The disclosed invention is a MEMS environmental sensor and preparation method thereof. A transfer cavity is produced in the middle of a transfer substrate of a MEMS environmental sensor, and a transfer medium is located inside the transfer cavity. The surface area of an input port is larger than the surface area of an output port. An elastic transfer membrane is provided on the surface of the input port, and an elastic pressure membrane is provided on the surface of the output port. A load bearing cavity is provided in a load bearing substrate, a magnetic sensing element is positioned inside the load bearing cavity, and the load bearing cavity partially overlaps with the output port. The surface area of the input port of the transfer cavity is larger than the surface area of the output port, and on the basis of Pascal's principle, differences in the volume of the transmission cavity are used to transform a small displacement in a region of large volume into a large displacement in a region of small volume. In addition, because the output port and the end of the output port at least partially overlap, and a magnetic sensing element is arranged in the load bearing cavity, a change in displacement is produced, producing a change in a magnetic field, that is converted into a change in electrical resistance, which provides high-sensitivity and low-power detection.

According to one embodiment, a calibration method includes placing a pressure sensor on a base material having magnetic properties, placing a magnet on the pressure sensor, attracting the magnet to the base material while interposing the pressure sensor therebetween and applying a predetermined pressing force onto the pressure sensor, detecting a sensor output of a pressure-sensitive portion pressed by the magnet, estimating the deterioration of the pressure sensor by comparing the sensor output with a specified value corresponding to characteristics of the magnet, generating correction data to calibrate the degradation and inputting the generated correction data to the pressure sensor.

According to one embodiment, a calibration method includes placing a pressure sensor on a base material having magnetic properties, placing a magnet on the pressure sensor, attracting the magnet to the base material while interposing the pressure sensor therebetween and applying a predetermined pressing force onto the pressure sensor, detecting a sensor output of a pressure-sensitive portion pressed by the magnet, estimating the deterioration of the pressure sensor by comparing the sensor output with a specified value corresponding to characteristics of the magnet, generating correction data to calibrate the degradation and inputting the generated correction data to the pressure sensor.

Methods and apparatus for a microfused silicon strain gauge pressure sensor. A pressure sensor package includes a sense element configured to be exposed to a pressure environment, the sense element including at least one strain gauge, an electronics package disposed on a carrier and electrically coupled to the sense element, the carrier disposed on a port that includes the sense element, the port enabling a decoupling feature for sealing and parasitic sealing forces and a reduction of a port length, a housing disposed about the sense element and electronics package, and a connector joined to the housing and electrically connected to the electronics package, the connector including an external interface.

A sensor for detecting a position of an effective surface of the sensor includes a first magnetic field generator, a magnetic tunnel resistor, and a second magnetic field generator. The first magnetic field generator generates a first magnetic field that is oriented in an axis of a movement direction of the effective surface. The magnetic tunnel resistor is spaced from the first magnetic field generator in the extension of the axis. The magnetic tunnel resistor has a first magnetic layer, a second magnetic layer, and a tunnel barrier. The tunnel barrier is arranged between the first layer and the second layer, and the first layer is electrically insulated from the second layer. The second magnetic field generator is configured to generate a second magnetic field that is oriented transversally to the axis. The second magnetic field generator is oriented in a fixed manner relative to the tunnel resistor.

A sensor for detecting a position of an effective surface of the sensor includes a first magnetic field generator, a magnetic tunnel resistor, and a second magnetic field generator. The first magnetic field generator generates a first magnetic field that is oriented in an axis of a movement direction of the effective surface. The magnetic tunnel resistor is spaced from the first magnetic field generator in the extension of the axis. The magnetic tunnel resistor has a first magnetic layer, a second magnetic layer, and a tunnel barrier. The tunnel barrier is arranged between the first layer and the second layer, and the first layer is electrically insulated from the second layer. The second magnetic field generator is configured to generate a second magnetic field that is oriented transversally to the axis. The second magnetic field generator is oriented in a fixed manner relative to the tunnel resistor.

Disclosed is a pressure gauge comprising a pressure sensor, a pressure transmitter connected upstream of the pressure sensor and having an isolation diaphragm, the outer side of which can be supplied with pressure and under which a pressure receiving chamber is enclosed, and comprising a hydraulic pressure transmission path connected to the pressure receiving chamber and filled with a pressure transmitting fluid. The diaphragm seal comprises a deflection device actuated by a controller connected to the pressure sensor and/or to a temperature sensor, and which is designed to exert a force on the isolation diaphragm, or on an element connected to the isolation diaphragm, said force deflecting the isolation diaphragm in the direction of its diaphragm bed, at times that are determined by the controller and that are based on a pressure measured continuously by the pressure sensor and/or a temperature measured continuously by the temperature sensor.

A method for estimating the load of a tire supporting a vehicle includes providing the tire, in which the tire includes a pair of sidewalls extending to a circumferential tread, and the tread includes a plurality of tread blocks. A length of the tire footprint is indicated with a first time interval, and a full rotation of the tire is indicated with a second time interval. The first time interval may be indicated by peaks of an amplitude of a tire-based magnetic sensor signal, and the second time interval may be indicated by peaks of the amplitude of the tire-based magnetic sensor signal or by a linear speed of the vehicle. The load on the tire is determined from a ratio of the first time interval to the second time interval at an inflation pressure of the tire. A tire load estimation system is also provided.

A pressure sensor that includes a housing with an upper housing part and a lower housing part, the upper housing part and the lower housing part being configured such that a chamber is formed between them. A diaphragm is provided between the upper housing part and the lower housing part, and dividing the chamber into an upper chamber and a lower chamber. A magnetic core is linked to the diaphragm. An operating spring includes a top end and a bottom end, the top end being supported against the upper housing part and the bottom end being supported against the magnetic core. At least one of the top end and the bottom end of the operating spring is provided with an adhesive layer. The pressure sensor enables the operating spring and the magnetic core to move integrally with each other, thereby improving the precision of the pressure sensor.

Measurement of pressure of a fluid in a vessel using a cantilever spring in the vessel; a magnet connected to the cantilever spring in the vessel; an electromagnet outside of the vessel operatively connected to the magnet and the cantilever spring in the vessel, wherein the electromagnet induces movement of the magnet and the cantilever spring in the vessel, and wherein the movement is related to the pressure of the fluid in the vessel; a receiving coil operatively positioned relative to the magnet, wherein movement of the cantilever spring and the magnet in the vessel creates an electromotive response in the coil; and a controller analyzer connected to the receiving coil, wherein the controller analyzer uses the electromotive response in the coil for measuring the pressure of the fluid in the vessel.