A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

A method for phase contrasting-correlation spectroscopy: converting an incident linearly polarized light into two polarized components (polarized divergent and convergent components, wherein the polarized divergent component is orthogonal to the polarized convergent component), focusing each of the polarized divergent component and the polarized convergent component into a focal plane, thereby producing two focus planes constituting a reference focus (RF) plane and a sample focus (SF) plane; placing a sample at the SF plane and ambient conditions of the sample at the RF plane, resulting in a phase shift between the two polarized components; reconstituting the two phase-shifted polarized components into a phase-shifted linearly polarized light; detecting the phase-shifted linearly polarized light; calculating phase and intensity of the sample from the phase-shifted linearly polarized light; establishing an autocorrelation of phase and intensity of the phase-shifted linearly polarized light; and generating correlograms of intensity and phase of the phase-shifted linearly polarized light.

A method for phase contrasting-correlation spectroscopy: converting an incident linearly polarized light into two polarized components (polarized divergent and convergent components, wherein the polarized divergent component is orthogonal to the polarized convergent component), focusing each of the polarized divergent component and the polarized convergent component into a focal plane, thereby producing two focus planes constituting a reference focus (RF) plane and a sample focus (SF) plane; placing a sample at the SF plane and ambient conditions of the sample at the RF plane, resulting in a phase shift between the two polarized components; reconstituting the two phase-shifted polarized components into a phase-shifted linearly polarized light; detecting the phase-shifted linearly polarized light; calculating phase and intensity of the sample from the phase-shifted linearly polarized light; establishing an autocorrelation of phase and intensity of the phase-shifted linearly polarized light; and generating correlograms of intensity and phase of the phase-shifted linearly polarized light.

A light frequency standard for use as an optical clock is disclosed that is improved by optical pumping. Optical pumping is utilized to change the ground states of the atomic vapor from transition forbidden to transition allowed ground states involved in two-photon absorption process. The added element of an optical pump increases the absorbers available in the two-photon process and creates a stronger absorption line signal used for locking the laser to an absolute frequency.

An optical spectrometer based upon two-photon absorption is disclosed that is improved by optical pumping. In this case, two optical pumps are used, One optical pump provides photons for two-photon absorption, but it also depletes absorbing atoms that are in ground states where two-photon absorption is allowed. The other optical pump replenishes the supply of absorbing atoms into ground states allowing two-photon absorption. The spectrometer is useful for measuring Doppler shift with LIDAR.

A light frequency standard for use as an optical clock is disclosed that is improved by optical pumping. Optical pumping is utilized to change the ground states of the atomic vapor from transition forbidden to transition allowed ground states involved in two-photon absorption process. The added element of an optical pump increases the absorbers available in the two-photon process and creates a stronger absorption line signal used for locking the laser to an absolute frequency.

An optical spectrometer based upon two-photon absorption is disclosed that is improved by optical pumping. In this case, two optical pumps are used, One optical pump provides photons for two-photon absorption, but it also depletes absorbing atoms that are in ground states where two-photon absorption is allowed. The other optical pump replenishes the supply of absorbing atoms into ground states allowing two-photon absorption. The spectrometer is useful for measuring Doppler shift with LIDAR.

A system for a high resolution optical spectrum analyzer (OSA) using various optical configurations to reduce polarization dependent loss (PDL) is disclosed. The system may include a birefringent element to receive an input optical beam. The birefringent element may then split the optical beam into at least two exit beams. The system may also include an optical configuration comprising at least one optical element. The optical configuration may receive the at least two exit beams from the birefringent element and transform at least one of the two exit beams using the at least one optical element to provide two parallel beams with parallel polarizations. The optical configuration may then output the two parallel beams with parallel polarizations to a downstream optical element, such as a diffraction grating, or other optical element.

A system for a high resolution optical spectrum analyzer (OSA) using various optical configurations to reduce polarization dependent loss (PDL) is disclosed. The system may include a birefringent element to receive an input optical beam. The birefringent element may then split the optical beam into at least two exit beams. The system may also include an optical configuration comprising at least one optical element. The optical configuration may receive the at least two exit beams from the birefringent element and transform at least one of the two exit beams using the at least one optical element to provide two parallel beams with parallel polarizations. The optical configuration may then output the two parallel beams with parallel polarizations to a downstream optical element, such as a diffraction grating, or other optical element.

This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.

This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.