A display device includes a display region in which a plurality of pixels are arrayed in a row direction and a column direction. Gate lines each configured to supply gate signals to the pixels are aligned in the row direction. Signal lines each configured to supply pixel signals to the pixels are aligned in the column direction. At least one first semiconductor force sensor is provided in the display region. At least one second semiconductor force sensor is provided in a frame region outside the display region. A detection circuit detects force applied to the display region based on a middle-point voltage between the first semiconductor force sensor and the second semiconductor force sensor.

A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a reflective layer on a mirror surface of the hinged optical layer. The method includes positioning the pivotally hinged optical layer to a closed position with the suspended structure, aligning the mirror surface with the cleaved tip of the optical fiber.

A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a reflective layer on a mirror surface of the hinged optical layer. The method includes positioning the pivotally hinged optical layer to a closed position with the suspended structure, aligning the mirror surface with the cleaved tip of the optical fiber.

According to an aspect, a display device includes: a display region in which a plurality of pixels are arrayed in a row direction and a column direction; gate lines each of which is configured to supply gate signals to the pixels aligned in the row direction; signal lines each of which is configured to supply pixel signals to the pixels aligned in the column direction; at least one first semiconductor force sensor provided in the display region; at least one second semiconductor force sensor provided in a frame region outside the display region; and a detection circuit that detects force applied to the display region based on a middle-point voltage between the first semiconductor force sensor and the second semiconductor force sensor.

The present document relates to a pressure sensor comprising a structural element, the structural element comprising a first and second structural part. The sensor further comprises a first cavity being in fluid connection with an exterior of the sensor for establishing a first pressure which is dependent on an external pressure in the first cavity and a second cavity configured to be at a second pressure in use. A deformable structure is deformable dependent on a pressure difference between the first pressure and the second pressure. The sensor comprises a fiber including an intrinsic fiber optic sensor fixed to the structural element and to the deformable structure for providing an optical sensor signal dependent on said pressure difference.

A fibre-optic sensor for measuring a physical quantity, such as a pressure, force, acceleration or tilt, includes an optical fibre having a measurement section for measuring a strain in the fibre, and first and second structural members. The optical fibre is connected to a first fibre connection section of the first structural member and to a second fibre connection section of the second structural member. The first and second connection sections are arranged on opposite sides of the measurement section, such that at least the measurement section is suspended between the first and second fibre connection sections. At least one of the structural members is movable relative to the other in dependence of the physical quantity that is measured. The structural members are made from materials having different coefficients of thermal expansion such that a temperature induced strain in said optical fibre due to a temperature change is reduced.

The present document relates to a pressure sensor comprising a structural element, the structural element comprising a first and second structural part. The sensor further comprises a first cavity being in fluid connection with an exterior of the sensor for establishing a first pressure which is dependent on an external pressure in the first cavity and a second cavity configured to be at a second pressure in use. A deformable structure is deformable dependent on a pressure difference between the first pressure and the second pressure. The sensor comprises a fiber including an intrinsic fiber optic sensor fixed to the structural element and to the deformable structure for providing an optical sensor signal dependent on said pressure difference.

A pressure sensor device having a chamber filled with a pressure transfer medium, the chamber having at least one window that at least partly transfers pressure waves in a fluid; an optical fiber extending longitudinally through the chamber, the optical fiber including a Fiber Bragg Grating and two mounting spots at opposite sides of the Fiber Bragg Grating; a frame having a first frame end and a longitudinally opposite second frame end; a pressure response assembly connected in parallel to a fiber portion between the two mounting spots, the pressure response assembly including a series arrangement of a pressure response element and a movement damper; and a resilient member connected in series to the frame and to a parallel arrangement of the fiber portion and the pressure response assembly.

A sensor assembly comprises an optical fiber having a sensing fiber portion that comprises at least one Fiber Bragg Grating. Further, the sensor assembly comprises a sensing body having body ends coupled to the fiber at opposite axial sides of the sensing fiber portion. Optionally, the optical fiber is arranged within a capillary, and the body ends of the sensing body are attached to the capillary, at opposite axial sides of the sensing fiber portion. The capillary may be filled with glue for attaching the optical fiber to the capillary.

A fibre-optic sensor for measuring a physical quantity, such as a pressure, force, acceleration or tilt, includes an optical fibre having a measurement section for measuring a strain in the fibre, and first and second structural members. The optical fibre is connected to a first fibre connection section of the first structural member and to a second fibre connection section of the second structural member. The first and second connection sections are arranged on opposite sides of the measurement section, such that at least the measurement section is suspended between the first and second fibre connection sections. At least one of the structural members is movable relative to the other in dependence of the physical quantity that is measured. The structural members are made from materials having different coefficients of thermal expansion such that a temperature induced strain in said optical fibre due to a temperature change is reduced.