Patent classifications
G01N21/94
Wafer drying system
A wafer drying method that detects molecular contaminants in a drying gas as a feedback parameter for a multiple wafer drying process is disclosed. For example, the method includes dispensing, in a wafer drying module, a drying gas over a batch of wafers. Further, the method includes collecting the drying gas from an exhaust of the wafer drying module and determining the concentration of contaminants in the drying gas. The method also includes re-dispensing the drying gas over the batch of wafers if the concentration of contaminants is greater than a baseline value and transferring the batch of wafers out of the wafer drying module if the concentration is equal to or less than the baseline value.
Wafer drying system
A wafer drying method that detects molecular contaminants in a drying gas as a feedback parameter for a multiple wafer drying process is disclosed. For example, the method includes dispensing, in a wafer drying module, a drying gas over a batch of wafers. Further, the method includes collecting the drying gas from an exhaust of the wafer drying module and determining the concentration of contaminants in the drying gas. The method also includes re-dispensing the drying gas over the batch of wafers if the concentration of contaminants is greater than a baseline value and transferring the batch of wafers out of the wafer drying module if the concentration is equal to or less than the baseline value.
Hyperspectral Sensing System and Method for Qualitative Analysis of Fluids
A system and method using remote sensing instrument with hyper spectrum quantitatively measure metal dust elements in lubricating oil, which includes (no limited): Al, Cd, Cr, Cu, Fe, Pb, Mg, Mn, Mo, Ni, Ag, Sn, Ti, V, Zn, B (Boron, for Coolant), Ca (Calcium for water contaminant), and particle size, cone penetration, dropping point, steel mesh oil separation, moisture, PQ concentration, in few seconds. The instrument integrates near-field communication (NFC), Internet of Thing (IoT), Cloud computing, spectral matching and other data processing, and application software forming a system to easily operated and build a model enable self-learning to improve precision through collection accumulation. With the system, the instrument as FIG. 1 can provide comprehensive on-site analysis enable preventive maintenance of mission critical engine and rotating equipment. The characteristics of the system are easy to operate, get result quickly, and self-learning to improve precision.
Hyperspectral Sensing System and Method for Qualitative Analysis of Fluids
A system and method using remote sensing instrument with hyper spectrum quantitatively measure metal dust elements in lubricating oil, which includes (no limited): Al, Cd, Cr, Cu, Fe, Pb, Mg, Mn, Mo, Ni, Ag, Sn, Ti, V, Zn, B (Boron, for Coolant), Ca (Calcium for water contaminant), and particle size, cone penetration, dropping point, steel mesh oil separation, moisture, PQ concentration, in few seconds. The instrument integrates near-field communication (NFC), Internet of Thing (IoT), Cloud computing, spectral matching and other data processing, and application software forming a system to easily operated and build a model enable self-learning to improve precision through collection accumulation. With the system, the instrument as FIG. 1 can provide comprehensive on-site analysis enable preventive maintenance of mission critical engine and rotating equipment. The characteristics of the system are easy to operate, get result quickly, and self-learning to improve precision.
Oil soluble taggants
A process for detecting oil or lubricant contamination in the production of an article by adding a Stokes-shifting taggant to an oil or lubricant of a machine utilized to produce the article or a component thereof, irradiating the articles produced with a first wavelength of radiation, and monitoring the articles for emission of radiation at a second wavelength. The taggant can be in the form of a composition containing a Stokes-shifting taggant, which absorbs radiation at a first wavelength and emits radiation at a second wavelength, different from said first wavelength, dissolved or dispersed in an oil or lubricant.
Oil soluble taggants
A process for detecting oil or lubricant contamination in the production of an article by adding a Stokes-shifting taggant to an oil or lubricant of a machine utilized to produce the article or a component thereof, irradiating the articles produced with a first wavelength of radiation, and monitoring the articles for emission of radiation at a second wavelength. The taggant can be in the form of a composition containing a Stokes-shifting taggant, which absorbs radiation at a first wavelength and emits radiation at a second wavelength, different from said first wavelength, dissolved or dispersed in an oil or lubricant.
METHOD FOR MANAGING LUBRICANT OIL, AND METHOD FOR PREDICTING LIFE OF LUBRICANT OIL
A management method of a lubricating oil of the invention is a method of managing a lubricating oil by determining a degradation degree of the lubricating oil containing an antioxidant, specifically, according to determination methods a and b below. The determination method a includes: measuring an infrared ray absorption spectrum of the lubricating oil using a Fourier transform infrared spectrometer; and calculating a total content of the antioxidant and an altered substance having an antioxidant function to determine a deterioration degree of the lubricating oil from the obtained content. The determination method b includes: filtrating the lubricating oil with a filter; subsequently measuring a color difference of substances captured by the filter using a colorimeter, or measuring a color difference of the lubricating oil using the colorimeter; and determining a degradation degree of the lubricating oil and a mixture degree of foreign substances based on the obtained color difference.
METHOD FOR MANAGING LUBRICANT OIL, AND METHOD FOR PREDICTING LIFE OF LUBRICANT OIL
A management method of a lubricating oil of the invention is a method of managing a lubricating oil by determining a degradation degree of the lubricating oil containing an antioxidant, specifically, according to determination methods a and b below. The determination method a includes: measuring an infrared ray absorption spectrum of the lubricating oil using a Fourier transform infrared spectrometer; and calculating a total content of the antioxidant and an altered substance having an antioxidant function to determine a deterioration degree of the lubricating oil from the obtained content. The determination method b includes: filtrating the lubricating oil with a filter; subsequently measuring a color difference of substances captured by the filter using a colorimeter, or measuring a color difference of the lubricating oil using the colorimeter; and determining a degradation degree of the lubricating oil and a mixture degree of foreign substances based on the obtained color difference.
APPARATUS FOR OPTICAL DETECTION OF BIO-CONTAMINANTS BASED UPON MEASUREMENT OF SATURATION OF LIGHT INTENSITIES AT FLUORESCENCE WAVELENGTH RELATIVE TO LIGHT INTENSITIES AT A PREDETERMINED WAVELENGTH
A method for optical detection of residual soil on articles (such as medical instruments and equipment), after completion of a washing or a rinsing operation by a washer. A soil detection system provides an indication of soil on the articles by detecting luminescent radiation emanating from the soil in the presence of ambient light.
APPARATUS FOR OPTICAL DETECTION OF BIO-CONTAMINANTS BASED UPON MEASUREMENT OF SATURATION OF LIGHT INTENSITIES AT FLUORESCENCE WAVELENGTH RELATIVE TO LIGHT INTENSITIES AT A PREDETERMINED WAVELENGTH
A method for optical detection of residual soil on articles (such as medical instruments and equipment), after completion of a washing or a rinsing operation by a washer. A soil detection system provides an indication of soil on the articles by detecting luminescent radiation emanating from the soil in the presence of ambient light.