A Method for producing a microsystem (1) with pixels includes: producing a thermal silicon oxide layer on the surface of a silicon wafer as a base layer (5) by oxidation of the silicon wafer; producing a silicon oxide thin layer on the base layer as a carrier layer (6)by thermal deposition; producing a platinum layer on the carrier layer by thermal deposition, whereby an intermediate product is produced; cooling the intermediate product to room temperature; pixel-like structuring of the platinum layer by removing surplus areas of the platinum layer, whereby bottom electrodes (8, 12) of the pixels (7, 8) are formed in pixel shape on the carrier layer in remaining areas; removing material on the side of the silicon wafer facing away from the base layer, so a frame (3) remains and a membrane (4) formed by the base layer and the carrier layer is spanned by the frame.

A micromechanical sensor device and a corresponding production method include a substrate that has a front and a rear and a plurality of pillars that are formed on the front of the substrate. On each pillar, a respective sensor element is formed, which has a greater lateral extent than the associated pillar. A cavity is provided laterally to the pillars beneath the sensor elements. The sensor elements are laterally spaced apart from each other by respective separating troughs and make electrical contact with a respective associated rear contact via the respective associated pillar.

A pyroelectric presence identification system includes focal plane array and a processor coupled to the focal plane array. The focal plane array includes a first image sensor and a plurality of second image sensors configured to convert radiant energy into an electrical signal. The processor is configured to control the focal plane array in a sleep mode wherein the first image sensor is utilized to detect gross motion of at least one presence and the plurality of second image sensors are de-energized.

The invention relates to a pixel matrix of a thermal pattern sensor comprising several rows and several columns of pixels, said matrix comprising: an active thermal element formed by a thermosensitive material disposed between a lower layer and an upper layer, the lower layer being constituted by a plurality of first tracks made of electrically conductive material and extending along a first direction, said first tracks forming pixel columns; a heating element, disposed on the active thermal element and forming a serpentine path, said heating element being constituted by a plurality of second tracks (L1, L2, L3, L4, L5, L6) made of electrically conductive material and connecting segments (w1, w2, w3, w4, w5, w6) made of electrically conductive material connected to the ends of the second tracks (L1, L2, L3, L4, L5, L6), said second tracks (L1, L2, L3, L4, L5, L6) extending in a second direction different from the first direction and forming lines of pixels, the second tracks being connected except for the first and last second tracks (L1, L2, L3, L4, L5, L6), by their respective ends to one of the ends of a second preceding track and a second following track by way of said connecting segments (w1, w2, w3, w4, w5, w6), the first and last second tracks each having a free end connected to a connecting segment.

A photodetector array comprising at least one first sensor and at least one second sensor on the horizontal surface of the array substrate. The at least one first sensor is sensitive to radiation in a first wavelength range which comprises long-wavelength infrared wavelengths, and the at least one second sensor is sensitive to radiation in a second wavelength range which comprises wavelengths shorter than long-wavelength infrared. The array substrate comprises a vertical cavity on its horizontal surface, and the first sensor comprises a layer of pyroelectric material (65) which extends horizontally across the vertical cavity in the first area. A first part of a layer of two-dimensional layered material at least partly covers the layer of pyroelectric material (65), and a second part of the layer of two-dimensional layered material at least partly covers the foundation of the second sensor.

The present invention relates to a system for measuring the power of electromagnetic radiation (EMR) using piezoelectric transducers (PZTs) and pyroelectric transducers (PRTs). According to an illustrative embodiment of the present disclosure, a target cell has a mirrored surface that can partially reflect and partially absorb EMR. Each target cell can include or be coupled to PZTs and PRTs. When incident EMR reflects off of targets cells, the reflected portion creates radiation pressure and the non-reflected portions creates heat. The PZTs convert the pressure into a first electric current, and the PRTs convert the heat into a second electric current. Measuring the first and/or second currents allows a user to calculate the original power of an EMR source. By utilizing multiple target cells placed in specially designed arrays, a user can calculate fluctuations of EMR power by time and location across the target cells.

Method for capturing a thermal pattern by a sensor comprising a plurality of pixels each comprising a heat-sensitive measuring element, the method comprising, for each pixel: heating the measuring element; first reading of the electrical charges outputted by the pixel during a first measurement duration and giving a first measurement value x.sub.1; second reading of the electrical charges outputted by the pixel during a second measurement duration and giving a second measurement value x.sub.2; calculating a difference x.sub.1−α.Math.x.sub.2, where α is a positive real number, and wherein more than half of the heating duration is implemented during the first measurement duration and less than half of the heating duration is implemented during the second measurement duration.

A method and device which can receive and identify electromagnetic radiation in the terahertz (THz) frequency range. The device has a combination of material and geometric parameters that are unique and tunable, enabling resonating frequencies for spectral selectivity in the THz range (0.1-15) with ultra-narrow channel widths (0.01-0.10 THz) full width at half maximum (FWHM). Dependent upon configuration, the device may be employed as a large area resonator to collect weak or diffuse signals or as a constituent of an array able to take pictures within the spectrum for which they are sensitive.

A motion sensing device adapts a field of view around a primary sensing axis of the motion sensing device by electrically controlling a detection sensitivity of a passive infrared sensor of the motion sensing device. Responsive to adapting the field of view, the motion sensing device monitors for motion within the field of view using the passive infrared sensor.

A motion sensing device adapts a field of view around a primary sensing axis of the motion sensing device by electrically controlling a detection sensitivity of a passive infrared sensor of the motion sensing device. Responsive to adapting the field of view, the motion sensing device monitors for motion within the field of view using the passive infrared sensor.