According to an aspect there is provided an apparatus comprising at least one electrode and a movable sensor membrane, wherein the apparatus comprises means for: measuring a voltage or a current; determining an amount of external pressure based on the measured voltage or current; based on the determined amount of external pressure, providing electrostatic feedback force such that the movable sensor membrane is undeflected; and determining a correlation between the electrostatic force feedback and the external pressure.

There is provided a method of calibrating multiple chamber pressure sensors of a substrate processing system. The substrate processing system includes: multiple chambers; multiple chamber pressure sensors; multiple gas suppliers configured to supply a gas to an internal space of the multiple chambers; multiple exhausters connected to the internal spaces of the multiple chambers via multiple exhaust flow paths; and multiple first gas flow paths. The method includes: acquiring a third volume, which is a sum of a first volume and a second volume; acquiring a first pressure change rate of the internal space of a selected chamber; calculating a second pressure change rate of the internal space of the selected chamber; and calibrating the selected chamber pressure sensor such that a difference between the first pressure change rate and the second pressure change rate is within a preset range.

A pressure sensor for a pipe includes: a flexible strip; at least one strain sensing element; and a tensioning device. A first end of the flexible strip passes through a second end of the flexible strip. Between the first end of the flexible strip and the second end of the flexible strip, the flexible strip includes the at least one strain sensing element. The pressure sensor is attachable to the pipe. The first end of the flexible strip extends through or past the second end of the flexible strip. The tensioning device tensions the pressure sensor around the pipe.

An arrangement for sensor node calibration, including a calibration chamber including or being connected to a unit to facilitate control of at least one calibration quantity or attribute in the calibration chamber, a reference measuring unit arranged to measure at least one calibration quantity or attribute inside the calibration chamber, and a computing unit arranged to obtain from at least one sensor node sensor node identifier (ID) information, sensor node measurement information, wherein the computing unit is arranged to identify a sensor node based on sensor node ID information received from the sensor node, obtain measurement information the identified 0sensor node, obtain calibration quantity or attribute measurement in-formation from the reference measuring unit, and compare calibration quantity or attribute measurement information with sensor node measurement information. Corresponding device and method are also disclosed.

An alert indicates that a situation conducive to calibrating a barometric pressure sensor of the user device might have occurred. In response, calibration data is collected for calibrating the barometric pressure sensor. The calibration data is used to perform a calibration process and generate a calibration value for the barometric pressure sensor.

A pressure sensing device includes a pressure signal receiver configured to receive an analog pressure signal from a pressure sensor, a converter configured to convert the analog pressure signal to a digital pressure signal, and a processor configured to convert a pressure value of the digital pressure signal to a bit value corresponding to the pressure value and output the bit value. The processor is configured to convert the pressure value to a first bit value by a first bit resolution in response to the pressure value being included in a first pressure interval, and convert the pressure value to a second bit value by a second bit resolution in response to the pressure value being included in a second pressure interval. The second pressure interval is a pressure interval greater than the first pressure interval, and the first bit resolution is greater than the second bit resolution.

A differential MEMS pressure sensor includes a topping wafer with a top side and a bottom side, a diaphragm wafer having a top side connected to the bottom side of the topping wafer and a bottom side, and a backing wafer having a top side connected to the bottom side of the diaphragm wafer and a bottom side. The topping wafer includes a first cavity formed in the bottom side of the topping wafer. The diaphragm wafer includes a diaphragm, a second cavity formed in the bottom side of the diaphragm wafer underneath the diaphragm, an outer portion surrounding the diaphragm, and a trench formed in the top side of the diaphragm wafer and positioned in the outer portion surrounding the diaphragm.

A test unit for measuring internal pressure in a cylindrical glass container includes a support adapted for housing the cylindrical glass container during a test phase, defining a longitudinal axis; a piston for selectively exerting a predetermined axial force in a longitudinal direction substantially parallel to the longitudinal axis and for actuating a plunger movable along the longitudinal axis; at least one measuring sensor for measuring a change in diameter in a transverse direction to the longitudinal axis; a programmable control unit operatively connected to the measuring sensor and configured to correlate a diameter change measured by the measuring sensor in the presence of a predetermined axial force with reference internal pressure values to which the measured diameter change and the predetermined axial force correspond. Associated processes for measuring internal pressure in a cylindrical glass container are further disclosed.

In piezoelectric sensors, conventional amplification factor adjustment methods involving the cutting of a wiring pattern or use of a laser trimmable resistor are unable to adjust the amplification factor when the sensor is in a completed state. As a result, the production process becomes complex and production costs increase. Further, because the amplification factor adjustment is carried out in a different state from that of the finished product, the problem that the amplification factor is not set correctly in the finished product also occurs. A non-volatile memory is incorporated in an integrated circuit in which there are integrated piezoelectric sensor circuit elements. The amplification factor is adjusted by writing data from a writing terminal to change an amplification resistor a.

Examples provide for an apparatus, method, and computer program for comparing the output of sensor cells in an arrangement of sensor cells in an area A, including a set of at least two measurement units. A measurement unit includes at least two sensor cells, wherein at least one sensor cell of at least one measurement unit includes a sensitive sensor cell, which is sensitive with respect to a measured quantity. The sensor cells are intermixed with each other. The apparatus further includes means for selecting output signals of sensor cells of the arrangement and means for determining a measured quantity or determining an intact sensor cell by comparing output signals of different measurement units.