A capacitive displacement sensor system with interdigitated combs, includes capacitive detection in a direction perpendicular to the surfaces of the combs facing one another, the combs being subjected to a sinusoidal movement in the direction, comprising: a device for converting the capacitance delivered by the sensor into a voltage; an analog/digital converter configured to digitize the voltage delivered by the conversion device, and supply a digitized signal; and a control unit comprising: a harmonic estimator configured to estimate the amplitudes of the harmonics of order less than or equal to a maximum order based on the digitized signal and a reference angle corresponding to the instantaneous angle of the input angular frequency; and a signal reconstruction module for reconstructing the signal from the amplitudes and the reference angle that are supplied by the harmonic estimator and from the digitized signal delivered by the analog/digital converter.

Disclosed embodiments include a multi-mode sensor including an elastomeric strand having a first multi-mode sensing region configured to sense at least two different physical parameters, and a second multi-mode sensing region, space apart from the first multi-mode sensing region, and configured to sense at least two different physical parameters. In some disclosed embodiments the first multi-mode sensing region is configured to measure the physical parameters of angular displacement and strain.

The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.

An apparatus includes a first electrode, a second electrode, and a third electrode having first and second opposing surfaces. The first opposing surface is adjacent the first electrode and separated from the first electrode by a first distance, and the second opposing surface is adjacent the second electrode and separated from the second electrode by a second distance. The third electrode is configured to move relative to the first and second electrodes. A capacitance sensing circuit is coupled to the first and second electrodes. The capacitive sensing circuit is configured to determine a capacitance using the first and second electrodes.

Described example user interface control apparatus includes a first structure, with a first side, conductive capacitor plate structures spaced along a first direction on the first side, a movable second structure with an auxiliary conductive structure, and an interface circuit to provide excitation signals to, and receive sense signals from, the conductive capacitor plate structures to perform a mutual capacitance test and a self-capacitance test of individual ones of the conductive capacitor plate structures to determine a position of the second structure or a user's finger relative to the first structure along the first direction.

A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.

A position sensor for a linear actuator, a production method for a position sensor, a linear actuator with a position sensor, and a method for determining a position of a linear actuator. The position sensor has a capacitor arrangement and a data processing device. The capacitor arrangement has a first capacitor element and a second capacitor element arranged to be movable relative to the first capacitor element and designed to generate a capacitive signal. A data processing device is configured to determine the position of the second capacitor element relative to the first capacitor element based on the capacitive signal. The second capacitor element is made of an electrically conductive polymer.

A capacitive detection device comprising: a capacitive detector comprising a ribbon made of a dielectric material, a pair of electrodes formed on a first face of said ribbon and comprising a first electrode and a second electrode in the form of combs whose branches are arranged alternately between one another; and a third electrode in the form of a layer formed on the other face of said ribbon; and further comprising a containment electrode arranged at least partly facing and at a distance from said pair of electrodes, this containment electrode being electrically connected to said third electrode. Measurement devices including this capacitive detection device are also disclosed.

Disclosed herein are drug delivery devices and methods for component positioning of a pump, such as a linear shuttle pump. In some approaches, a system may include first and second terminals movable with respect to one another, and a sensor device operable to detect a change in capacitance between the first and second terminals as the first and second terminals move with respect to one another. The sensor device may include a two-stage charger connected with a controller and a voltage source, the two-stage charger having a first capacitor connected with a first switch and a second capacitor connected with a second switch, the controller being operable to close the first switch to connect the first capacitor with the voltage source to charge the first capacitor, and open the first switch and close the second switch to connect the second capacitor with the voltage source to charge the second capacitor.

A capacitive sensor to determine instantaneous angular position of a rotatable element in a timepiece, such as a setting stem of a wristwatch. Static electrodes are configured to form, in conjunction with rotor electrodes of the rotatable element, a first differential capacitance pair and a second differential capacitance pair. A sensor calculation unit is configured to sense difference values from the differential capacitances pairs and to evaluate the angular position of the rotatable element from the difference values using predetermined information relating the differential capacitance values to angular position values.