A device including a sensor is disclosed. In one embodiment, the sensor includes a thermal infrared sensor or a sensor based on CMOS-SOI-MEMS technology (also referred to as “TMOS”). The sensor is capable of performing at least two functions at the same time. The first is remote temperature measurement and the second is presence detection. The sensor passively collects infrared information and a microprocessor coupled to the sensor determines the temperature as well as presence.

A method for contactlessly determining the temperature of a moving object having an unknown degree of emission, especially a metal wire conveyed along its longitudinal axis, is described. The object is guided through at least one radiation source emitting thermal radiation, wherein the object is mostly or completely surrounded by the at least one radiation source. With at least one radiation detector, a spatially-resolved thermal radiation measurement is performed in a region through which the object passes when it is guided through the radiation source. The temperature of the moving object is determined on the basis of the spatially-resolved thermal radiation measurement. A corresponding device is also described.

The present invention aims at providing a high-accuracy contactless measurement method for measuring the temperature of a metal thermoforming mold, which is capable of timely monitoring the metal temperature in multiple areas and also has threshold warning functionalities for delivering real-time notifications, in order to save the labor costs for long-term monitoring.

A method for measuring furnace temperatures. The method includes obtaining radiance measurements from a plurality of regions of interest (ROIs) using a plurality of thermal imaging cameras, and measuring a surface temperature using a radiance measurement obtained from an ROI selected from the plurality of ROIs. Measuring the surface temperature includes determining an effective background radiance affecting the selected ROI using radiance measurements obtained from ROIs different from the selected ROI, obtaining a compensated radiance by removing the effective background radiance from the radiance measurement obtained from the selected ROI, and converting the compensated radiance to the measured surface temperature.

A method of measuring temperature of a part heated during a heating process includes applying a non-reactive coating at a first temperature; heating the part, and thereby the coating thereon, to a second temperature greater than the first temperature; and measuring a temperature distribution of the part by measuring infrared light emitted from the heated coating using a thermal imaging device calibrated to the known emissivity of the coating. The coating is at least partially opaque and having a known emissivity of infrared light and conducts thermal energy from the underlying part.

A system for determining the temperature of a subject includes a thermographic camera and a passive reference object fixedly positioned relative to the thermographic camera with at least a portion of the reference object in a line of sight of the camera. In operation, the system captures temperature information of a subject and the reference object using the thermographic camera. The reference object has known physical properties, such that the reference object can be used as a base line for the system to determine fluctuations in the temperature information. The fluctuations are then removed from the temperature information of the subject to increase an accuracy of the temperature reading of the subject.

The present invention relates to a method and a system of automatically calibrating a radiation thermometer disposed in a polishing apparatus. This method includes: placing a heating device (61), to which a measurement body (68) is attached, below the radiation thermometer (48); and using a controller (40) of the polishing apparatus coupled to the heating device (61) to heat a temperature of the measurement body (68) to a plurality of target temperatures (Ta), to measure the temperatures of the measurement body (68) at each target temperature (Ta) with the radiation thermometer (48), to calculate temperature deviation amounts which are differences between each of the target temperatures (Ta) and temperature output values of the radiation thermometer (48) corresponding to each target temperature (Ta), and to calibrate the radiation thermometer (48) so that all the temperature deviation amounts are within a preset reference range.

In some examples, a method for generating an interactive three-dimensional quantitative thermal heat flow mapping of an environment comprises generating a three-dimensional representation of the environment, the representation comprising multiple surfaces defining respective boundaries of the environment, generating a thermal image representing a surface temperature at multiple points on respective ones of the surfaces of the environment within the three-dimensional representation, determining a measure for an ambient temperature within the environment, determining respective measures for incident radiant temperature of the surfaces, determining respective measures for the emissivity of the surfaces, providing a measure of temperature outside of a surface, calculating, at each of the multiple points, a value for the instantaneous heat flow per unit area using the measures for surface temperature, ambient temperature within the environment and incident radiant temperature of the surfaces, and using the values for the instantaneous heat flow per unit area, and the measure of temperature outside of a surface, calculating respective measures for thermal transmittance at the multiple points.

The invention relates to a method and to a device for the in-situ determination of the temperature ϑ of a sample, in particular to a method and to a device for the surface-corrected determination of the temperature ϑ of a sample by means of the band-edge method.

It is provided that, for the in-situ determination of the temperature ϑ of a sample (10) when growing a layer stack (12) in a deposition system, a surface-corrected transmission spectrum T′(λ) is calculated by determining the quotient of the transmission spectrum T(λ) and a correction function K(λ), the correction function K(λ) being calculated from a determined reflection spectrum R(λ). Subsequently, the spectral position of the band-edge λ.sub.BE is determined from the transmission spectrum T′(λ), and the temperature ϑ is determined from the spectral position of the band-edge λ.sub.BE by means of a known dependency ϑ(λ.sub.BE).

A processing apparatus for a thermal treatment of a workpiece is presented. The processing apparatus includes a processing chamber, a workpiece support disposed within the processing chamber, a gas delivery system configured to flow one or more process gases into the processing chamber from the a first side of the processing chamber, one or more radiative heating sources disposed on the second side of the processing chamber, one or more dielectric windows disposed between the workpiece support and the one or more radiative heating sources, a rotation system configured to rotate the one or more radiative heating sources, and a workpiece temperature measurement system configured at a temperature measurement wavelength range to obtain a measurement indicative of a temperature of a back side of the workpiece.