G01L9/0051

Pump for measuring pressure of fluid to be transferred, fluid transport system using the same, and method for operating the system

The present invention discloses a pump for measuring a pressure of fluid to be transferred, a fluid transport system using the same, and a method for operating the system. The pump includes a pumping portion alternately generating a positive pressure and a negative pressure; a first diaphragm which is provided on one side of the pumping portion and of which a shape is changed as the positive pressure and the negative pressure are alternately generated; a transport chamber which sucks and discharges a transport target fluid corresponding to the deformation of the first diaphragm; a second diaphragm which is provided on the other side of the pumping portion; a monitoring chamber which is provided on one side of the second diaphragm and of which a pressure changes corresponding to the deformation of the second diaphragm; and a pressure measuring portion measuring a pressure change of the monitoring chamber.

PRESSURE SENSOR
20180010976 · 2018-01-11 · ·

A pressure sensor includes a diaphragm having a first principal surface and a second principal surface, a semiconductor chip in which resistors constituting a strain gauge are formed, a first structural body having one end coupled to a center of a second principal surface of the diaphragm and the other end coupled to the other surface of the semiconductor chip, and at least two second structural bodies disposed in two straight lines, orthogonal to each other, that pass through the center of the diaphragm in plan view so as to be disposed separately from the first structural body, and having one ends coupled to the second principal surface and the other ends coupled to the other surface of the semiconductor chip, in which the resistors are formed in regions between the first structural body and the second structural bodies in plan view in the semiconductor chip.

Multifunctional sensor for the process industry
11703407 · 2023-07-18 · ·

A multifunctional sensor has the a process connection housing with a process-side opening, pressure measurement cell with a measurement membrane arranged in the process connection housing, which closes the opening in the process connection housing and which has strain measurement resistors on its side facing away from the process, where a magnet assembly is arranged in the process connection housing, the magnetic field of which is concentrated on a central region of the measurement membrane and penetrates through this into the process, electrodes lying diametrically opposite one another are formed outside the central region on the side of the measurement membrane facing the process, and where the process connection housing contains electronic measuring equipment which is formed to interact with the strain measurement resistors and the electrodes for pressure measurement and magnetic-inductive flow measurement.

Pressure Sensing Device
20230012518 · 2023-01-19 ·

A pressure sensing device comprises a first diaphragm which is deformable and a second diaphragm which is non-deformable. One of the diaphragms comprises a pressure sensitive material arranged on its surface. The other diaphragm comprises a detection electrode arranged its surface. The first diaphragm forms part of a force transmission device comprising a cavity having a force transmission fluid therein. The force transmission device is configured to receive an external force and transmit the external force to the first diaphragm, such that the first and second diaphragms are mutually deformed in response to the external force.

PRESSURE SENSOR FORMED BY STRAIN GAUGE ON A DEFORMABLE MEMBRANE OF A FLUID DEVICE
20230221202 · 2023-07-13 ·

A fluid device comprising a body with a membrane extending in a mean plane and showing an inner face and an outer face; a strain gauge arranged on the outer face of the membrane for measuring a deformation of the membrane when a fluid pressure is applied on the inner face thereof; wherein a bore is formed in the body, extending along an axis parallel to the mean plane of the membrane and delimiting a passage for the fluid under pressure, in fluid connection with the inner face of the membrane.

VACNT-based flexible electronics for sensing and capacitance applications

Flexible and stretchable electronics, including supercapacitors and pressure sensors, are made using carbon nanostructures produced by providing a first composite structure which includes a temporary substrate and an array of carbon nanotubes arranged in a stack on a surface of the temporary substrate such that the stack of carbon nanotubes is oriented generally perpendicular to the surface of the temporary substrate, which may include silicon dioxide. The stack of carbon nanotubes is transferred from the temporary substrate to another substrate, which includes a curable polymer, thereby forming another composite structure comprising the stack of carbon nanotubes and the cured polymer.

CONDITION DETECTION OF PRESSURE TRANSMITTER DIAPHRAGM
20220381638 · 2022-12-01 ·

A material property sensor for a pressure transmitter comprises a sensing pattern immersed in a fill fluid. The pressure transmitter comprises a diaphragm configured for contact with a process fluid at an exterior surface of the diaphragm. The pressure transmitter further comprises a pressure sensor configured for sensing a pressure of the process fluid on the diaphragm. The pressure sensor and the diaphragm define a cavity within which the fill fluid is disposed such that the diaphragm of the pressure sensor is in contact with the fill fluid at an interior surface of the diaphragm. The sensing pattern is immersed in the fill fluid within the cavity and configured to measure an electrical property of the fill fluid at an initial time and at one or more subsequent times during operation of the pressure transmitter.

Pressure sensor
11499882 · 2022-11-15 · ·

A pressure sensor includes a sensor chip. The sensor chip has two diaphragms, recessed portions that serve as first pressure inlet chambers disposed so as to respectively adjoin top surfaces of the diaphragms, and recessed portions that serve as second pressure inlet chambers disposed so as to respectively adjoin bottom surfaces of the diaphragms. A cavity is provided in the sensor chip such that, when a difference between pressures respectively applied to a top surface and bottom surface of the diaphragm is zero, an output voltage of a Wheatstone bridge circuit made up of strain gauges provided in the diaphragm is zero.

Transparent and highly sensitive pressure sensor with improved linearity and pressure sensitivity

The present disclosure provides a transparent and highly sensitive pressure sensor with improved linearity and pressure sensitivity including: a first substrate on which a micropattern having pyramidal structures is formed; a first electrode layer coated on the micropattern of the first substrate; a second substrate stacked on the first electrode layer; and a second electrode layer stacked on the second substrate, wherein the first substrate and the second substrate show a difference in light refractive index of 10% or less in the visible light region.

Condition detection of pressure transmitter diaphragm

A material property sensor for a pressure transmitter comprises a sensing pattern immersed in a fill fluid. The pressure transmitter comprises a diaphragm configured for contact with a process fluid at an exterior surface of the diaphragm. The pressure transmitter further comprises a pressure sensor configured for sensing a pressure of the process fluid on the diaphragm. The pressure sensor and the diaphragm define a cavity within which the fill fluid is disposed such that the diaphragm of the pressure sensor is in contact with the fill fluid at an interior surface of the diaphragm. The sensing pattern is immersed in the fill fluid within the cavity and configured to measure an electrical property of the fill fluid at an initial time and at one or more subsequent times during operation of the pressure transmitter.