A pressure sensor assembly and method of manufacturing the same are provided. The pressure sensor assembly includes a contoured sensing insert. The contoured sensing insert includes an outer sensing insert having an open interior through-hole and a top contoured surface configured to be secured at least partially within the fluid flow container. The top contoured surface has a surface contour corresponding with an interior wall contour of the fluid flow container. The contoured sensing insert also includes an inner sensing medium defined within the through-hole of the outer sensing insert. The inner sensing medium defines a conforming contoured surface at least substantially matching the surface contour of the top contoured surface. A corresponding method of manufacturing is also provided.

A pressure sensor assembly and method of manufacturing the same are provided. The pressure sensor assembly includes a contoured sensing insert. The contoured sensing insert includes an outer sensing insert having an open interior through-hole and a top contoured surface configured to be secured at least partially within the fluid flow container. The top contoured surface has a surface contour corresponding with an interior wall contour of the fluid flow container. The contoured sensing insert also includes an inner sensing medium defined within the through-hole of the outer sensing insert. The inner sensing medium defines a conforming contoured surface at least substantially matching the surface contour of the top contoured surface. A corresponding method of manufacturing is also provided.

A fluid flow rate measurement device includes: a manifold element including a first fluid conduit extending from a surface thereof and terminating in a first port opening at a first lateral surface thereof and a second port opening at a second lateral surface thereof, and a second fluid conduit extending from a surface thereof and terminating in a third port opening at the first lateral surface and a fourth port opening at the second lateral surface; a fluid restriction element fixed to the first lateral surface and arranged to provide a sealed fluid pathway between the first port and the third port; and—a pressure sensor assembly fixed to the second lateral surface and including a first pressure sensor in fluidic communication with the second port, and a second pressure sensor in fluidic communication with the fourth port.

A fluid flow rate measurement device includes: a manifold element including a first fluid conduit extending from a surface thereof and terminating in a first port opening at a first lateral surface thereof and a second port opening at a second lateral surface thereof, and a second fluid conduit extending from a surface thereof and terminating in a third port opening at the first lateral surface and a fourth port opening at the second lateral surface; a fluid restriction element fixed to the first lateral surface and arranged to provide a sealed fluid pathway between the first port and the third port; and—a pressure sensor assembly fixed to the second lateral surface and including a first pressure sensor in fluidic communication with the second port, and a second pressure sensor in fluidic communication with the fourth port.

To make it possible to incorporate a fluid resistance element into a flow path through which a fluid flows without difficulty while enjoying advantages from forming a resistance flow path using ceramic, provided is a fluid resistance element including: a ceramic flow path forming member having one or a plurality of resistance flow paths; and a metal covering member covering an outer peripheral face of the flow path forming member.

Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.

Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.

Disclosed is an apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device, in particular a coater or a bonder. The apparatus includes a sealing structure arranged in the pipe, a flow structure having a fluid inlet arranged upstream of the sealing structure and a fluid outlet arranged downstream of the sealing structure, a first chamber arranged in the pipe upstream of the sealing structure, and a second chamber arranged in the pipe downstream of the sealing structure, and a measuring device, wherein the measuring device is adapted to measure a first fluid pressure in the first chamber and a second fluid pressure in the second chamber, wherein the measuring device is configured to determine the fluid flow based on the first and second fluid pressure.

A system and method for metering fluid flow is disclosed which has improved diagnostic capabilities. As well as informing a flow meter operator of the presence of a malfunction and its likely cause, the new systems and methods can also quantify an associated flow prediction bias.

A system and method for metering fluid flow is disclosed which has improved diagnostic capabilities. As well as informing a flow meter operator of the presence of a malfunction and its likely cause, the new systems and methods can also quantify an associated flow prediction bias.