A three-axis microelectromechanical system (MEMS) gyroscope includes four proof masses, where the proof masses are connected by spring beams and/or rigid beams; a first proof mass is configured to move in an X-axis direction; a second proof mass is configured to rotate around an X-direction axis, a Y-direction axis, and a Z-direction axis, and when the first proof mass moves in the X-axis direction, the second proof mass is driven to rotate around the Z-direction axis; a third proof mass is configured to move in the X-axis direction and a Y-axis direction, and when the first proof mass moves in the X-axis direction, the third proof mass is driven to move in the Y-axis direction; a fourth proof mass is configured to move in the X-axis direction, and when the third proof mass moves in the X-axis direction, the fourth proof mass is driven to move in the X-axis direction.

Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.

Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.

Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.

Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.

A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Respective tuning electrodes, which are slanted at respective angles parallel to an angle of respective sidewalls of the resonator member, may also be provided for quadrature tuning between different resonance modes of the resonator member. Related devices and fabrication methods are also discussed.

A device of or attached to a roller body determines a rotational frequency of the roller body (or other object) rotating about an axis of rotation includes an acceleration sensor that detects an acceleration signal of an acceleration in a first direction extending in a radial or tangential direction to the axis of rotation of the roller body; and an electronic processing unit and configured to low-pass and high-pass, particularly adaptively high-pass filter, the detected acceleration signal, perform a derivation, with respect to time, of the filtered signal, optimize the signal with a subsequent absolute-amount generation and with moving averaging, and ascertain a frequency of the filtered acceleration signal, which corresponds to the rotational frequency of the roller body.

A device of or attached to a roller body determines a rotational frequency of the roller body (or other object) rotating about an axis of rotation includes an acceleration sensor that detects an acceleration signal of an acceleration in a first direction extending in a radial or tangential direction to the axis of rotation of the roller body; and an electronic processing unit and configured to low-pass and high-pass, particularly adaptively high-pass filter, the detected acceleration signal, perform a derivation, with respect to time, of the filtered signal, optimize the signal with a subsequent absolute-amount generation and with moving averaging, and ascertain a frequency of the filtered acceleration signal, which corresponds to the rotational frequency of the roller body.

A sensor for measuring rate of rotation is disclosed which includes a disk resonator, an anchor coupled to the disk resonator and further coupled to a substrate, and an optical waveguide wrapping around at least a portion of the perimeter of the disk resonator, the optical waveguide having an input end and an output end, wherein the disk resonator is configured to expand radially when subject to a rotational input, and wherein said radial expansion is adapted to cause a change in an optical signal passing through the optical waveguide.

A sensor for measuring rate of rotation is disclosed which includes a disk resonator, an anchor coupled to the disk resonator and further coupled to a substrate, and an optical waveguide wrapping around at least a portion of the perimeter of the disk resonator, the optical waveguide having an input end and an output end, wherein the disk resonator is configured to expand radially when subject to a rotational input, and wherein said radial expansion is adapted to cause a change in an optical signal passing through the optical waveguide.