An industrial process transmitter includes a housing, sensor circuitry, transmitter circuitry, and a radiation shield. The sensor circuitry is contained in the housing, and is configured to sense a process parameter and generate a sensor output that is indicative of the sensed process parameter. The transmitter circuitry is contained in the housing, and is configured to communicate the sensed process parameter to an external unit. The radiation shield substantially surrounds a portion of the housing containing the sensor circuitry and shields the sensor circuitry from gamma radiation.

The invention relates to a pressure sensor, forces after one to three directions, normal to the sensor plane and tangential to the sensor plane, as well as torques, the sensor being based on the variation of reactive or mixed impedances when applying normal forces or pressure and/or tangential forces or torques on the sensor structure. The sensor has a structure that includes a closed and watertight space, so that the behavior of the sensor is little or not affected by varying environmental conditions.

The present application relates to a sensor with a time-sharing regional shielding function and a robot. The sensor comprises a plurality of sensor units, each of which comprises regions contained in four multifunctional layers. Four parallel-plate capacitors are contained in the multifunctional layers. The multifunctional layers realize the regional shielding function through the time-sharing switching of analog switches and the control of a bus.

In a pressure sensor, a cap-shaped shielding member (17) to block an electric field undesirable for a signal processing electronic circuit unit of a sensor chip (16) is supported by an end surface of a disk conductive plate (19) between one end surface of the sensor chip (16) in a liquid sealing chamber (13) and a diaphragm (32). The conductive plate (19) is electrically connected via a group of input-output terminals (40ai) and bonding wires (Wi), for example, and the sensor chip (16) is supported by one end portion of a chip mounting member (18) which is electrically connected via the group of input and output terminals (40ai) and the bonding wires (Wi).

Provided is a pressure detection device including a pressure detection unit configured to detect a pressure to be transmitted to a pressure sensor, and a flow channel unit on which the pressure detection unit is disposed. The pressure detection unit) includes a pressure sensor and a conductive protective film disposed in contact with the pressure sensor, the conductive protective film breaking contact between the pressure sensor and a fluid. The conductive protective film is formed of a conductive fluororesin material including a fluororesin material and a conductive material dispersed in the fluororesin material and is connected to a ground portion maintained at a ground potential.

A protective device for a membrane of a sensor that detects a physical parameter acting upon the membrane includes a hollow main body that elongates in a direction along a longitudinal axis. The main body is open at one opposite end of the main body along the longitudinal axis, and at the end of the main body opposite the open end the protective device includes a bottom in which is defined a passage through which the medium is able reach the membrane when the protective device is attached to the sensor. The passage is defined in part by a wall that is configured so that the electromagnetic radiation propagating in the passage cannot reach the membrane without being reflected at least once on the wall.

A controller configured for detecting a disturbance using a comparison of outputs of at least two sensors and for determining a pressure from the outputs of the at least two sensors. A ratio of the measurement sensitivity and the disturbance sensitivity should be different for the at least two sensors. A method for monitoring disturbances of a sensor assembly includes comparing the outputs of the at least two sensors. The controller and related method provide, while requiring only two sensors, a redundant system that is also able to detect excessive disturbances on a sensor assembly.

A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.

A blood-pressure sensor includes a substrate, a first electrode, a magnetization fixed layer, a nonmagnetic layer, a magnetization free layer, and a second electrode. The substrate is bent to generate a tensile stress at least in a first direction. The first electrode is provided on the substrate. The magnetization fixed layer has magnetization to be fixed in a second direction, and is provided on the substrate. The nonmagnetic layer is provided on the magnetization fixed layer. The magnetization free layer has a magnetization direction which is different from the first direction and from a direction perpendicular to the first direction. The second electrode is provided on the magnetization free layer.

When a main body of a sensor chip (1) is in a grounded state, a shield layer (71) constituting a shield electrode formed on a circuit layer (72) is grounded through a resistor (46).