Patent classifications
G01J5/0896
ACTIVE INFRARED THERMOGRAPHY SYSTEM AND COMPUTER-IMPLEMENTED METHOD FOR GENERATING THERMAL IMAGE
An active infrared thermography system and a computer-implemented method for generating a thermal image are provided. The active infrared thermography system includes one or more excitation sources, an infrared camera, one or more portable power sources arranged to power the one or more excitation sources and the infrared camera, and a housing, the one or more excitation sources and the one or more portable power sources being received in the housing.
Method and system for calibrating imaging system
A method comprises capturing outputs of a VLC and an infrared array sensor (IAS). A memory includes a calibration based on a position of a laser pointer relative to the IAS. The method includes the laser pointer outputting a light beam to produce a laser dot on a target. The output of the VLC includes a representation of the laser dot. The output of the IAS includes values indicative of infrared radiation from the target. The method includes determining a temperature based on a portion of the values indicative of infrared radiation from the target. The portion of the values includes values associated with a portion of the target at which the laser dot is produced. The method includes displaying, on the display, the output of the VLC and the temperature. Displaying the output of the VLC includes displaying a visible light image showing the laser dot and at least a portion of the target.
Non-destructive, in-situ evaluation of water presence using thermal contrast and cooled detector
Exemplary methods for detecting presence of water in a sample include: heating a light source to a predetermined temperature at which the light source emits thermal radiation; placing a sample between the light source and a detector; transmitting the thermal radiation from the light source through the sample and onto the detector; and determining a presence or an absence of water within the sample based on the thermal radiation transmitted onto the detector. Exemplary systems for detecting presence of water in a sample are also disclosed.
Light interference system and substrate processing apparatus
A light interference system is provided. The light interference system includes a light source configured to generate a measurement light; a fiber configured to propagate therethrough the measurement light; and a measurement device. The fiber includes a single-mode fiber, a multimode fiber and a connector connecting the single-mode fiber and the multimode fiber. A tip end of the fiber is formed of the multimode fiber, and an end surface of the tip end of the fiber is configured to emit the measurement light to a measurement target object and receive a reflection light from the measurement target object. The measurement device is configured to measure physical property of the measurement target object based on the reflection light.
OPTICAL DEVICES
An optical device is provided. The optical device includes a time-of-flight (TOF) sensor array, a photon conversion thin film, and a light source. The photon conversion thin film is disposed above the time-of-flight sensor array. The light source emits light with a first wavelength towards the photon conversion thin film to be converted into light with a second wavelength received by the time-of-flight sensor array. The second wavelength is longer than the first wavelength.
Method and system for calibrating imaging system
A method includes capturing and scaling VLC and an IAS outputs to generate a scaled VLC output and a scaled thermal output (STO), aligning the scaled VLC output to the STO to generate an aligned image based on the scaled VLC output and the STO, determining alignment value(s) based on the aligned image, a laser pointer outputting a light beam to produce a laser dot on a target, and capturing a further output of the VLC. The method includes displaying the further output of the VLC (including a representation of the laser dot (RLD)), and an alignment marker, shifting the alignment marker and/or the RLD to a common position; determining coordinate(s) of the output of the IAS based on coordinate(s) of the further output of the VLC where the alignment marker and the RLD are shown at the common position; and storing the coordinate(s) of the output of the IAS.
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
A thermal processing system for performing thermal processing can include a workpiece support plate configured to support a workpiece and heat source(s) configured to heat the workpiece. The thermal processing system can include window(s) having transparent region(s) that are transparent to electromagnetic radiation within a measurement wavelength range and opaque region(s) that are opaque to electromagnetic radiation within a portion of the measurement wavelength range. A temperature measurement system can include a plurality of infrared emitters configured to emit infrared radiation and a plurality of infrared sensors configured to measure infrared radiation within the measurement wavelength range where the transparent region(s) are at least partially within a field of view the infrared sensors. A controller can be configured to perform operations including obtaining transmittance and reflectance measurements associated with the workpiece and determining, based on the measurements, a temperature of the workpiece less than about 600° C.
Continuous spectra transmission pyrometry
An apparatus for processing substrates includes a continuum radiation source, a source manifold optically coupled to the continuum radiation source and comprising: a plurality of beam guides, each having a first end that optically couples the beam guide to the continuum radiation source; and a second end. The apparatus also includes a detector manifold to detect radiation originating from the source manifold and transmitted through a processing area, and one or more transmission pyrometers configured to analyze the source radiation and the transmitted radiation to determine an inferred temperature proximate the processing area.
SEMICONDUTOR PACKAGE, WEARABLE DEVICE, AND TEMPERATURE DETECTION METHOD
A semiconductor package device, a wearable device, and a temperature detection method are provided. The semiconductor package includes a substrate, an optical module, and a temperature module. The optical module is disposed on the substrate. The temperature module is disposed on the substrate and adjacent to the optical module. The temperature module comprises a semiconductor element and a temperature sensor stacked on the semiconductor element. The optical module is configured to detect a distance between the optical module and an object.
THERMOREFLECTANCE ENHANCEMENT COATINGS AND METHODS OF MAKING AND USE THEREOF
Disclosed herein are thermoreflectance enhancement coatings and methods of making and use thereof.