Disclosed herein are compact, on line, real-time, non-contact optical property measurement systems and methods thereof capable of measuring optical quality such as haze, clarity, luminance of a film during the film manufacturing process. More specifically, the optical property measurement system can move in the transverse direction along the film while the film is on the line, thereby measuring the optical property of the film in real time at various locations on the film in both the transverse and machine direction.

In equipment that supplies a processing liquid on a top surface of a substrate while holding the substrate horizontally in a chamber a generation status of fumes is determined. Specifically, an image of a predetermined imaging area in the chamber is captured. Then, the generation status of fumes in the chamber is determined based on luminance values of the captured image acquired by the capturing of an image. Accordingly, it is possible to quantitatively determine whether a generation status of fumes in a chamber is normal.

A method for determining the size of a void-type defect in a top side of a structure comprising a top layer placed on a substrate, the defect being located in the top layer, includes introducing the structure into a reflected darkfield microscopy device in order to generate, from a light ray scattered by the top side, a defect-related first signal and a roughness-related second signal. The intensity of the roughness-related second signal is captured with a plurality of pixels. The intensity captured by each pixel is compared with the intensities captured by neighboring pixels. It is defined whether or not the pixel is contained in an abnormal zone. The standard deviation of the intensity values captured by the pixels of the abnormal zone is extracted, and the size of the void-type defect associated with the abnormal zone is determined from the extracted standard deviation. A new device may be used for carrying out such a method.

In equipment that supplies a processing liquid on a top surface of a substrate while holding the substrate horizontally in a chamber a generation status of fumes is determined. Specifically, an image of a predetermined imaging area in the chamber is captured. Then, the generation status of fumes in the chamber is determined based on luminance values of the captured image acquired by the capturing of an image. Accordingly, it is possible to quantitatively determine whether a generation status of fumes in a chamber is normal.

A method for determining the size of a void-type defect in a top side of a structure comprising a top layer placed on a substrate, the defect being located in the top layer, includes introducing the structure into a reflected darkfield microscopy device in order to generate, from a light ray scattered by the top side, a defect-related first signal and a roughness-related second signal. The intensity of the roughness-related second signal is captured with a plurality of pixels. The intensity captured by each pixel is compared with the intensities captured by neighboring pixels. It is defined whether or not the pixel is contained in an abnormal zone. The standard deviation of the intensity values captured by the pixels of the abnormal zone is extracted, and the size of the void-type defect associated with the abnormal zone is determined from the extracted standard deviation. A new device may be used for carrying out such a method.

A method includes illuminating a material with first light along an optical path. The method also includes capturing an image of second light transmitted through the material using a first detector, where a first portion of the second light follows the optical path of the first light and a second portion of the second light diverges from the optical path. The method further includes capturing one or more measurements of third light using a second detector. The third light diverges from the optical path by a larger amount than the second portion of the second light, and the second detector is spaced apart from the first detector. In addition, the method includes determining one or more haze values associated with the material based on the image and the one or more measurements and at least one of storing and outputting the one or more haze values.