visible range. A fiber coupler includes a first port into which the measurement light is input, a second port into which the guide light is input, and a third port outputting combined light formed by combining the measurement light and the guide light with each other. A measurement unit emits the combined light to a measurement object and receives return light reflected therefrom. A processing unit obtains information relating to a distance, a speed, or an oscillation of the measurement object, based on an interference signal of the return light and the reference light. The fiber coupler is formed by a single mode fiber that has a cutoff wavelength that is shorter than that of the measurement light and longer than that of the guide light.

Method for full-field measurement using dynamic laser doppler imaging

A method for full-field measurement using Doppler imaging, comprising the following steps: turning on a laser and adjusting the laser; adjusting a spatial filter to obtain circular laser spots having uniform intensity distribution; adjusting a quarter-wave plate and a whole polarizer in a system, and requiring two beams in a reference object and a measured object having different frequencies and perpendicular polarization directions; applying slight pressure to the measured object, setting a charge coupled device (CCD) camera into a continuous acquisition mode, observing interference fringes, and adjusting a light path so that the fringes are clear and visible; setting the sampling frequency, sampling time, captured image format and resolution size of the CCD camera; turning on a lithium niobate crystal drive power switch to produce a heterodyne carrier frequency; applying continuous equal pushing force to the measured object by means of piezoelectric ceramics (PZT) so as to make the measured object produce continuous bending deformation; controlling the CCD camera to sample using a computer, and collecting a set of time series light interference images along with the continuous deformation of the measured object; and processing the time series light intensity interference image to obtain a three-dimensional data module comprising continuous deformation of the measured objects distributed in time and space.

Truncated non-linear interferometer-based sensor system

A truncated non-linear interferometer-based sensor system includes an input that receives an optical beam and a non-linear amplifier that generates a probe beam and a conjugate beam from the optical beam. The system's local oscillators are related to the probe beam and the conjugate beam. The system includes a sensor that transduces an input with the probe beam and the conjugate beam. The transduction detects changes in the phase of each of the probe beam and the conjugate beam. The system's phase sensitive detectors detect phase modulations between the respective local oscillators, the probe beam, and the conjugate beam and outputs phase signals based on detected phase modulations. The system measures phase signals indicative of the sensor's input resulting from a sum or difference of the phase signals. The measurement exhibits a quantum noise reduction in an intensity difference, a phase sum, or an amplitude difference quadrature.

Truncated non-linear interferometer-based sensor system

A truncated non-linear interferometer-based sensor system includes an input that receives an optical beam and a non-linear amplifier that generates a probe beam and a conjugate beam from the optical beam. The system's local oscillators are related to the probe beam and the conjugate beam. The system includes a sensor that transduces an input with the probe beam and the conjugate beam. The transduction detects changes in the phase of each of the probe beam and the conjugate beam. The system's phase sensitive detectors detect phase modulations between the respective local oscillators, the probe beam, and the conjugate beam and outputs phase signals based on detected phase modulations. The system measures phase signals indicative of the sensor's input resulting from a sum or difference of the phase signals. The measurement exhibits a quantum noise reduction in an intensity difference, a phase sum, or an amplitude difference quadrature.

Five-degree-of-freedom heterodyne grating interferometry system

A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The system is not over-sensitive to the environment, is small and light, and is easy to arrange. Six-degree-of-freedom ultra-precision measurement can be achieved by arranging multiple five-degree-of-freedom interferometry systems and using redundant information, thereby meeting the needs of a lithography machine worktable for six-degree-of-freedom position and orientation measurement.

Heterodyne photonic integrated circuit for absolute metrology
11703317 · 2023-07-18 · ·

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.

Heterodyne photonic integrated circuit for absolute metrology
11703317 · 2023-07-18 · ·

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.

Method and system for interrogating optical fibers

A method and a system for interrogating an optical fiber includes a probe signal that has a first frequency comb at a first repetition rate (Δf) injected into the optical fiber. A backscattering signal that includes the probe signal convolved with an impulse response of the optical fiber in reflection which is sensitive to at least one parameter being measured from the optical fiber is gathered. The backscattering signal is beaten with a local oscillator signal to generate a beating signal, the local oscillator signal including a second frequency comb at a second repetition rate that is offset from the first repetition rate (Δf+δf) and being mutually coherent with the first frequency comb. The resulting beating signal is analysed to thereby determine the at least one parameter being measured from the optical fiber.

3D intraoral camera using frequency modulation

An apparatus for oral imaging has a light source energizable to generate a light frequency signal ranging from a minimum to a maximum frequency. An image acquisition apparatus scans the generated light frequency signal to successive positions on a sample surface and to combine a returned signal from each successive position with the generated light frequency signal. The image acquisition apparatus has a detector that obtains a beat frequency signal from the combined returned signal and the generated light frequency signal. A processor that is in signal communication with the detector generates a processed beat signal from the combined signals, wherein the processed beat signal is indicative of the distance from the tunable laser source to the sample surface at the corresponding position. A display is in signal communication with the processor and is energizable to display distance data according to the processed beat signal for each scanned position.