Improvements in thin film sensors are disclosed. These can be used for aircraft applications. Dielectric isolation washers can be provided between a pressure sensor and an exterior metal housing of a sensor assembly. In this manner, high voltage inputs from a lightning strike or other source that reach the sensor housing are not transmitted to the sensor. Dielectric washers, insulators, and potting compounds can thus isolate a metal thin film pressure sensor from adjacent metal components (e.g., using non-conducting insulating materials like Torlon, zirconia and nylon). Besides their high dielectric strength, these materials exhibit compressive strength and resistance to wear, creep and corrosion. Desirable thicknesses for these components are provided. The described thin film pressure sensor embodiments can attain a dielectric rating of 1500 VAC.

A fluid monitoring assembly includes a conduit having a wall defining a lumen for carrying fluid. A sensor mount is integrally formed with the wall of the conduit and extends generally transverse with respect to a longitudinal axis of the conduit, the sensor mount including an aperture defining an inner surface extending to the lumen. The assembly includes a sensor configured to be removably secured within the sensor mount, the sensor having an elongate body terminating at one end thereof in a sensing portion, the elongate body having a male projection on a portion thereof and configured to rest within the inner surface of the sensor mount. The assembly further includes a housing having first and second portions connected to one another, the housing defining an interior portion configured to encapsulate the conduit, at least a portion of the elongate body of the sensor, and the sensor mount.

A physical quantity measuring device includes a cylindrical case, a cap member, and a sealing member. The cap member covers a circumferential portion of a through-hole of the cylindrical case, while the sealing member provides a seal between the through-hole and the cap member. The cap member is pivotally supported by an attachment target portion of a lid member so that the cap member is rotatable between a first orientation and a second orientation. A cap member engagement portion is insertable into an engagement-portion insertion hole in the first orientation and is engageable with the attachment target portion in the second orientation. A linear member of the sealing member is located, in the first orientation, in a region in a rotation direction from the first orientation to the second orientation. The linear member prevents loss of the cap member and is replaceable, together with the seal member, if damaged.

The invention relates to a housing comprising a venting device (10) which is arranged on the housing (2) and which allows an ambient pressure to be supplied to the interior of the housing (2). The venting device (10) is made of a sleeve-like protective cap (11) with lateral openings (12) and a liquid-repellant membrane, and a cavity for receiving the membrane is formed in the interior of the venting device (10). The membrane is arranged such that an opening, which is provided for the pressure supply, in the wall of the housing (2) is covered. In order to prevent the so-called teapot effect and therefore allow a light dripping of a liquid on the venting device (10), the sleeve-like protective cap (11) has a narrow circumferential expansion (14) in the region of the lateral surface of the protective cap such that a defined dripping edge is formed.

A pressure-sensor assembly (1) for detecting the pressure of a fluid comprises:—- a pressure- sensitive component (2), having a generally cup-shaped sensor body (5), which includes a bottom portion (5a) and a peripheral portion (5b) that define an axial cavity (C.sub.1, C.sub.2), the bottom portion (5a) including an elastically deformable membrane part, which closes the axial cavity (C.sub.1, C.sub.2) at one end of the sensor body (5), and the peripheral portion (5b) having a distal edge opposite to the bottom portion (5a), which delimits an inlet of the axial cavity (C.sub.1, C.sub.2), the bottom portion (5a) having associated thereto at least one element for detecting deformation of the membrane part; and - a compensation element (3), configured for compensating possible variations of volume of the fluid, comprising at least one compensation body (8), made of a first elastically deformable or compressible material, and a core (9) fixed on which is the at least one compensation body (8), the core (9) being made of a second material stiffer than the first material. The sensor body (5) and the compensation

Provided is a pressure sensor including: a housing portion including a housing part housing a pressure sensor module, a concave portion facing the housing part across an inner wall, and a through hole part formed in the inner wall; a filter covering the through hole part; and a cover mounted on the housing portion while covering the concave portion and including cutout parts. The concave portion includes a bottom surface that is one surface of the inner wall, and two side surfaces perpendicular to the bottom surface and opposed to each other. The cover is formed with a rectangular upper plate and two rectangular side plates continuous with edges of the upper plate in a vertical direction and opposed to each other. The upper plate is arranged to face the bottom surface. The two side plates are arranged between the two side surfaces opposed to each other.

A MEMS device, e.g., a flexible MEMS pressure sensor, is formed by disposing a sacrificial layer, such as photoresist, on a substrate. A first flexible support layer is disposed on the substrate, and a first conductive layer is disposed over a portion of the first support layer. A liquid or gel separator, e.g., silicone oil, is disposed on an internal region of the first conductive layer. A second flexible support layer encapsulates the first conductive layer and the separator. A second conductive layer disposed over the second support layer at least partially overlaps the first conductive layer and forms a parallel plate capacitor. A third flexible support layer encapsulates the second conductive layer and second support layer. Soaking the sensor in hot water releases the sensor from the sacrificial layer.

A capacitance diaphragm gauge (CDG) assembly includes a CDG sensor positioned within a vacuum enclosure, which is maintained at a vacuum. The CDG sensor generates sensor signals responsive to a pressure of an applied gas. The vacuum enclosure provides thermal insulation around the CDG sensor. The CDG sensor is maintained at a selected operating temperature using an internal heater positioned on the CDG sensor. The internal heater is responsive to external heater control signals. The temperature of the CDG sensor is monitored using an internal temperature sensor mounted on the CDG sensor. The temperature sensor generates a temperature signal. The vacuum enclosure includes an end cap that seals the vacuum enclosure. Connectors positioned through the end cap communicate the sensor signals, the heater control signals and the temperature signals through the end cap. The connectors are hermetically sealed to the end cap to maintain the vacuum within the vacuum enclosure.

A plug module includes a sensor device and a plug housing, the plug housing including a socket, an inner side of which includes a receptacle area for accommodating the sensor device, and a cover that is connected to the socket with the aid of a fastening device, where a plurality of electrically conductive straight contact pins are introduced into the cover in such a way that (a) particular first ends of the contact pins protrude into an internal volume of the plug housing and are situated above the receptacle area of the socket, and (b) particular second ends of the contact pins are situated in the area of a connector of the cover.

A pressure sensor includes a sensor member including a sensor face to which pressure is imparted and a cover member that covers at least part of the peripheral face of the sensor member while exposing the sensor face out of one end side. With such a configuration, the sensor member can be protected from a lateral force (side pressure), whereby the sensor member can be prevented from being broken by the application of the side pressure to the sensor member.