Cost effective pressure sensors for gas meters are described herein. In an example, responsive to an abnormal condition at an ultrasonic metrology unit of a gas meter, rates of pressure sensor operation are increased. In the example, the operations may include: measuring gas-environment pressure values; measuring contemporaneous air-environment pressure values; calculating pressure difference values of the gas-environment pressure values minus the contemporaneous air-environment pressure values; and comparing pressure difference values to one or more threshold values.

Cost effective pressure sensors for gas meters are described herein. In an example, responsive to an abnormal condition at an ultrasonic metrology unit of a gas meter, rates of pressure sensor operation are increased. In the example, the operations may include: measuring gas-environment pressure values; measuring contemporaneous air-environment pressure values; calculating pressure difference values of the gas-environment pressure values minus the contemporaneous air-environment pressure values; and comparing pressure difference values to one or more threshold values.

The present disclosure relates to a method for operating a flow measuring point for media having at least one liquid phase, the flow measuring point including: a Coriolis measuring device for measuring the mass flow rate and the density of a medium flowing through a pipeline; and a pressure-difference measuring apparatus for sensing the pressure difference between a flow region arranged upstream of the Coriolis measuring device and a flow region arranged downstream of the Coriolis measuring device, wherein a flow measurement based on measured values of the pressure difference is corrected by means of measured values acquired using the Coriolis measuring device.

The present disclosure relates to a method for operating a flow measuring point for media having at least one liquid phase, the flow measuring point including: a Coriolis measuring device for measuring the mass flow rate and the density of a medium flowing through a pipeline; and a pressure-difference measuring apparatus for sensing the pressure difference between a flow region arranged upstream of the Coriolis measuring device and a flow region arranged downstream of the Coriolis measuring device, wherein a flow measurement based on measured values of the pressure difference is corrected by means of measured values acquired using the Coriolis measuring device.

The present disclosure relates to a method for operating a flow measuring point for media having at least one liquid phase, the flow measuring point including: a Coriolis measuring device for measuring the mass flow rate and the density of a medium flowing through a pipeline; and a pressure-difference measuring apparatus for sensing the pressure difference between a flow region arranged upstream of the Coriolis measuring device and a flow region arranged downstream of the Coriolis measuring device, wherein a flow measurement based on measured values of the pressure difference is corrected by means of measured values acquired using the Coriolis measuring device.

The present disclosure relates to a method for operating a flow measuring point for media having at least one liquid phase, the flow measuring point including: a Coriolis measuring device for measuring the mass flow rate and the density of a medium flowing through a pipeline; and a pressure-difference measuring apparatus for sensing the pressure difference between a flow region arranged upstream of the Coriolis measuring device and a flow region arranged downstream of the Coriolis measuring device, wherein a flow measurement based on measured values of the pressure difference is corrected by means of measured values acquired using the Coriolis measuring device.

The present disclosure relates to a method for measuring the flow of a liquid medium having variable gas content, on the basis of a differential pressure measurement by means of a differential pressure-generating primary element, through which the medium flows, which method comprises: ascertaining a differential pressure measurement value between two measuring points of the differential pressure-generating primary element; ascertaining a flow regime; ascertaining a flow rate measurement value as a function of the differential pressure measurement value and the flow regime, wherein the flow rate measurement value is ascertained by ascertaining a provisional flow rate measurement value on the basis of the differential pressure measurement value under the assumption of a first flow regime, which provisional flow rate measurement value is corrected if a second flow regime different from the first flow regime is detected.

The present disclosure relates to a method for measuring the flow of a liquid medium having variable gas content, on the basis of a differential pressure measurement by means of a differential pressure-generating primary element, through which the medium flows, which method comprises: ascertaining a differential pressure measurement value between two measuring points of the differential pressure-generating primary element; ascertaining a flow regime; ascertaining a flow rate measurement value as a function of the differential pressure measurement value and the flow regime, wherein the flow rate measurement value is ascertained by ascertaining a provisional flow rate measurement value on the basis of the differential pressure measurement value under the assumption of a first flow regime, which provisional flow rate measurement value is corrected if a second flow regime different from the first flow regime is detected.

A method may include obtaining first pressure data regarding a first pressure sensor upstream from a restricted orifice and second pressure data regarding a second pressure sensor downstream from the restricted orifice. The method may further include obtaining temperature data regarding a temperature sensor coupled to the restricted orifice. The method may further include obtaining various gas parameters regarding a predetermined gas flowing through the restricted orifice and various orifice parameters regarding the restricted orifice. The method may further include determining a first gas flow rate of the predetermined gas based on a gas flow model, the first pressure data, the second pressure data, the temperature data, the gas parameters, and the orifice parameters.

The method comprises producing a measurement signal (s1) having a signal parameter, followed with a temporal change (Δx1/Δt; Δx1′/Δt) of a primary measured variable (x1) and a temporal change (Δy1/Δt) of a disturbing variable (Δ1), and producing a measurement signal (s2) having a signal parameter, followed by a temporal change (Δx2/Δt; Δx2′/Δt) of a primary measured variable (x2). The method comprises ascertaining measured values (X.sub.I) of first type representing the primary measured variable (x1) or a secondary measured variable (f(x1) Δx1′) of measured values (X.sub.II) of second type representing the primary measured variable (x2) or a secondary measured variable (f(x2) Δx2′). The method comprises using measured values (X.sub.I) of first type and measured values (X.sub.II) of second type for ascertaining an error characterizing number (Err) representing a velocity error (ΔX.sub.I/ΔX.sub.II) caused by a change of the disturbing variable (y1).

The method comprises producing a measurement signal (s1) having a signal parameter, followed with a temporal change (Δx1/Δt; Δx1′/Δt) of a primary measured variable (x1) and a temporal change (Δy1/Δt) of a disturbing variable (Δ1), and producing a measurement signal (s2) having a signal parameter, followed by a temporal change (Δx2/Δt; Δx2′/Δt) of a primary measured variable (x2). The method comprises ascertaining measured values (X.sub.I) of first type representing the primary measured variable (x1) or a secondary measured variable (f(x1) Δx1′) of measured values (X.sub.II) of second type representing the primary measured variable (x2) or a secondary measured variable (f(x2) Δx2′). The method comprises using measured values (X.sub.I) of first type and measured values (X.sub.II) of second type for ascertaining an error characterizing number (Err) representing a velocity error (ΔX.sub.I/ΔX.sub.II) caused by a change of the disturbing variable (y1).

A substrate processing system includes a chamber group including chambers configured to process a substrate in a desired process gas, a gas box group including gas boxes configured to supply the process gas to each of the chambers, a flow rate measuring device configured to measure a flow rate of the process gas supplied from the gas box group, and an exhaust device connected to the chamber group and the flow rate measuring device. The flow rate measuring device includes a measuring instrument and a measurement pipe connected to the gas box group and the measuring instrument and configured to flow the process gas through the gas box group and the measuring instrument. The measurement pipe includes branch pipes connected to each of the gas boxes, a main pipe connected to each of the branch pipes and the measuring instrument, and branch pipe valves provided in the branch pipes.