A flow meter is disclosed. The flow meter can include a housing that has a cavity. The flow meter can also include a deformable tube that is disposed in the cavity. The deformable tube can comprise a portion of a flow path of a fluid substance. The flow meter can further include a cam that is rotatably coupled to the housing. A portion of the cam is configured to press against a portion of the collapsible tube so as to deform the portion of the collapsible tube. The cam can be configured to rotate in response to a flow of the fluid substance in the flow path.

A flow meter for measuring a flow rate of a fluid may include a cartridge containing certain components such as a flow sensor. The cartridge is removable from the flow meter such that it may be replaced with a new cartridge, allowing calibration of the flow meter while enabling the flow meter to continue to be operated with another cartridge in the place of the removed cartridge. The flow meter may be configured to direct fluid flow away from selected components of the flow meter.

A flow meter is disclosed. The flow meter can include a housing that has a cavity. The flow meter can also include a deformable tube that is disposed in the cavity. The deformable tube can comprise a portion of a flow path of a fluid substance. The flow meter can further include a cam that is rotatably coupled to the housing. A portion of the cam is configured to press against a portion of the collapsible tube so as to deform the portion of the collapsible tube. The cam can be configured to rotate in response to a flow of the fluid substance in the flow path.

Disclosed is a method of inspecting a flow rate measuring system used in a substrate processing system. The flow rate measuring system provides a gas flow path used for calculating a flow rate in a build-up method. A gas output by a flow rate controller of a gas supply unit of the substrate processing system may be supplied to the gas flow path. In the method, apart from a previously obtained initial value of a volume of the gas flow path, a volume of the gas flow path is obtained at the time of inspection of the flow rate measuring system. Then, the obtained volume is compared to the initial value.

A flow meter for measuring a flow rate of a fluid may include a cartridge containing certain components such as a flow sensor. The cartridge is removable from the flow meter such that it may be replaced with a new cartridge, allowing calibration of the flow meter while enabling the flow meter to continue to be operated with another cartridge in the place of the removed cartridge. The flow meter may be configured to direct fluid flow away from selected components of the flow meter.

Apparatus for determining a measurement error of a displacement volumetric meter, the meter having bellows which in use expand and contract to transmit a fluid. The apparatus including a transducer operable to detect movement of the bellows and to generate a signal which varies in accordance with the movement of the bellows; and a computing device in communication with the transducer so as to receive the signal therefrom, the computing device being operable to determine a flow rate of fluid through the meter based on the signal, and to determine a measurement error of the meter based on the determined flow rate. A corresponding method, meter monitoring device and meter measurement error determining device are also disclosed.

Disclosed is a method of inspecting a flow rate measuring system used in a substrate processing system. The flow rate measuring system provides a gas flow path used for calculating a flow rate in a build-up method. A gas output by a flow rate controller of a gas supply unit of the substrate processing system may be supplied to the gas flow path. In the method, apart from a previously obtained initial value of a volume of the gas flow path, a volume of the gas flow path is obtained at the time of inspection of the flow rate measuring system. Then, the obtained volume is compared to the initial value.

An encoder device and a fluid meter incorporating the encoder device is disclosed herein, wherein the fluid meter can embody a gas meter that monitors supply of gas to a consumer. The encoder device is configured to generate a signal with information that quantifies the supply of gas, for example, by associating the movement of a moveable element with a volume of fluid that flows through the gas meter The gas meter can include a metrological part with a housing that forms an interior space that wholly encloses the encoder device therein and can also be configured with an input/output member that conducts the signal from inside of the interior space to outside of the housing.

A fluid measurement or control device has an outer housing with a corner portion cut out, in which an electric line connection is located and which optionally can be closed with a lid.

Embodiments of an encoder device and a fluid meter incorporating the encoder device, wherein the fluid meter can embody a gas meter that monitors supply of gas to a consumer. The encoder device is configured to generate a signal with information that quantifies the supply of gas, for example, by associating the movement of a moveable element with a volume of fluid that flows through the gas meter. In one example, the gas meter can include a metrological part with a housing that forms an interior space that wholly encloses the encoder device therein. This embodiment can also be configured with an input/output member that conducts the signal from inside of the interior space to outside of the housing.