In a method for evaporating a non-gaseous starting material, the starting material is introduced into an evaporation chamber; an evaporation element heats the starting material to create a vapor; a conveying gas flow transports the vapor through a conveying channel and past a sensor, which measures the concentration or partial pressure of the vapor in the gas flow flowing through the conveying channel; and the mass flow of the vapor through the conveying channel is controlled by varying the conveying gas flow with respect to a setpoint value. To keep the vapor flow largely constant over time, a compensating gas flow is fed into the conveying channel at a mixing point disposed between the evaporator and the sensor. A second mass flow controller controls the mass flow of the compensating gas flow such that, when the conveying gas flow varies, the gas flow flowing past the sensor remains constant.

A pressure sensor system is provided. In another aspect, a wireless intraocular pressure sensor includes a deformable or stretchable inductor. A further aspect of an intraocular pressure sensing system includes a deformable inductor sized to contact an eye. Another aspect provides an organ pressure sending system including a passive inductor with a wavy, serpentine or undulating shape.

A pressure sensing unit, a capacitive hybrid sensor device, and an input apparatus using the same are provided. The pressure sensing unit for detecting pressing events includes a pressure sensing pad group and a floating conductive element. The pressure sensing pad group includes a first pressure sensing pad, a second pressure sensing pad, and a ground pad that are spaced apart from one another. The first pressure sensing pad and the second pressure sensing pad are electrically shielded from each other by the ground pad. One of the floating conductive element and the pressure sensing pad group is configured to be movable in a movement direction relative to another one of the floating conductive element and the pressure sensing pad group. The floating conductive element overlaps with the pressure sensing pad group in the movement direction.

A MEMS device, e.g., a flexible MEMS pressure sensor, is formed by disposing a sacrificial layer, such as photoresist, on a substrate. A first flexible support layer is disposed on the substrate, and a first conductive layer is disposed over a portion of the first support layer. A liquid or gel separator, e.g., silicone oil, is disposed on an internal region of the first conductive layer. A second flexible support layer encapsulates the first conductive layer and the separator. A second conductive layer disposed over the second support layer at least partially overlaps the first conductive layer and forms a parallel plate capacitor. A third flexible support layer encapsulates the second conductive layer and second support layer. Soaking the sensor in hot water releases the sensor from the sacrificial layer.

A pressure sensing unit, a capacitive hybrid sensor device, and an input apparatus using the same are provided. The pressure sensing unit for detecting pressing events includes a pressure sensing pad group and a floating conductive element. The pressure sensing pad group includes a first pressure sensing pad, a second pressure sensing pad, and a ground pad that are spaced apart from one another. The first and second pressure sensing pads are electrically shielded from each other by the ground pad. One among the floating conductive element and the pressure sensing pad group is configured to be movable in a movement direction relative to another one among the floating conductive element and the pressure sensing pad group. The floating conductive element overlaps with the pressure sensing pad group in the movement direction. Therefore, a signal-to-noise ratio can be increased and an erroneous detection can be prevented.

A system includes a safety system having one or more valves configured to block a flow of fluid from a source to a destination, a non-invasive pressure measurement system having a plurality of non-invasive pressure sensors configured to monitor a pressure of the fluid without directly contacting the fluid, and a controller configured to receive feedback from the non-invasive pressure measurement system and to adjust a position of the one or more valves of the safety system based on the feedback.

A pressure capsule/header assembly for a process fluid pressure transmitter is provided. An isolator plug has an isolation diaphragm at a first end thereof and a second end spaced from the first end. The isolator plug has a fill fluid passageway fluidically coupling the first end to the second end. A header has a first end configured to carry a pressure sensor and a second end spaced from the first end. The header has at least one electrical interconnect extending from the first end to the second end. A biaxial support ring is disposed about an outer surface of the header. The biaxial support ring and the header define a tapered interference interface therebetween. The header is welded to the isolator plug at a first weld and the biaxial support ring is welded to the isolator plug at a location that is spaced from the second end of the header.

A capacitive pressure transducer includes a shielded spacer positioned between the capacitor electrodes and driven with a separate voltage source.

The present invention, in one embodiment, provides a method of measuring pressure or temperature using a sensor including a sensor element composed of a plurality of carbon nanotubes. In one example, the resistance of the plurality of carbon nanotubes is measured in response to the application of temperature or pressure. The changes in resistance are then recorded and correlated to temperature or pressure. In one embodiment, the present invention provides for independent measurement of pressure or temperature using the sensors disclosed herein.

Methods and devices are provided for processing image data on a sub-frame portion basis using layers of a convolutional neural network. The processing device comprises memory and a processor. The processor is configured to receive frames of image data comprising sub-frame portions, schedule a first sub-frame portion of a first frame to be processed by a first layer of the convolutional neural network when the first sub-frame portion is available for processing, process the first sub-frame portion by the first layer and continue the processing of the first sub-frame portion by the first layer when it is determined that there is sufficient image data available for the first layer to continue processing of the first sub-frame portion. Processing on a sub-frame portion basis continues for subsequent layers such that processing by a layer can begin as soon as sufficient data is available for the layer.