Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

An apparatus for measuring pressure within a fluid path includes a housing defining the structure of the apparatus. The housing includes a fluid path that extends through the housing and allows a fluid to pass through the housing. The apparatus also includes a first volume chamber that is in fluid communication with the fluid path and has a first volume chamber opening, and a second volume chamber with a second volume chamber opening that is less than the first volume chamber opening. A diaphragm separates the first volume chamber from the second volume chamber and fluidly disconnects the second volume chamber from the fluid path. The diaphragm deforms based upon the pressure within the fluid path. The apparatus also includes an interface that is connectable to a pressure sensor, and the second volume chamber is in fluid communication with the interface.

A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.

Provided is a pressure detection device including: a pressure detection unit configured to detect a pressure transmitted to a pressure detecting surface; a flow passage unit in which a pressure transmitting surface for transmitting a pressure of a fluid to the pressure detecting surface is formed; and a mounting unit for removably mounting the flow passage unit on the pressure detection unit. The pressure detection unit has a sensor unit having the pressure detecting surface, a holding unit configured to hold the sensor unit to be movable along an axis orthogonal to the pressure detecting surface, and an urging unit configured to generate urging force to urge the sensor unit toward the pressure transmitting surface. The mounting unit mounts the flow passage unit on the pressure detection unit with the pressure detecting surface being in contact with the pressure transmitting surface under urging force generated by the urging unit.

Provided is a pressure detection device including: a pressure detection unit; a flow passage unit; and a mounting unit configured to removably mount the flow passage unit on the pressure detection unit. The pressure detection unit has a pressure detecting diaphragm and a sensor rod arranged at the center part of a first surface of the pressure detecting diaphragm, protruding toward the flow passage unit along a first axis orthogonal to the pressure detecting diaphragm, and having a top surface orthogonal to the first axis. The flow passage unit has a flow passage diaphragm, and a displacement of the flow passage diaphragm in contact with the top surface is transmitted to the pressure detecting diaphragm via the sensor rod in a state where the flow passage unit is mounted on the pressure detection unit by the mounting unit.

A pressure sensor includes a diaphragm that flexurally deforms when pressurized, a plurality of piezoresistive elements provided in the diaphragm, and a plurality of temperature-sensitive elements provided in the diaphragm in correspondence with the plurality of piezoresistive elements, wherein a separation distance between the piezoresistive element and the temperature-sensitive element corresponding to each other is shorter than a separation distance between the piezoresistive element and the temperature-sensitive element not corresponding to each other. Further, each of the temperature-sensitive elements is provided to at least partially overlap with the corresponding piezoresistive element in a plan view of the diaphragm.

A pressure output device (POD) assembly for sensing fluid pressure in a fluid processing system, is provided. This POD assembly includes a shell defining a shell interior, and a movable diaphragm disposed in the shell interior and separating the shell interior into a flow-through chamber and a pressure sensing side. A sensor port is in fluid communication with the pressure sensing side. An inlet port and an outlet port are in fluid communication with the flow-through chamber. The inlet port and the outlet port define an inlet and an outlet, respectively, of a flow-through channel that passes through the flow-through chamber. A boss protrudes from the interior wall of the shell and extends into the flow-through channel to prevent occlusion of flow under different pressure conditions within the flow-through chamber.

A pressure sensing device includes a case provided on a liquid flow path through a liquid, a diaphragm that is provided so as to divide a space in the case into a first space with the liquid flowing therethrough and a second space filled with a gas, a pressure sensor to measure pressure of the gas, and a diaphragm initial position adjustment mechanism capable of adjusting an initial position of the diaphragm to a desired position. The diaphragm initial position adjustment mechanism includes a reciprocating pump that includes a cylinder in communication with the second space, a plunger provided so as to be able to advance and retract within the cylinder, and a plunger driving part to advance and retract the plunger, and adjusts a filling amount of the gas filling the second space by advancing and retreating the plunger in the cylinder by the plunger driving part.

A micromechanical component, whose diaphragm is supported and has support structures on its inner diaphragm side. Each of the support structures includes a first and second edge element structure, and at least one intermediate element structure positioned between the first and second edge element structures. For each of the support structures, a plane of symmetry is definable, with respect to which at least the first edge element structure of the respective support structure and the second edge element structure of the respective support structure are specularly symmetric. In each of support structures, a first maximum dimension of its first edge element structure perpendicular to its plane of symmetry and a second maximum dimension of its second edge element structure perpendicular to its plane of symmetry are greater than the maximum dimension of its intermediate element structure perpendicular to its plane of symmetry.

A pressure sensor that includes a housing with an upper housing part and a lower housing part, the upper housing part and the lower housing part being configured such that a chamber is formed between them. A diaphragm is provided between the upper housing part and the lower housing part, and dividing the chamber into an upper chamber and a lower chamber. A magnetic core is linked to the diaphragm. An operating spring includes a top end and a bottom end, the top end being supported against the upper housing part and the bottom end being supported against the magnetic core. At least one of the top end and the bottom end of the operating spring is provided with an adhesive layer. The pressure sensor enables the operating spring and the magnetic core to move integrally with each other, thereby improving the precision of the pressure sensor.