Provided is a thermal flow meter including a conductive measurement tube including an inlet through which liquid enters and an outlet through which the liquid exits and including an internal flow passage extending along an axis, and a sensor substrate including a heating resistance wire and a temperature detecting resistance wire formed on a detection surface along the axis, and in the detection surface, an insulation area is formed where the heating resistance wire and the temperature detecting resistance wire are coated with a thin-film insulating material, and the insulation area is joined to the measurement tube along the axis.

A sensor element with a thin-film structure is made of platinum or a platinum alloy. The structure being applied to a ceramic substrate, in particular an Al.sub.2O.sub.3 substrate and being covered by a glass-ceramic coating. The glass-ceramic coating has an outer surface with surface profiling. A sensor module, a measuring assembly, and an exhaust-gas re-circulation system include the sensor element.

A sensor element with a thin-film structure is made of platinum or a platinum alloy. The structure being applied to a ceramic substrate, in particular an Al.sub.2O.sub.3 substrate and being covered by a glass-ceramic coating. The glass-ceramic coating has an outer surface with surface profiling. A sensor module, a measuring assembly, and an exhaust-gas re-circulation system include the sensor element.

An intake device includes an air filter that filters intake air for an internal combustion engine, a filter casing housing the air filter, and an air physical quantity sensor. The filter casing includes an intake passage to allow the intake air to pass from upstream to downstream of the air filter. The filter casing has a passage wall portion that is electrically conductive and exposed to the intake passage on a downstream side of the air filter. The air physical quantity sensor has: a sensor element that detects a specific physical quantity related to the intake air on a downstream side of the air filter; and a grounding structure electrically connected to the passage wall portion for grounding the sensor element.

An intake device includes an air filter that filters intake air for an internal combustion engine, a filter casing housing the air filter, and an air physical quantity sensor. The filter casing includes an intake passage to allow the intake air to pass from upstream to downstream of the air filter. The filter casing has a passage wall portion that is electrically conductive and exposed to the intake passage on a downstream side of the air filter. The air physical quantity sensor has: a sensor element that detects a specific physical quantity related to the intake air on a downstream side of the air filter; and a grounding structure electrically connected to the passage wall portion for grounding the sensor element.

A novel thermopile having high sensitivity and reliability at the time of measuring a flow rate of gas in a thermopile sensor is provided. A thermopile sensor includes a thermopile in which pairings of PolySi and a metal film are connected in series on an insulating film, the metal film is connected so as to overlap on the PolySi in each pair, the metal film crosses a gap between the PolySi and the PolySi in a connection portion between pairings, and a gap between the PolySis in a portion where the metal film crosses is wider than a gap between the PolySis in the remaining portion.

The present disclosure relates to an apparatus for determining and/or monitoring the mass flow and/or flow velocity of a flowable medium through a pipeline, comprising at least one heating element, which is at least partially and/or at times in thermal contact with the medium and is operable at least at times by means of a heating signal. Furthermore, the present disclosure relates to a method for producing an apparatus of the disclosure. According to the disclosure, the heating element is at least partially surrounded in a region facing the medium by a unit comprising a material with an anisotropic thermal conductivity.

The present disclosure relates to an apparatus for determining and/or monitoring the mass flow and/or flow velocity of a flowable medium through a pipeline, comprising at least one heating element, which is at least partially and/or at times in thermal contact with the medium and is operable at least at times by means of a heating signal. Furthermore, the present disclosure relates to a method for producing an apparatus of the disclosure. According to the disclosure, the heating element is at least partially surrounded in a region facing the medium by a unit comprising a material with an anisotropic thermal conductivity.

To provide an airflow amount measuring device capable of accurately measuring a flow amount of air without occurrence of warpage in a thin film portion when an airflow measuring element is mounted on a lead frame to form a resin-sealed package in which the airflow amount measuring element and the lead frame are sealed. A chip package includes a lead frame, an element mounted on the lead frame and having a detection portion, and a structure for sealing the lead frame and the element such that at least the detection portion is exposed. Then, the curvature radius ρ of the exposed portion of the element exposed from the sealing resin member is 2.13 or less.

To provide an airflow amount measuring device capable of accurately measuring a flow amount of air without occurrence of warpage in a thin film portion when an airflow measuring element is mounted on a lead frame to form a resin-sealed package in which the airflow amount measuring element and the lead frame are sealed. A chip package includes a lead frame, an element mounted on the lead frame and having a detection portion, and a structure for sealing the lead frame and the element such that at least the detection portion is exposed. Then, the curvature radius ρ of the exposed portion of the element exposed from the sealing resin member is 2.13 or less.