G01B9/02027

Device and method for interferometric measurement of a two or three dimensional translation of an object

Translations of an object in a plurality of different spatial directions are measured using a plurality of interferometers to detect interference with light that has been reflected from a diffusively reflective surface, preferably using diffuse reflection from the same planar surface to measure in each of the different spatial directions. At least the interferometers that measure translation in directions that are not perpendicular to the surface each comprises a single mode fiber and a collimator configured to transmit the outgoing light to the object successively through the single mode fiber and the collimator, and to collect reflection into the single mode fiber with the collimator both along a same beam direction. It has been found that, when reflection of a beam with a beam direction at an oblique angle to a diffusively reflective surface is used, the interference resulting from translation of the object is due substantially only to translation in the beam direction.

SYSTEMS AND METHODS FOR CONCURRENT MEASUREMENTS OF INTERFEROMETRIC AND ELLIPSOMETRIC SIGNALS OF MULTI-LAYER THIN FILMS
20230098439 · 2023-03-30 ·

A system may include a broadband light source emitting polarized light that is polarized to two orthogonal polarization states, multiple beam splitters for combining and splitting the polarization states, and interferometric cell for creation of interference patterns with respect to a sample surface, lenses of appropriate design that focus the polarized light at predefined locations, and sensors that analyze the polarized light as a function of angle and wavelength. The system may also include a controller configured to modulate the reference arm through operation of an optical chopper and allow for different data analysis modes to be used on the system produced data.

MULTIMODE INTERFEROMETRIC DEVICE AND METHOD

There is described a multimode interferometric device and a method for performing multimode interferometry. The device comprises at least one single-mode transmission input connectable to a light source for receiving single-mode light, a multimode output for emitting multimode light and collecting reflected multimode light, at least one photonic lantern operatively connected between the at least one single-mode transmission input and the multimode output and designed for converting the single-mode light into multimode light and converting the reflected multimode light into single-mode light, at least one single-mode reference input for generating at least one interference pattern between the reflected single-mode light and at least one single-mode reference signal, and at least one single-mode output connectable to a photodetector for detecting the at least one interference pattern.

OPTICAL INTERFERENCE RANGE SENSOR

A wavelength-swept light source projects a light beam. An interferometer includes a splitting unit that splits the light beam projected from the wavelength-swept light source into light beams radiated toward a plurality of spots on a measurement target. Each of the interference beam is generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement beam, and a reference beam passing through an optical path that is at least partially different from an optical path of the measurement beam. A light-receiving unit receives the interference beams from the interferometer. A processor calculates distance to the measurement target by associating a detected peak of the interference beams with one of the spots. The optical path length difference between the measurement target and the reference beam is made different among the light beams split in correspondence with the plurality of spots.

PARALLEL OPTICAL SCANNING INSPECTION DEVICE
20220341724 · 2022-10-27 ·

A parallel optical scanning inspection device, comprising a light source unit, an interference unit, a beam splitting unit, an optical path adjustment unit, a plurality of scanning units and a receiving unit. The light source unit provides initial light to an interference unit. The interference unit divides the initial light into reference light and sampling light. The beam splitting unit splits the sampling light into a plurality of sampling light beams. The optical path adjustment unit adjusts the plurality of sampling light beams into scanning light beams with different optical paths. Each of the scanning units receives one of the scanning light beams. A sample is scanned by the scanning light beams such that each of the scanning units receives detection light reflected or scattered from different positions of the sample. The receiving unit receives and coheres the reference light and the detection light, respectively, to generate optical information.

OPTICAL INTERFERENCE RANGE SENSOR

A light source projects a light beam. An interferometer includes a splitting unit that splits the light beam. The interferometer generates interference beams with the respective split light beams. Each of the interference beam is generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement beam and a reference beam passing through an optical path. A light-receiving unit receives the interference beams. A processor calculates a distance to the measurement target by associating at least one detected peak with at least one of the spots in accordance with a mirror surface mode or a rough surface mode. The optical path length difference is made different among the split light beams. In the mirror surface mode, the processor uses a distance calculated based on a peak corresponding to a spot for which the optical path length difference is shortest.

FOUR-QUADRANT INTERFEROMETRY SYSTEM BASED ON AN INTEGRATED ARRAY WAVE PLATE
20230127285 · 2023-04-27 ·

The invention discloses a four-quadrant interferometry system based on an integrated array wave plate. PBS splits an output laser light into two paths, the reflected light and the transmitted light are respectively transformed into reference light and measuring light, the reference light and the measuring light are converged in PBS, the converging light enters a signal receiving unit and is split into four beams, and the four beams irradiate on a four-quadrant interference signal detector with an integrated array wave plate. The invention solves the problems that the existing signal detection system occupies a large space, is not conducive to array integration, and cannot be used in scenes with high space and size requirements.

Fast phase-shift interferometry by laser frequency shift
11469571 · 2022-10-11 · ·

An acousto-optic modulator (AOM) laser frequency shifter system includes a laser configured to generate an incident beam, a first optical splitter optically coupled to the laser and configured to split the incident beam into at least one portion of the incident beam, at least one phase-shift channel optically coupled to the first optical splitter and configured to generate at least one frequency-shifted beam with an acousto-optic modulator (AOM) from the at least one portion of the incident beam received from the first optical splitter, and a second optical splitter configured to receive the at least one frequency-shifted beam from the at least one phase-shift channel and configured to direct the at least one frequency-shifted beam to an interferometer configured to acquire an interferogram of a sample with the at least one frequency-shifted beam.

2D Material Detector for Activity Monitoring of Single Living Micro-Organisms and Nano-Organisms

A motion detector adapted to detect activity of extremely small scale organisms, such as micro-organisms, bacteria and fungi, and even of viruses and genetic material, such as DNA and RNA. The motion detector is capable of detecting nano-motion, that is, motion in the order of nanometers or less.

BENDING DETECTING SYSTEM, LIGHT GUIDE BODY, TUBULAR APPARATUS, LIGHT DETECTING APPARATUS, LIGHT DETECTING METHOD, AND OPTICAL BENDING MEASURING APPARATUS

A bending detecting system includes a light guide, a first grating and a light detector. The light guide has elongated shape and is configured to guide an incident light in a propagating direction. The light guide includes a core and a cladding disposed around the core. The first grating is disposed in a boundary area, the boundary area including an outer surface of the core, and an adjacent area that is adjacent to the outer surface. The first grating includes a first periodic structure along the propagating direction with a first pitch, and is configured to generate a first diffracted light from the incident light. The light detector is configured to detect the first diffracted light from the first grating, and detect a bending of the light guide based upon an optical feature amount of the first diffracted light.