A mask, a mask assembly including a mask, and a substrate transfer apparatus including a mask. According to an embodiment, a mask includes a frame including an opening, accommodation structure disposed on the frame and including an accommodation space shielded from an outside, and a sensor disposed in the accommodation space.

Disclosed herein are configurations and methods to produce very low loss waveguide structures, which can be single-layer or multi-layer. These waveguide structures can be used as a sensing component of a small-footprint integrated optical gyroscope. By using pure fused silica substrates as both top and bottom cladding around a SiN waveguide core, the propagation loss can be well below 0.1 db/meter. Low-loss waveguide-based gyro coils may be patterned in the shape of a spiral (circular or rectangular or any other shape), that may be distributed among one or more of vertical planes to increase the length of the optical path while avoiding the increased loss caused by intersecting waveguides in the state-of-the-art designs. Low-loss adiabatic tapers may be used for a coil formed in a single layer where an output waveguide crosses the turns of the spiraling coil.

Disclosed herein are configurations and methods to produce very low loss waveguide structures, which can be single-layer or multi-layer. These waveguide structures can be used as a sensing component of a small-footprint integrated optical gyroscope. By using pure fused silica substrates as both top and bottom cladding around a SiN waveguide core, the propagation loss can be well below 0.1 db/meter. Low-loss waveguide-based gyro coils may be patterned in the shape of a spiral (circular or rectangular or any other shape), that may be distributed among one or more of vertical planes to increase the length of the optical path while avoiding the increased loss caused by intersecting waveguides in the state-of-the-art designs. Low-loss adiabatic tapers may be used for a coil formed in a single layer where an output waveguide crosses the turns of the spiraling coil.

An attitude control system includes one or more control moment gyro pairs, with gyros of individual of the pairs being counter-rotated to rotate the rotation axes of flywheels of the gyros of a gyro pair in opposite direction. The flywheels of a gyro pair may be in paddle configuration, with the rotation axes of the flywheels rotating in the counter-rotation through separate planes as the gyros are rotated. The rotation of the gyros of a gyro pair may be accomplished by coupling both of the gyros to a servo motor with suitable coupling gears, or by using independent servos for each gyro. The counter-rotation of gyros of an individual pair produces a resultant torque about a fixed global axis, such as the axis of a flight vehicle of which the attitude control system is a part. Further control may be accomplished for example by varying rotation speeds of the flywheels.

An attitude control system includes one or more control moment gyro pairs, with gyros of individual of the pairs being counter-rotated to rotate the rotation axes of flywheels of the gyros of a gyro pair in opposite direction. The flywheels of a gyro pair may be in paddle configuration, with the rotation axes of the flywheels rotating in the counter-rotation through separate planes as the gyros are rotated. The rotation of the gyros of a gyro pair may be accomplished by coupling both of the gyros to a servo motor with suitable coupling gears, or by using independent servos for each gyro. The counter-rotation of gyros of an individual pair produces a resultant torque about a fixed global axis, such as the axis of a flight vehicle of which the attitude control system is a part. Further control may be accomplished for example by varying rotation speeds of the flywheels.

A hybrid inertial measurement unit (IMU) comprises: a low frequency (LF) sensor providing a first signal containing information for a first parameter of the hybrid IMU; a shock resistant (SR) sensor providing a second signal containing information for the first parameter, wherein the SR sensor is resistant to destabilization during a destabilizing operational period; and a processor, wherein the processor further comprises: a weighting factor computation module to compute a weight to be applied to the first signal and to compute a weight to be applied to the second signal; a LF weighting module to apply the computed weight to the first signal to create a weighted first signal; a SR weighting module to apply the computed weight to the second signal to create a weighted second signal; and a compensator to combine the weighted first signal and the weighted second signal to create a compensated signal containing information for the first parameter.

A dual opposing rotation gyroscope stabilization system preferably includes a first rotor, a second rotor, a first motor, a second motor and a frame. The first rotor includes a rotor bore formed in one end and a first outer bearing pressed on to an opposing end. At least one bore bearing is pressed into the rotor bore. The second rotor includes a first outer diameter and a second outer diameter. The second diameter is rotatably retained by the at least one bore bearing. A second outer bearing is pressed on to an end of the first outer diameter. The frame preferably includes a first end plate, a second end plate and at least one lengthwise member. The first end plate retains the first motor and the first outer bearing. The second end plate retains the second motor and the second outer bearing. A second embodiment is submersible.

A dual opposing rotation gyroscope stabilization system preferably includes a first rotor, a second rotor, a first motor, a second motor and a frame. The first rotor includes a rotor bore formed in one end and a first outer bearing pressed on to an opposing end. At least one bore bearing is pressed into the rotor bore. The second rotor includes a first outer diameter and a second outer diameter. The second diameter is rotatably retained by the at least one bore bearing. A second outer bearing is pressed on to an end of the first outer diameter. The frame preferably includes a first end plate, a second end plate and at least one lengthwise member. The first end plate retains the first motor and the first outer bearing. The second end plate retains the second motor and the second outer bearing. A second embodiment is submersible.

In an example, a gyroscope device may include a control rotor to spin about a central axis and a reaction wheel to spin about the central axis, independent of the control rotor. An example gyroscope device may also include an actuator to change the orientation of the control rotor.

Conductive cooled gimbaled inertial measurement units are disclosed herein. An example apparatus includes an inertial measurement unit, a gimbal assembly in which the inertial measurement unit is disposed, the gimbal assembly having gaps between each gimbal of the gimbal assembly, the gaps including a gas to conduct heat from the gimbal assembly, and an isothermal dome at least partially surrounding the gimbal assembly, the isothermal dome having a cooling tube disposed on an external surface of the isothermal dome to transfer heat from the gimbal assembly via conduction.