An apparatus for detecting cracks in a plurality of samples includes: a temperature source configured to heat or cool a section of the samples; one or more infrared cameras positioned near one or both sides of the samples and configured to receive infrared image data from the samples; a data acquisition and processing unit configured to generate a two-dimensional image out of the infrared image data to detect cracks in the samples; and a conveyor unit configured to transport the samples past the temperature source and the one or more infrared cameras.

In an embodiment a method for compensating a temperature gradient effect for gas concentration sensors includes variating a temperature gradient, measuring a variation of gas concentration depending on the variation of the temperature gradient, analysing a dependence of the gas concentration and the temperature gradient for setting up an error correction function and applying the error correction function to correct measured values of the gas concentration.

In an embodiment a method for compensating a temperature gradient effect for gas concentration sensors includes variating a temperature gradient, measuring a variation of gas concentration depending on the variation of the temperature gradient, analysing a dependence of the gas concentration and the temperature gradient for setting up an error correction function and applying the error correction function to correct measured values of the gas concentration.

The atomic absorption spectrophotometer is provided with an atomization unit, a light source, a detector, an optical system, a camera, and a captured image data storage unit. The atomization unit has a tube-like furnace and atomizes the sample injected into the furnace by heating the sample. The light source emits light of a wavelength of a measurement target toward the atomization unit so that the light passes through the furnace. The detector detects the light passed through the furnace. The camera captures an image of an inside of the furnace before performing a measurement process in which a sample is atomized in the furnace and its absorbance is measured. The captured image data storage unit stores the captured image data obtained by capturing the image by the camera in association with the measurement data corresponding to the captured image data.

An apparatus includes a carrier rotatable about an axis of rotation where the carrier has a top surface adapted to hold at least one semiconductor wafer and a surface characterization tool which is operative to move over a plurality of positions relative to the top surface of the carrier and/or the wafer transverse to the axis of rotation. The surface characterization tool is operative to move over a plurality of positions relative to the top surface of the carrier and/or the wafer transverse to the axis of rotation and is further adapted to produce characterization signals over the plurality of positions on at least a portion of the carrier and/or on at least a portion of said major surface of the wafer as the carrier rotates.

An apparatus for detecting cracks in a plurality of samples includes: a temperature source configured to heat or cool a section of the samples; one or more infrared cameras positioned near one or both sides of the samples and configured to receive infrared image data from the samples; a data acquisition and processing unit configured to generate a two-dimensional image out of the infrared image data to detect cracks in the samples; and a conveyor unit configured to transport the samples past the temperature source and the one or more infrared cameras.