Methods and systems for non-contact temperature measurement of an object on which is attached or etched a diffraction grating. The diffraction grating expands and contracts as the object expands and contracts upon there being a change in temperature of the object. Upon a light beam being received on the diffraction grating, the diffraction grating produces a pair of complementary light beams and one of the light beams is reflected back onto the diffraction grating and then onto the other light beam in a manner that causes the reflected light beam to propagate alongside and non-parallel to the other light beam. The resultant two light beams are thereafter impinged onto a camera at respective first and second impingement locations. The temperature of the object is then determined based on the separation distance between the first and second impingement locations.

Methods and systems for non-contact temperature measurement of an object on which is attached or etched a diffraction grating. The diffraction grating expands and contracts as the object expands and contracts upon there being a change in temperature of the object. Upon a light beam being received on the diffraction grating, the diffraction grating produces a pair of complementary light beams and one of the light beams is reflected back onto the diffraction grating and then onto the other light beam in a manner that causes the reflected light beam to propagate alongside and non-parallel to the other light beam. The resultant two light beams are thereafter impinged onto a camera at respective first and second impingement locations. The temperature of the object is then determined based on the separation distance between the first and second impingement locations.

Methods and systems for non-contact temperature measurement of an object on which is attached or etched a diffraction grating. The diffraction grating expands and contracts as the object expands and contracts upon there being a change in temperature of the object. Upon a light beam being received on the diffraction grating, the diffraction grating produces a pair of complementary light beams and one of the light beams is reflected back onto the diffraction grating and then onto the other light beam in a manner that causes the reflected light beam to propagate alongside and non-parallel to the other light beam. The resultant two light beams are thereafter impinged onto a camera at respective first and second impingement locations. The temperature of the object is then determined based on the separation distance between the first and second impingement locations.

Methods and systems for non-contact temperature measurement of an object on which is attached or etched a diffraction grating. The diffraction grating expands and contracts as the object expands and contracts upon there being a change in temperature of the object. Upon a light beam being received on the diffraction grating, the diffraction grating produces a pair of complementary light beams and one of the light beams is reflected back onto the diffraction grating and then onto the other light beam in a manner that causes the reflected light beam to propagate alongside and non-parallel to the other light beam. The resultant two light beams are thereafter impinged onto a camera at respective first and second impingement locations. The temperature of the object is then determined based on the separation distance between the first and second impingement locations.

A processing apparatus and a method capable of accurately measuring a real temperature of a workpiece contained and heated in a chamber. The processing apparatus includes a chamber containing a workpiece, a measurement piece installed in the chamber, and a measuring unit. The measurement piece is capable of thermal expansion and contraction in response to an internal temperature of the chamber. The measuring unit measures a thermal expansion and contraction amount of the measurement piece to thereby measure the real temperature of the workpiece.

A processing apparatus and a method capable of accurately measuring a real temperature of a workpiece contained and heated in a chamber. The processing apparatus includes a chamber containing a workpiece, a measurement piece installed in the chamber, and a measuring unit. The measurement piece is capable of thermal expansion and contraction in response to an internal temperature of the chamber. The measuring unit measures a thermal expansion and contraction amount of the measurement piece to thereby measure the real temperature of the workpiece.

The invention relates to methods and apparatus of measuring real time temperature conditions within a reformer. The data is then used for process control optimization, overheat protection, and improved creep damage and fatigue life prediction.

The invention relates to methods and apparatus of measuring real time temperature conditions within a reformer. The data is then used for process control optimization, overheat protection, and improved creep damage and fatigue life prediction.