Optical sample characterization facilitates measurement and testing at any angle in a full range of angles of light propagation through an optical sample, such as a coated glass plate, having a higher than air index of refraction. A rotatable assembly includes a cylinder having a hollow, and a receptacle including the hollow. The receptacle also contains a fluid with a known refractive index. An optical light beam is input normal to the surface of the cylinder, travels through the cylinder, then via the fluid, to the optical sample, where light beam is transmitted and/or reflected, then exits the cylinder and is collected for analysis. Due at least in part to the fluid surrounding the optical sample, the optical sample can be rotated through a full range of angles (±90°, etc.) for full range testing of the optical sample.

Optical sample characterization facilitates measurement and testing at any angle in a full range of angles of light propagation through an optical sample, such as a coated glass plate, having a higher than air index of refraction. A rotatable assembly includes a cylinder having a hollow, and a receptacle including the hollow. The receptacle also contains a fluid with a known refractive index. An optical light beam is input normal to the surface of the cylinder, travels through the cylinder, then via the fluid, to the optical sample, where light beam is transmitted and/or reflected, then exits the cylinder and is collected for analysis. Due at least in part to the fluid surrounding the optical sample, the optical sample can be rotated through a full range of angles (±90°, etc.) for full range testing of the optical sample.

A system for inspecting thin glass includes: a housing including a body and a cover; a first shuttle which fixes an edge portion of the thin glass and reciprocates in a first axis direction; a first inspection part disposed on the body and which measures a position of a defect formed in the thin glass by taking a picture of the thin glass; a transport shuttle which separates the thin glass from the first shuttle, a second shuttle which separates the thin glass from the transport shuttle, fixes the thin glass, and reciprocates the upper surface of the body; and a second inspection part disposed on the body and spaced apart from the first inspection part and which inspects the position of the defect by taking an enlarged picture of the position of the defect. The first shuttle tensions and fixes the thin glass.

A system for inspecting thin glass includes: a housing including a body and a cover; a first shuttle which fixes an edge portion of the thin glass and reciprocates in a first axis direction; a first inspection part disposed on the body and which measures a position of a defect formed in the thin glass by taking a picture of the thin glass; a transport shuttle which separates the thin glass from the first shuttle, a second shuttle which separates the thin glass from the transport shuttle, fixes the thin glass, and reciprocates the upper surface of the body; and a second inspection part disposed on the body and spaced apart from the first inspection part and which inspects the position of the defect by taking an enlarged picture of the position of the defect. The first shuttle tensions and fixes the thin glass.

Disclosed are a device and method for detecting a subsurface defect of an optical component. According to the device and method, a spectral confocal technology, a laser scattering technology and a laser-induced ultrasonic technology are combined, excitation laser and detection laser are simultaneously focused to different depths of the optical component through a dispersion lens set, the excitation laser generates a transient thermal expansion effect on a subsurface of the optical component, the detection laser is used for observing and analyzing ultrasonic vibration of the subsurface defect under an action of the thermal expansion effect, and spatial distribution information and scattered spectral information of scattered light at a position of the subsurface defect are acquired by the spectral confocal technology. The device and method are suitable for nondestructive testing of a finished product of an ultra-precise optical component with a strict requirement on the subsurface defect.

Disclosed are a device and method for detecting a subsurface defect of an optical component. According to the device and method, a spectral confocal technology, a laser scattering technology and a laser-induced ultrasonic technology are combined, excitation laser and detection laser are simultaneously focused to different depths of the optical component through a dispersion lens set, the excitation laser generates a transient thermal expansion effect on a subsurface of the optical component, the detection laser is used for observing and analyzing ultrasonic vibration of the subsurface defect under an action of the thermal expansion effect, and spatial distribution information and scattered spectral information of scattered light at a position of the subsurface defect are acquired by the spectral confocal technology. The device and method are suitable for nondestructive testing of a finished product of an ultra-precise optical component with a strict requirement on the subsurface defect.

Methods of autonomous diagnostic verification and detection of defects in the optical components of a vision-based inspection system are provided. The method includes illuminating a light panel with a first light intensity pattern, capturing a first image of the first light intensity pattern with a sensor, illuminating the light panel with a second light intensity pattern different than the first light intensity pattern, capturing a second image of the second light intensity pattern with the sensor, comparing the first image and the second image to generate a comparison of images, and identifying defects in the light panel or the sensor based upon the comparison of images. Systems adapted to carry out the methods are provided as are other aspects.

An object of the present invention is to provide a safety cabinet that allows a clearer observation of contamination of an operation stage surface. In order to realize the object, the safety cabinet is configured to include an operation space including an operation stage; a front panel formed in a front surface of the operation space; an operation opening provided in a lower portion of the front panel; a suction port that is provided in the vicinity of the operation opening on a front side of the operation stage to lead downward; and an air circulation path through which air suctioned from the suction port flows along a lower portion, a back surface, and an upper portion of the operation space, in which the operation stage is made of a transparent material, and a light source is provided to irradiate the operation stage with a light from a side of the operation stage, which is opposite to the operation space.

Block-to-block reticle inspection includes acquiring a swath image of a portion of a reticle with a reticle inspection sub-system, identifying a first occurrence of a block in the swatch image and at least a second occurrence of the block in the swath image substantially similar to the first occurrence of the block and determining at least one of a location, one or more geometrical characteristics of the block and a spatial offset between the first occurrence of the block and the at least a second occurrence of the block.

Block-to-block reticle inspection includes acquiring a swath image of a portion of a reticle with a reticle inspection sub-system, identifying a first occurrence of a block in the swatch image and at least a second occurrence of the block in the swath image substantially similar to the first occurrence of the block and determining at least one of a location, one or more geometrical characteristics of the block and a spatial offset between the first occurrence of the block and the at least a second occurrence of the block.