A thermal sensor in some embodiments comprises two temperature-sensitive branches, each including a thermal-sensing device, such as one or more bipolar-junction transistors, and a current source for generating a current density in the thermal-sensing device to generate a temperature-dependent signal. The thermal sensor further includes a signal processor configured to multiply the temperature-dependent signal from the branches by respective and different gain factors, and combine the resultant signals to generate an output signal that is substantially proportional to the absolute temperature the thermal sensor is disposed at.

A thermal sensor in some embodiments comprises two temperature-sensitive branches, each including a thermal-sensing device, such as one or more bipolar-junction transistors, and a current source for generating a current density in the thermal-sensing device to generate a temperature-dependent signal. The thermal sensor further includes a signal processor configured to multiply the temperature-dependent signal from the branches by respective and different gain factors, and combine the resultant signals to generate an output signal that is substantially proportional to the absolute temperature the thermal sensor is disposed at.

A calibration setup for calibrating a temperature sensor includes a temperature calibrator, a temperature measuring unit connected to the temperature sensor, a camera unit configured to detect a measured temperature value and to transmit the measured temperature value to a storage medium in the temperature calibrator. A method of calibrating a temperature sensor using the calibration setup includes heating the temperature sensor to a first calibration temperature; detecting a first temperature value by the camera unit; transmitting the first temperature value from the camera unit to a storage medium in the temperature calibrator; heating the temperature sensor to at least a second calibration temperature; detecting a second temperature value by the camera unit; transmitting the second temperature value from the camera unit to the storage medium; and displaying the detected and stored temperature values on a calibrator indicator display in a respective association with the calibration temperatures.

A temperature calibration sheet includes a main body and a plurality of test keys arranged in the main body. The test keys have voltage-temperature characteristic curves corresponding to a set current. Temperatures of the test keys are obtained by detecting voltages of the test keys. The temperature calibration sheet can simulate a state of a wafer, sidewalls of the test keys are not exposed to the air, and the state of the temperature calibration sheet arranged on a semiconductor machine is the same as that of the wafer arranged on the semiconductor machine, such that the temperature of the temperature calibration sheet can truly reflect the temperature of the wafer when arranged on the semiconductor machine, and the temperature of the semiconductor machine can be calibrated accurately.

A device, which includes an input, configured to read in an analog signal, an analog/digital converter, configured to convert the analog signal into a digital value, and a processor, configured to determine a digital measured value. The processor is further configured to derive a calibrated digital value from the digital value with the aid of a linear calibration function and to derive the digital measured value from the calibrated digital value with the aid of a nonlinear measurement function. The processor modifies the linear calibration function in response to a calibration signal, based on an algorithm, which is based on the nonlinear measurement function, and a number of predefined comparison measured values.

A device for local temperature measurement that is suitable for taking temperature measurements of an immediate vicinity of said device. The device comprises: a cell comprising a heat-conductive base and at least one first material having a predetermined fixed state-change temperature and arranged in said base; a heat-energy transfer device thermally connected to said base and said at least one first material; a local temperature measurement probe received in said base and in thermal contact with said at least one first material, the heat-energy transfer device being suitable for causing a change of state of said first material in order to carry out at least one metrological verification of the local temperature measurement probe. An associated cell and method for use are also provided.

A method includes post processing a plurality of temperature sensors grouped into a plurality of sets. For each set of the plurality of sets, a post-processing system coupled to corresponding temperature sensors receives a plurality output signals generated by the corresponding temperature sensors. For each set of the plurality of sets, the post-processing system computes values representing proportional to absolute temperature (PTAT) voltages and values representing internal reference voltages based on output signals generated by the corresponding temperature sensors. For each set of the plurality of sets, the post-processing system computes an average of the values representing the PTAT voltages and relative PTAT voltage variation coefficients. For each set of the plurality of sets, the post-processing system computes values representing corrected PTAT voltages using the relative PTAT voltage variation coefficients.

The invention relates to a device (100) for calibrating the temperature of a fiber-optic temperature sensor, with which an optical fiber (10) of a fiber-optic temperature sensor is to be provided. The device (100) comprises a device body (101) having a passage (109) through which the optical fiber (10) is to pass, and a means for transferring heat energy. The device (100) further comprises at least one portion (160a), referred to as a first fixed point, which is made from a first material having at least a first predefined temperature at which the state thereof changes. The first fixed point (160a) is thermally connected to the optical fiber (10) when the optical fiber (10) is provided with the device (100). The heat-transferring means is arranged in the device body (101) such that, during the actuation thereof, the heat-transferring means exchanges heat energy with the first fixed point (160a) so as to cause a change in the state thereof at the first predefined temperature.

A temperature calibrator for calibrating temperature function devices has an outer and an inner housing as well as a calibrator block. The calibrator block is radially spaced from the inner housing to form a flow space. The flow space is in communication with the environment at the upper end and at the lower end to generate a flow. A fan having a fan wheel that can be driven by a motor is connected to the flow space. The fan wheel is formed from a heat-resistant material; and the fan forms a predominantly closed surface in a plan view.

A device, which includes an input, configured to read in an analog signal, an analog/digital converter, configured to convert the analog signal into a digital value, and a processor, configured to determine a digital measured value. The processor is further configured to derive a calibrated digital value from the digital value with the aid of a linear calibration function and to derive the digital measured value from the calibrated digital value with the aid of a nonlinear measurement function. The processor modifies the linear calibration function in response to a calibration signal, based on an algorithm, which is based on the nonlinear measurement function, and a number of predefined comparison measured values.