The present disclosure provides systems and methods for calibration. In one example, the method may comprise optical image analysis for calibration. The method may comprise generating an optical projection of one or more calibration features onto a material surface provided in a material fabrication or processing machine, and determining one or more spatial characteristics of the calibration features. The one or more spatial characteristics may comprise a distance, a position, an orientation, an alignment, a size, or a shape of one or more calibration features. The one or more spatial characteristics may be used to adjust at least one of (i) a position or an orientation of an imaging unit relative to the material surface and the material fabrication or processing machine, (ii) an angle or an inclination of the material surface relative to the imaging unit, and (iii) one or more imaging parameters of the imaging unit.

A detection device and a detection method for detecting a hole or a pinhole present in a material are provided. The detection device includes: an illumination unit irradiating light at one side of the material; a light receiving unit acquiring an image of the material at the other side of the material to output a detection signal; a detection unit determining whether or not the hole or the pinhole is present in the material using the detection signal; and an illumination control unit dividing the illumination unit into a plurality of regions and controlling the illumination unit to irradiate light having different intensities of illumination for each of the plurality of regions.