An apparatus for detecting a surface condition of an object. The apparatus comprises a light source, a reflective face and an imaging device. The imaging device is configured to receive reflected light emanating from the reflective face. The reflective face is oriented at a first acute angle relative to an optical axis of the imaging device, such that a projection area of a virtual image of a surface formed via the reflective face is greater than a projection area of the surface on a plane perpendicular to the optical axis.

A light projecting device comprises a flat light guide plate and a light source that introduces light into the light guide plate from a side peripheral surface thereof. A plurality of concave parts are formed on one plate surface of the light guide plate, and the light entering the light guide plate reflects off the concave parts while spreading out, and the light is emitted outside from the other plate surface of the light guide plate. Each concave part is formed by a smooth concave curved surface. A tangential angle that is an angle between a tangential line at an opening edge of the concave part and the plate surface is set to be ≥50° and ≤85° in a cross-sectional shape of the concave part cut by a plane that is both perpendicular to the plate surface and passing through the center of the concave part.

Systems and methods for illuminating and/or inspecting one or more features of a unit under test (UUT) are disclosed herein. A system configured in accordance with embodiments of the present technology can include, for example, a machine, one or more diffuser elements, and/or one or more light sources. The system can create and adjust brightfield illumination profiles (e.g., uniform, brightfield illumination profiles) on portions (e.g., on curved features) of the UUT by, for example, using the one or more light sources and/or the one or more diffuser elements to adjust diffuse and/or specular illumination projected onto the curved features of the UUT. In some embodiments, the system includes one or more darkfield light sources configured to project illumination onto second portions of the UUT to create a darkfield illumination profile. The system can capture data of the brightfield and/or darkfield illumination profiles and can thereby inspect portions of the UUT.

In a substrate processing apparatus according to the invention, a light source and an imager are arranged at a position distant from an object to be imaged such as a substrate, whereas a head unit is arranged at an imaging position. Diffused light is generated by diffusing and reflecting illumination light from the light source and illuminated a peripheral edge part of the object to be imaged. Further, reflected light from the peripheral edge part illuminated with the diffused light is guided to the imager, whereby the peripheral edge part is imaged by the imager.

A device and method for observing an object, in particular a biological object includes a light source able to illuminate a sample. Under the effect of the illumination, the object emits back-scattered radiation that propagates to a screen, the area of which is larger than 100 cm.sup.2. The projection of the back-scattered radiation onto the screen forms an image representative of the back-scattered radiation, called a scattergram. An image sensor allows an image representative of the scattergram formed on the screen to be acquired.

The present disclosure relates to a system and a method of detecting a defect of an optical film, and more particularly, to a system and a method of detecting a defect of an optical film, which obtain an image of a defect of an optical film projected onto a screen and detect the defect of the optical film. As an exemplary embodiment of the present disclosure, a system for detecting a defect of an optical film may be provided. The system for detecting a defect of an optical film may include: a lighting unit, which is spaced apart from the optical film, and irradiates light toward one surface of the optical film; a screen, which is spaced apart from the other surface of the optical film, and on which a defect existing in the optical film is projected and displayed according to the pass of the light irradiated from the lighting unit through the optical film; an imaging unit, which is spaced apart from the screen, and obtains an image of the defect of the optical film projected onto the screen; and an analyzing unit, which analyzes the obtained image, and detects the defect of the optical film based on a result of the analysis.

A light projecting device comprises a flat plate shaped light guide plate and a light source that introduces light into the light guide plate from a side peripheral surface thereof. A plurality of concave parts are formed on one plate surface of the light guide plate, and the light entering the light guide plate reflects off the concave parts while spreading out, and the light is emitted outside from the other plate surface of the light guide plate. Each concave part is formed by a smooth concave curved surface. A tangential angle that is an angle between a tangential line at an opening edge of the concave part and the plate surface is set to be ≥50° and ≤85° in a cross-sectional shape of the concave part cut by a plane that is both perpendicular to the plate surface and passing through the center of the concave part.

The present disclosure relates to a system and a method of detecting a defect of an optical film, and more particularly, to a system and a method of detecting a defect of an optical film, which obtain an image of a defect of an optical film projected onto a screen and detect the defect of the optical film.

As an exemplary embodiment of the present disclosure, a system for detecting a defect of an optical film may be provided. The system for detecting a defect of an optical film may include: a lighting unit, which is spaced apart from the optical film, and irradiates light toward one surface of the optical film; a screen, which is spaced apart from the other surface of the optical film, and on which a defect existing in the optical film is projected and displayed according to the pass of the light irradiated from the lighting unit through the optical film; an imaging unit, which is spaced apart from the screen, and obtains an image of the defect of the optical film projected onto the screen; and an analyzing unit, which analyzes the obtained image, and detects the defect of the optical film based on a result of the analysis.

A lighting device for an inspection apparatus. The lighting device may include a hollow housing having an inner planar reflective surface and an opposing inner concave dome-shaped reflective surface. The lighting device may further include at least one light source disposed at the inner planar reflective surface. The hollow housing may include an opening configured to be a light outlet. An inspection apparatus including the lighting device and an imaging device coupled to the lighting device.

Systems and methods for illuminating and/or inspecting one or more features of a unit under test (UUT) are disclosed herein. A system configured in accordance with embodiments of the present technology can include, for example, a machine, one or more diffuser elements, and/or one or more light sources. The system can create and adjust brightfield illumination profiles (e.g., uniform, brightfield illumination profiles) on portions (e.g., on curved features) of the UUT by, for example, using the one or more light sources and/or the one or more diffuser elements to adjust diffuse and/or specular illumination projected onto the curved features of the UUT. In some embodiments, the system includes one or more darkfield light sources configured to project illumination onto second portions of the UUT to create a darkfield illumination profile. The system can capture data of the brightfield and/or darkfield illumination profiles and can thereby inspect portions of the UUT.