Improvements in thin film sensors are disclosed. These can be used for aircraft applications. Dielectric isolation washers can be provided between a pressure sensor and an exterior metal housing of a sensor assembly. In this manner, high voltage inputs from a lightning strike or other source that reach the sensor housing are not transmitted to the sensor. Dielectric washers, insulators, and potting compounds can thus isolate a metal thin film pressure sensor from adjacent metal components (e.g., using non-conducting insulating materials like Torlon, zirconia and nylon). Besides their high dielectric strength, these materials exhibit compressive strength and resistance to wear, creep and corrosion. Desirable thicknesses for these components are provided. The described thin film pressure sensor embodiments can attain a dielectric rating of 1500 VAC.

A multi-layer electrode of a capacitive pressure sensor is manufactured by roll to roll printing a conductive layer onto a polymer layer and forming a mutual capacitance sensor layer of the capacitive pressure sensor, co-extruding a conductive polymer layer and a foam dielectric layer and forming a coextruded layer of the capacitive pressure sensor, and pressure rolling the mutual capacitance sensor layer and the coextruded layer together and forming the multi-layer electrode. The conductive polymer layer includes between about 2 wt. % to about 15 wt. % graphene and between about 0.01 wt. % and 5 wt. % of the carbon nanotubes. Also, the conductive polymer layer has a flexural modulus equal to or greater than 5,000 MPa and an electrical resistivity less than or equal to 10 Ohm/mm.sup.3, and the polymer layer and/or the conductive polymer layer is formed from recycled polyethylene terephthalate.

A multi-layer electrode of a capacitive pressure sensor is manufactured by roll to roll printing a conductive layer onto a polymer layer and forming a mutual capacitance sensor layer of the capacitive pressure sensor, co-extruding a conductive polymer layer and a foam dielectric layer and forming a coextruded layer of the capacitive pressure sensor, and pressure rolling the mutual capacitance sensor layer and the coextruded layer together and forming the multi-layer electrode. The conductive polymer layer includes between about 2 wt. % to about 15 wt. % graphene and between about 0.01 wt. % and 5 wt. % of the carbon nanotubes. Also, the conductive polymer layer has a flexural modulus equal to or greater than 5,000 MPa and an electrical resistivity less than or equal to 10 Ohm/mm.sup.3, and the polymer layer and/or the conductive polymer layer is formed from recycled polyethylene terephthalate.

A method of fabricating a capacitive micromechanical electrical system (MEMS) pressure sensor includes the steps of forming a backing wafer, forming a diaphragm wafer that includes a diaphragm configured to deflect from an applied force and a pressure cavity configured to produce on the diaphragm the applied force which is indicative of a system pressure; fusing the diaphragm wafer to the backing wafer thereby forming a base wafer, forming a top wafer, joining the top wafer to the base wafer, thereby forming a detector wafer. The diaphragm defines a first capacitor surface and the top wafer defines a second capacitor surface. A void separates the second capacitor surface from the first capacitor surface by a separation distance which is a capacitor gap. A capacitive MEMS pressure sensor is also disclosed.

A method of fabricating a capacitive micromechanical electrical system (MEMS) pressure sensor includes the steps of forming a backing wafer, forming a diaphragm wafer that includes a diaphragm configured to deflect from an applied force and a pressure cavity configured to produce on the diaphragm the applied force which is indicative of a system pressure; fusing the diaphragm wafer to the backing wafer thereby forming a base wafer, forming a top wafer, joining the top wafer to the base wafer, thereby forming a detector wafer. The diaphragm defines a first capacitor surface and the top wafer defines a second capacitor surface. A void separates the second capacitor surface from the first capacitor surface by a separation distance which is a capacitor gap. A capacitive MEMS pressure sensor is also disclosed.

A pressure sensor device includes a base including joint portions to join to a mounting substrate, and an oscillator to oscillate with respect to the base. The oscillator includes a capacitor including a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode and a facing electrode spaced apart from the membrane. The membrane does not overlap the base in plan view in a direction orthogonal or substantially orthogonal to the membrane.

A pressure sensor device includes a base including joint portions to join to a mounting substrate, and an oscillator to oscillate with respect to the base. The oscillator includes a capacitor including a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode and a facing electrode spaced apart from the membrane. The membrane does not overlap the base in plan view in a direction orthogonal or substantially orthogonal to the membrane.

A rarefied piezometric uptake apparatus and method for measuring gaseous uptake for large solid samples with little or no sample preparation. Past systems and methods require extensive sample preparation. The method includes providing a rarefied piezometric uptake apparatus having a dosing chamber and uptake chamber in an improved selective fluid communication. The apparatus and method improve the measurement of gaseous uptake into solid samples resulting in improved prediction of gas migration through solid samples such as geologic formations.

A rarefied piezometric uptake apparatus and method for measuring gaseous uptake for large solid samples with little or no sample preparation. Past systems and methods require extensive sample preparation. The method includes providing a rarefied piezometric uptake apparatus having a dosing chamber and uptake chamber in an improved selective fluid communication. The apparatus and method improve the measurement of gaseous uptake into solid samples resulting in improved prediction of gas migration through solid samples such as geologic formations.

A pressure measuring sensor having a ceramic pressure sensor includes a temperature transducer to provide a thermovoltage dependent on a temperature gradient. The temperature transducer includes two series-connected thermoelements, each of which has a galvanic contact between a wire of the thermoelement and a connecting conductor connecting the galvanic contacts of the two thermoelements to one another. The temperature transducer enables the compensation for a measuring error caused by a temperature gradient occurring along the pressure measuring sensor.