According to one embodiment, a sensor includes a sensor element, and a controller. The sensor element includes a first sensor part. The first sensor part includes a first movable part which can vibrate. Vibration of the first movable part includes a first component and a second component. The controller is configured to perform to third mode operations. In the first mode operation, the controller is configured to derive a first rotation angle of the first movable part based on a first amplitude of the first component and a second amplitude of the second component. In the second mode operation, the controller is configured to derive a first angular velocity of the first movable part based on a change of a control signal. In the third mode operation, the controller is configured to supply a third mode signal to the first sensor part.

Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.

The present disclosure is directed to a MEMS gyroscope formed by a substrate and a movable mass suspended on the substrate and configured to carry out a movement in a driving direction and in a detection direction perpendicular to each other. The movable mass has a first face and a second face opposite to the first face. The gyroscope also has a first and a second quadrature compensation electrode group, fixed to the substrate and capacitively coupled to the movable mass. The first quadrature compensation electrode group faces the first face of the movable mass, and the second quadrature compensation electrode group faces the second face of the movable mass. The first and the second quadrature compensation electrode groups each have a respective variable facing area on the movable mass as a result of the movement of the movable mass in the driving direction and are configured to exert an electrostatic force on the movable mass during the movement of the movable mass in the driving direction.

A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.

A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.

A coupling device (130) for coupling a plurality of vibration systems (110, 120), which are mounted above a substrate (200) in such a manner that said systems can vibrate along a first direction (x) and are offset with respect to one another in a second direction (y) perpendicular to the first direction (x), has a flexural beam spring (135) which can bend in the first direction (x) and can be connected to the vibration systems (110, 120); in this case, connections (112, 122) between the flexural beam springs (135) and the vibration systems (110, 120) are arranged between at least two connection points (140) of the flexural beam springs (135) to the substrate (200) in such a manner that a deflection of the flexural beam springs (135) which is caused by movements of the vibration systems (110, 120) results in a vibration of the flexural beam springs (135) with antinodes of vibration in the region of the connections (112, 122) between the flexural beam springs (135) and the vibration systems (110, 120).

A coupling device (130) for coupling a plurality of vibration systems (110, 120), which are mounted above a substrate (200) in such a manner that said systems can vibrate along a first direction (x) and are offset with respect to one another in a second direction (y) perpendicular to the first direction (x), has a flexural beam spring (135) which can bend in the first direction (x) and can be connected to the vibration systems (110, 120); in this case, connections (112, 122) between the flexural beam springs (135) and the vibration systems (110, 120) are arranged between at least two connection points (140) of the flexural beam springs (135) to the substrate (200) in such a manner that a deflection of the flexural beam springs (135) which is caused by movements of the vibration systems (110, 120) results in a vibration of the flexural beam springs (135) with antinodes of vibration in the region of the connections (112, 122) between the flexural beam springs (135) and the vibration systems (110, 120).

The disclosure relates to a microelectromechanical gyroscope comprising at least one mass element, a drive actuator and sense electrodes. The at least one mass element is configured to be driven by the drive actuator into oscillating movement with a drive oscillation frequency ω.sub.D, and the sense electrodes are configured to produce a sense signal from the oscillating movement of the at least one mass element. The gyroscope control circuit comprises an amplitude detection unit which detects a sense signal amplitude at the frequency 2ω.sub.D. This amplitude yields a measure of drive oscillation amplitude. Amplitude detection at the frequency ω.sub.D yields a measure of angular rotation rate.

One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.