A pressure sensing metal diaphragm configured for deforming according to a pressure is provided, including: a main body, extending flat, including a through hole and a go-through structure configured for insertion of a movable. A pressure sensing diaphragm assembly including the pressure sensing metal diaphragm and a pressure sensing non-metal diaphragm is further provided, wherein the pressure sensing non-metal diaphragm covers the go-through structure. A pressure gauge including the pressure sensing diaphragm assembly is further provided.

A sensor membrane structure is provided. The sensor membrane structure includes a substrate, a first insulating layer, and a device layer. The substrate has a first surface and a second surface that is opposite to the first surface. A cavity is formed on the first surface, an opening is formed on the second surface, and the cavity communicates with the opening. The cavity and the opening penetrate the substrate in a direction that is perpendicular to the first surface. The first insulating layer is disposed on the first surface of the substrate. The device layer is disposed on the first insulating layer. The first insulating layer is disposed for protecting the sensor membrane structure from overetched and remain stable during the etching process, increasing the yield of the sensor membrane structure.

An electronic device, such as a smart watch, incorporating a fluid-based pressure-sensing device is disclosed. The fluid-based pressure-sensing device includes an enclosure, a pressure sensor, a diaphragm and a sensing medium. The enclosure includes an opening and the pressure sensor is disposed inside the enclosure. The diaphragm hermetically seals the opening, and the sensing medium transfers a pressure exerted on the diaphragm to the pressure sensor. The sensing medium can be liquid oil filling a space of the enclosure, and the diaphragm is a polymer material. The pressure-sensing device may sense an environmental pressure, which may be used by the electronic device to modify its operations, change information that is displayed, and so on.

The disclosed technology concerns an aircraft turbomachine part comprising a part body drilled with at least one cavity open to the outside and at least one conduit joining the cavity on the one hand and leading to the outside on the other hand. Each cavity receives a pressure sensor, and the conduit corresponds to the cavity guides the cables connected to the sensor to the outside of the part body. The part is an aircraft turbomachine vane.

A method of manufacturing a medical device including a case having a first and a second case portion mated together. The case having a space inside and an elastic membrane attached to the case. A first housing space covered by the first case portion and a second housing space covered by the second case portion. Fixing parts at peripheries of the first and the second case portions and at which the first and the second case portions are mated. Holding surfaces at the peripheries of the first and the second case portions. A sealing part at the periphery of the first or the second ease portions with respect to the fixing parts and that seals an entirety of the peripheral edge of the elastic membrane. Forming an air gap between the sealing part and the fixing parts by depressurization or heating the fixing parts that connect the case portions.

In an embodiment a membrane includes a hydrophobic region having a plurality of hierarchically arranged micrometer-sized and submicrometer-sized units consisting of a membrane material, wherein a single micrometer-sized unit has a diameter of from 1 μm to 5 μm and a single submicrometer-sized unit has a diameter of <1 μm, and wherein the membrane is configured to be used in a pressure sensor system.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

A pressure sensing metal diaphragm configured for deforming according to a pressure is provided, including: a main body, extending flat, including a through hole and a go-through structure configured for insertion of a movable. A pressure sensing diaphragm assembly including the pressure sensing metal diaphragm and a pressure sensing non-metal diaphragm is further provided, wherein the pressure sensing non-metal diaphragm covers the go-through structure. A pressure gauge including the pressure sensing diaphragm assembly is further provided.

A pressure-sensor device (1) has: —a component sensitive to pressure, comprising a sensor body (5), with an elastically deformable membrane part (5a), and at least one detection element (6) for detecting a deformation of the membrane (5a); —a structure (2, 3) for housing or supporting the pressure-sensitive component, having at least one passageway (15) for a fluid the pressure of which is to be detected, the housing or supporting structure (2, 3) comprising a supporting body (2) with respect to which the sensor body (5) is positioned in such a way that its membrane part (5a) is exposed to the fluid coming out of the passageway (15), the supporting body (2) having a hydraulic-connection portion (2a) and a duct (14) that extends from the hydraulic-connection portion (2a); —at least one elastically deformable body (16), formed with one or more elastically deformable or compressible materials, comprising at least one from among: —a compressible compensation element (20, 21), configured for compensating any possible variations in volume of the fluid; —a sealing element (13, 17); configured for providing a seal with respect to at least one of the housing or supporting structure (2, 3), and the sensor body (5); and—a supporting element (23), configured for supporting or positioning the sensor body (5) with respect to the housing or supporting structure (2, 3). At least one from among the compressible compensation element (16), the sealing element (13, 17) and the supporting element (23) is overmoulded on at least one of the housing or sup porting structure (2, 3) and the sensor body (5).

A pressure sensor includes a tubular housing; a diaphragm which is joined to one end portion of the housing through a fusion zone; and a sensor element which is disposed in the housing and to which pressure received by the diaphragm is transmitted. As viewed in a section which contains the center axis of the housing, a pair of the fusion zones exist, and each of the fusion zones is formed in such an inclined manner that its distance from the center axis increases as it extends from the outer surface of the diaphragm toward the other-end-portion side of the housing.