A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.

A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.

A temperature indicator includes a micro-sensor having a sensing element with a first layer coupled to a second layer where the first and second layers have different coefficients of expansion. The sensing element is configured to move from a first position to a second position in response to exposure to a temperature event and has detection circuitry configured to change from a first state to a second state in response to movement of the sensing element to the second position. The detection circuitry is prevented from returning to the first state in response to changing to the second state. An RFID module is coupled to the detection circuitry and is configured to output a value indicating that the sensing element is in the second position. An activator element is configured to maintain the sensor element in the first position until removal of the activator element from the micro-sensor.

A temperature indicator includes a micro-sensor having a sensing element with a first layer coupled to a second layer where the first and second layers have different coefficients of expansion. The sensing element is configured to move from a first position to a second position in response to exposure to a temperature event and has detection circuitry configured to change from a first state to a second state in response to movement of the sensing element to the second position. The detection circuitry is prevented from returning to the first state in response to changing to the second state. An RFID module is coupled to the detection circuitry and is configured to output a value indicating that the sensing element is in the second position. An activator element is configured to maintain the sensor element in the first position until removal of the activator element from the micro-sensor.

A sensor for detecting a temperature distribution imparted on a substrate in an environment is disclosed. The sensor includes a sensor substrate with one or more temperature sensing elements formed on the sensor substrate. In embodiments, a temperature sensing element includes at least one cavity with a thermally expandable material disposed within the cavity and a channel extending from the cavity with a slug disposed within the channel. In embodiments, the cavity has a fixed volume and is enclosed by a cover layer disposed or formed over the cavity. The thermally expandable material is configured to extend from the cavity into the channel to actuate the slug from a first position within the channel to at least a second position within the channel, where the position of the slug is indicative of a temperature of a respective portion of the sensor substrate.

A sensor for detecting a temperature distribution imparted on a substrate in an environment is disclosed. The sensor includes a sensor substrate with one or more temperature sensing elements formed on the sensor substrate. In embodiments, a temperature sensing element includes at least one cavity with a thermally expandable material disposed within the cavity and a channel extending from the cavity with a slug disposed within the channel. In embodiments, the cavity has a fixed volume and is enclosed by a cover layer disposed or formed over the cavity. The thermally expandable material is configured to extend from the cavity into the channel to actuate the slug from a first position within the channel to at least a second position within the channel, where the position of the slug is indicative of a temperature of a respective portion of the sensor substrate.

A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.

A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.

A temperature indicator includes a micro-sensor having a sensing element with a first layer coupled to a second layer where the first and second layers have different coefficients of expansion. The sensing element is configured to move from a first position to a second position in response to exposure to a temperature event and has detection circuitry configured to change from a first state to a second state in response to movement of the sensing element to the second position. The detection circuitry is prevented from returning to the first state in response to changing to the second state. An RFID module is coupled to the detection circuitry and is configured to output a value indicating that the sensing element is in the second position. An activator element is configured to maintain the sensor element in the first position until removal of the activator element from the micro-sensor.

A temperature indicator includes a micro-sensor having a sensing element with a first layer coupled to a second layer where the first and second layers have different coefficients of expansion. The sensing element is configured to move from a first position to a second position in response to exposure to a temperature event and has detection circuitry configured to change from a first state to a second state in response to movement of the sensing element to the second position. The detection circuitry is prevented from returning to the first state in response to changing to the second state. An RFID module is coupled to the detection circuitry and is configured to output a value indicating that the sensing element is in the second position. An activator element is configured to maintain the sensor element in the first position until removal of the activator element from the micro-sensor.