An assembly is provided for a turbine engine. This turbine engine assembly includes a turbine engine structure and a sensor system. The sensor system includes a probe and an optical sensor. The probe is connected to the turbine engine structure. The probe projects into a gas path of the turbine engine. The sensor system is configured to measure a temperature of the probe using the optical sensor.

An assembly is provided for a turbine engine. This turbine engine assembly includes a turbine engine structure and a sensor system. The sensor system includes a probe and an optical sensor. The probe is connected to the turbine engine structure. The probe projects into a gas path of the turbine engine. The sensor system is configured to measure a temperature of the probe using the optical sensor.

An apparatus for processing substrates includes a continuum radiation source, a source manifold optically coupled to the continuum radiation source and comprising: a plurality of beam guides, each having a first end that optically couples the beam guide to the continuum radiation source; and a second end. The apparatus also includes a detector manifold to detect radiation originating from the source manifold and transmitted through a processing area, and one or more transmission pyrometers configured to analyze the source radiation and the transmitted radiation to determine an inferred temperature proximate the processing area.

An apparatus for processing substrates includes a continuum radiation source, a source manifold optically coupled to the continuum radiation source and comprising: a plurality of beam guides, each having a first end that optically couples the beam guide to the continuum radiation source; and a second end. The apparatus also includes a detector manifold to detect radiation originating from the source manifold and transmitted through a processing area, and one or more transmission pyrometers configured to analyze the source radiation and the transmitted radiation to determine an inferred temperature proximate the processing area.

Systems and methods for measuring a temperature using an optical whispering gallery mode (WGM) resonator are disclosed. The system includes a WGM resonator operatively coupled to a tunable laser source and a detector, as well as a computing device. The computing device is configured to transform a transmission spectrum from the detector into a measured barcode that includes a matrix of values indicative of at least one characteristic of the transmission spectrum. The computing device is further configured to transform the measured barcode into a temperature based on a relative collective shift of the measured barcode from a reference barcode selected from a predetermined library of reference barcodes.

Systems and methods for measuring a temperature using an optical whispering gallery mode (WGM) resonator are disclosed. The system includes a WGM resonator operatively coupled to a tunable laser source and a detector, as well as a computing device. The computing device is configured to transform a transmission spectrum from the detector into a measured barcode that includes a matrix of values indicative of at least one characteristic of the transmission spectrum. The computing device is further configured to transform the measured barcode into a temperature based on a relative collective shift of the measured barcode from a reference barcode selected from a predetermined library of reference barcodes.

There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.

There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.

Embodiments disclosed herein generally relate to a substrate temperature monitoring system in a substrate support assembly. In one embodiment, the substrate support assembly includes a support plate and a substrate temperature monitoring system. The support plate has a top surface configured to support a substrate. The substrate temperature monitoring system is disposed in the substrate support plate. The substrate temperature monitoring system is configured to measure a temperature of the substrate from a bottom surface of the substrate. The substrate temperature monitoring system includes a window, a body, and a temperature sensor. The window is integrally formed in a top surface of the support plate. The body is embedded in the support plate, through the bottom surface. The body defines an interior passage. The temperature sensor is disposed in the interior passage beneath the window. The temperature sensor is configured to measure the temperature of the substrate.

A thermal radiation detection device (1), said device comprising a sensor array (2) comprising a plurality of sensor elements (3) and an optical waveguide (4) having a radiation input end (5) and a radiation output end (6). The radiation input end (5) is configured to receive thermal5 radiation, and the radiation output end (6) is operatively connected to the sensor array (2). The optical waveguide (4) is configured to transmit the received thermal radiation as a plurality of simultaneous thermal radiation signals. By decoupling the sensor array from the radiation input end, the relatively large sensor array can be placed in a position optimal for electronic functionality and optimal in view of mechanical constraints, independent of the radiation input position.