As a standard solution for evaluating a scattered light measuring optical system mounted on an automated analyzer, a standard solution containing an insoluble carrier at a concentration, at which transmittance is in a range of 10% to 50%, is used, and a light quantity of a light source is adjusted such that a scattered light detector outputs a predetermined value.

An information processing system includes an irradiation unit configured to irradiate a deposited material with electromagnetic waves, a detection unit configured to detect scattered waves or transmitted waves of the electromagnetic waves with which the deposited material has been irradiated by the irradiation unit, and a determination unit configured to determine a state of the deposited material from an image based on the scattered waves or the transmitted waves detected by the detection unit.

Combined electron beam overlay and scatterometry overlay targets include first and second periodic structures with gratings. Gratings in the second periodic structure can be positioned under the gratings of the first periodic structure or can be positioned between the gratings of the first periodic structure. These overlay targets can be used in semiconductor manufacturing.

Methods and systems for characterizing dimensions and material properties of semiconductor devices by transmission small angle x-ray scatterometry (TSAXS) systems having relatively small tool footprint are described herein. The methods and systems described herein enable Q space resolution adequate for metrology of semiconductor structures with reduced optical path length. In general, the x-ray beam is focused closer to the wafer surface for relatively small targets and closer to the detector for relatively large targets. In some embodiments, a high resolution detector with small point spread function (PSF) is employed to mitigate detector PSF limits on achievable Q resolution. In some embodiments, the detector locates an incident photon with sub-pixel accuracy by determining the centroid of a cloud of electrons stimulated by the photon conversion event. In some embodiments, the detector resolves one or more x-ray photon energies in addition to location of incidence.

This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.

An optical sensing system includes at least one electro-optical sensor having an adjustable field of view and at least one reflective member including a diffuse reflector surface positioned within the field of view of the at least one electro-optical sensor. The system also includes at least one controller configured to generate calibration parameters for the at least one electro-optical sensor based on data for at least one exposure detected by the electro-optical sensor when the diffuse reflector surface is within the field of view of the at least one electro-optical sensor. Methods for calculating the calibration parameters and for directly measuring reflectivity of objects in a scene with at least one electro-optical sensor are also disclosed herein.

A detector device for the remote analysis of materials, in particular hazardous materials, including at least one laser, which is designed to emit pulsed laser light onto a sample located at a detection distance, and a telescope, which is designed to collect and/or focus laser light scattered on the sample and to forward the scattered laser light into an optical spectrometer. The optical spectrometer is designed for a spectral analysis of the laser light scattered on the sample. The laser is followed by a first beam path with a first reference beam and an additional beam path with a second reference beam for the scattered laser light. A unit is provided for determining a time difference between pulses of the first reference beam and pulses of the second reference beam, wherein the detection distance can be determined from the time difference. The unit is designed to determine the detection distance in real-time.

A method for true-to-sample measurement by a mobile ingredient analysis system having a housing with a window, an interface for an external reference unit, a display and operating unit, a light source, an optical spectrometer, a camera, an internal reference unit, and an electronic control unit. The method includes: selecting a calibration product suitable for a sample to be examined; performing a plausibility check of the calibration product, an incorrect selection being signaled and an alternative calibration product being selected; outputting measurement conditions comprising the measurement point to be selected and measurement duration for the selected calibration product; capturing measured values of the sample by the spectrometer under the measurement conditions and with simultaneous monitoring of the measurement conditions; processing the captured measured values by means of an electronic control unit, each measured value captured while the measurement conditions were met being declared valid; outputting the measured values deemed valid.

A system for calibrating a device for measuring materials concentration in the blood is disclosed. The system may include at least two sets of calibrating elements, each set may include a plurality of calibrating elements. Each of the calibrating elements in the sets may include, a first layer simulating a specific human skin characteristics; and a second layer consisting a specific concentration of one or more materials in the blood. For all calibrating elements in a set the first layer may be the same first layer simulating the same human skin characteristics such that each set of calibrating elements simulate different skin characteristics. Each calibrating element in a set of calibrating elements may include a different second layer consisting a different concentration of the one or more materials. The system may further include a controller.

An apparatus for performing diffuse optical imaging of a patient, said apparatus comprising: a computer; at least one sensor module comprising at least one optical source, at least one photodetector, and calibration data specific to said at least one sensor module; means for communicating between said computer and said at least one sensor module; means for automatically accessing said calibration data; and means for adjusting said apparatus in order to produce calibrated measurements.