G PHYSICS
G01 MEASURING; TESTING
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N21/00 Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
G01N21/84 Systems specially adapted for particular applications
G01N21/88 Investigating the presence of flaws or contamination
G01N21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
G01N2021/8887 based on image processing techniques