A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.

A pressure sensor 1 according to the first aspect of the invention includes: a substrate 50; and a functional element 40 which is laid on the substrate 50 and is composed of functional titanium oxide including crystal grains of at least one of β-phase trititanium pentoxide (β-Ti.sub.3O.sub.5) and λ-phase trititanium pentoxide (λ-Ti.sub.3O.sub.5) and having the property that at least a portion of crystal grains of at least one of β-phase trititanium pentoxide (β-Ti.sub.3O.sub.5) and λ-phase trititanium pentoxide (λ-Ti.sub.3O.sub.5) change into crystal grains of titanium dioxide (TiO.sub.2) when the functional titanium oxide is heated to 350° C. or higher. The substrate 50 includes a substrate thin-film section 51 having a thin film form in which the thickness in the stacking direction of the substrate 50 and the functional element 40 is smaller than that in the other directions.

A sensor circuit architecture includes a Wheatstone bridge-type sensing element that includes a plurality of resistors and a plurality of equivalent compensation networks. Each of the plurality of resistors includes one of the plurality of equivalent compensation networks. Each of the plurality of equivalent compensation networks includes at least one digital resistive compensation network configured to provide at least one of the following: variable resistance, digitally controlled variable resistance, digitally controlled resistance, and/or digitally set resistance. The sensor circuit architecture is configured with the at least one digital resistive compensation network to implement at least one of the following: a desired scale of output, a desired offset compensation, and/or a desired temperature compensation.

A device for measuring a strain of an object independently of temperature variations includes: at least one strain gauge that is attachable directly or indirectly to the object whose strain is to be measured; a first temperature sensor for measuring a temperature of the at least one strain gauge; read-out electronics for measuring a change of electrical resistance of the at least one strain gauge as a measured electrical resistance change, the read-out electronics including at least one fixed resistor whose value is relied upon when obtaining a value of the change of electrical resistance of the strain gauge as a result of the measurement, the read-out electronics being such that a temperature of the at least one fixed resistor is known and/or obtainable by measurement; and an evaluation unit for: correcting the measured electrical resistance change, and/or a strain of the strain gauge and/or the strain of the object.

An apparatus includes a substrate, a nested enclosure assembly including an outer enclosure and an inner enclosure, wherein the outer enclosure encloses the inner enclosure and the inner enclosure encloses at least the electronic assembly. An insulating medium is disposed within a cavity between the outer surface of the inner enclosure and the inner surface of the outer enclosure and the system includes a sensor assembly communicatively coupled to the electronic assembly. The sensor assembly includes one or more sensors that are configured to acquire one or more measurement parameters at one or more locations of the substrate. The electronic assembly is configured to receive the one or more measurement parameters from the one or more sensors.

A remote seal system includes a remote diaphragm having a first side configured to be exposed to a process fluid. A conduit is coupled to the remote diaphragm and includes a fill fluid in fluidic communication with a second side of the remote diaphragm. A temperature sensor is thermally coupled to the conduit and configured to sense a temperature of the fill fluid. In one alternative example, a remote sensing assembly includes a flexible elongate conduit having a first end coupled to a remote diaphragm in fluidic communication with a process fluid and a second end extending a length from the first end to a process fluid pressure transmitter. A substantially incompressible fill fluid is disposed within the flexible elongate conduit. The process fluid pressure transmitter is configured to generate an output value indicative of pressure in the process fluid based on a corresponding pressure in the fill fluid. A temperature detector is coupled to the flexible elongate conduit and is configured to provide a signal indicative of an average temperature of the fill fluid along the flexible elongate conduit. A compensation system calculates a thermal expansion value based on the average temperature and adjusts the pressure signal based on the thermal expansion value.

A device for measuring a strain of an object independently of temperature variations includes: at least one strain gauge that is attachable directly or indirectly to the object whose strain is to be measured; a first temperature sensor for measuring a temperature of the at least one strain gauge; read-out electronics for measuring a change of electrical resistance of the at least one strain gauge as a measured electrical resistance change, the read-out electronics including at least one fixed resistor whose value is relied upon when obtaining a value of the change of electrical resistance of the strain gauge as a result of the measurement, the read-out electronics being such that a temperature of the at least one fixed resistor is known and/or obtainable by measurement; and an evaluation unit for: correcting the measured electrical resistance change, and/or a strain of the strain gauge and/or the strain of the object.

A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.

Aspects of the subject technology relate to electronic devices with pressure sensors. A pressure sensor in a portable electronic device may include an integrated heater or may be co-operated with an external heater for the pressure sensor. The heater may be operated to heat some or all of the pressure sensor for pressure sensor testing, calibration, or temperature-controlled pressure sensing operations.

A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.